USP_6887801 (1063233)
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US006887801B2(12) United States Patent(10) Patent N0.:(45) Date of Patent:Li(54)EDGE BEAD CONTROL METHOD ANDUS 6,887,801 B2May 3, 2005OTHER PUBLICATIONSAPPARATUSBanWell et al., “VCSE Laser Transmitters for Parallel Data(75) Inventor: Bernard Q. Li, Plymouth, MN (US)(73) Assignee: Finisar Corporation, Sunnyvale, CALinks”, IEEE Journal of Quantum Electronics, vol. 29, No.2, Feb. 1993, pp. 635—644.BoWers et al., “Fused Vertical Cavity Lasers With OxideAperture”, Final report for MICRO project 96—042, Indus(Us)trial Sponsor: HeWlett Packard, 4 pages, 1996—97.(*)Notice:Subject to any disclaimer, the term of thispatent is extended or adjusted under 35Vertical Cavity Top Surface—Emitting Lasers”, CLEO 1993,U.S.C.
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One embodiment includes an appa(contlnued)ratus for holding a Wafer. The holding apparatus includes aFOREIGN PATENT DOCUMENTSpocket for receiving a Wafer, and may include a mechanismalloWlng for the Wafer to be secured Wlthln the pocket.DEEPEP4240706 A10288184 A20776076 A16/199410/19885/1997JP601230841/1985JP020549812/1990JP529977911/1993WO 98/5740212/1998W0Catchmark et al., “High Temperature CW Operation of70Methods are also included for preparing a Wafer for fabrication processes by the use of a Wafer holding apparatus.These methods may include applying a layer of photoresistto the surface of a Wafer'17 Claims, 3 Drawing Sheets58 5652 q58 56/\ 50l68664/ / a“we?\\//////////4l///J*1_.._lCL"_JD55US 6,887,801 B2Page 2US.
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