DS_Delta12AQ (1063225)
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Different dispense technologies like the high-pressurespray, megasonic nozzles, binary nozzles or PIRANHASC 1 nozzles are available as options and assure a highquality cleaning, etching and/or developing process.It is also possible to integrate a temperature control forchemicals for improved process control.To receive a quote from your localsales office go to: www.suss.comor send an email to: info@suss.comLithography■Substrates up to 얒 12앨 (얒 300 mm)and substrates / masks up to 9앨쎹9앨(230쎹230 mm)■Integrated into a stand-alone stainlesssteel cabinet■Easy to maintain■For developer and aggressive acids■Fragile substrate processing(e.g.
InP, GaAs)■Programmable acceleration and deceleration ramp■Dry wafer in / dry wafer out■Brushless servo motor with resolver■Spin speed up to 4.000 rpm■Programmable electronic dispense arm■Up to 20 programmable recipes■Up to 40 steps each recipe■Diagnostic system with clear text■Backlit graphic LCD displayWet ProcessingThe cabinet of the DELTA 12 AQ and all parts, which arein contact with process chemicals, are made of polypropylene (PP) or similar materials. For safety reasons automatic process chamber doors with safety interrupt sensors are integrated.Features and benefitsTestingThe DELTA 12 AQ meets all expectations of a moderndeveloping and etching spinner for processing substratesup to Ø 12씵 (Ø 300 mm) or substrates/masks up to9씵҂9씵 (230҂230 mm), with all the advantages of a functional and modern designed aesthetically pleasing systemcabinet.BondingDevelop, Etch, CleanSystem Configuration• The Delta12AQ system is integrated into a standalone cabinet with wheels and adjustable feets• The two front doors with tinted viewing windowsallow the operator user friendly control of all instruments and additional options• Substrates up to 쏗 12씵 (쏗 300 mm) andsubstrates / masks up to 9씵҂9씵 (230҂230 mm)• Drain separation• Closed process chamber made from polypropylene• Safety interlocked doors• Programmable electronic dispense arm• All process parameters programmable• The display shows:Process program, process steps, process time,spin speed, acceleration and outputs• Backlit LCD display with 240҂64 pixel• Display front side is made from polyester• Acceleration and deceleration ramps are programmable• Up to 8 outputs are programmable for furtheroptions• Failure diagnostics with clear textRequirements••••Voltage: 400 VAC / 50 Hz / 32 ACompressed air: 5– 6 barVacuum: min.
– 0.7 barExhaust: OD 100 mm (3x)Options•••••••••Temperature control for chemicalsChemical storage in separate cabinetAtomizing nozzlesSpray nozzlesMegasonic nozzleHigh pressure cleaning nozzleDifferent chucksEthernet interfaceCustomized options availableASIASUSS MicroTec KK (Japan)GITC 1-18-2, Hakusan, Midori-kuYokohama, Kanagawa, Japan 226-0006Phone (+81)-45-931-5600 · Fax (+81)-45-931-5601SUSS MicroTec (Shanghai) Co., Ltd.580 Nanjing W. RdNanzheng Building Room 606 · 200041 Shanghai PRCPhone (+86) 21-52340432 · Fax (+86) 21-52340430SUSS MicroTec (Taiwan) Co., Ltd.8F-11 · No. 81 · Shui-Lee RoadHsin-Chu · 300 · TaiwanPhone (+886)-(3)-5169098 · Fax (+886)-(3)-5169262SUSS MicroTec Co., LTD (South and Northeast Asia)3388/92-93 · 25th Floor · Sirinrat BuildingRama IV Road · Klongtoey · Bangkok 10110 · ThailandPhone (+66)-(0)-2350 6038 · Fax (+66)-(0)-2633 5728EUROPESUSS MicroTec Ltd.Unit 1 Scopwick Lodge FarmScopwick Heath’ · Lincolnshire LN4 3DL · EnglandPhone (+44)-(0) 1526-323147 · Fax (+44)-(0) 1526-322214SUSS MicroTec S.A.S.BP24 · 131 Impasse Barteudet · F-74490 Saint Jeoire · FrancePhone (+33)-(0) 4 50 35 83 92 · Fax (+33)-(0) 4 50 35 88 01SUSS MicroTec Test Systems GmbHSüss-Strasse 1 · D-01561 Sacka/Dresden · GermanyPhone (+49)-(0) 35240-73-0 · Fax (+49)-(0) 35240-73-700SUSS MicroTec Lithography GmbHSchleissheimer Strasse 90D-85748 Garching/Munich · GermanyPhone (+49)-(0) 89/3 20 07- 0 · Fax (+49)-(0) 89/3 20 07-162Dimensions• Footprint (W҂D҂H):1200҂792҂1278 mm (47.2씵҂31.2씵҂48씵)NORTH AMERICASUSS MicroTec Inc.Western Regional Sales Office8240 So.
Kyrene Road Suite 101 · Tempe, AZ 85284-2117 · USAPhone (+1) (480) 557-9370 · Fax (+1) (480) 557-9371SUSS MicroTec Inc.228 Suss Drive · Waterbury Center, VT 05677 · USAPhone (+1) (802) 244-5181 · Fax (+1) (802) 244-5103Data, design and specification of custom built machinesdepend on individual process conditions and can varyaccording to equipment configurations. Not all specifications may be valid simultaneously. Illustrations in thisbrochure are not legally binding. SUSS reserves the rightto change machine specifications without prior notice..
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