DS_HP8_2013_V1_web (1063240)

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HP8Hot plateHP8 SolutionsFeatures andBenefitsOptions+ Up to 200 mm substrates round or 6" square+ Homogeneous temperature distribution+ Fast heating+ High-performance protection coating of hot plate surface+ Easy to use graphical touch screen interface+ Perfectly matches the RCD8 or LabSpin tools:+ Same footprint+ Same look & feel+ Same reliability+ Programmable heating ramp(with dedicated touch panel controller)+ Various mounting options:+ Bench Mount (BM)+ TableTop (TT)+ Standalone (T)+ Nitrogen Purge+ Lift pins+ Proximity bakeDedicated solution designed for r&D, laboratories andsmall scale productionSUSS MicroTec‘s manual hot plate HP8 has been developedspecifically to meet the requirements of R&D work and smallscale production.

The 200 mm hot plate (HP8) offers homogeneous temperature distribution as well as heating rampswith high repeating accuracy to ensure constant and stableprocess results.plate surface by a micrometer, thus, giving a broad capability ofprocessing options. The flow rate of the nitrogen purge option canbe manually adjusted and is indicated by a digital display.

Nitrogenpurge and vacuum suction of the substrate can be individuallyselected for each step in the recipe editor. The closed doublewalled lid, ensures stable process conditions and preventsaccidental touching of the hot surface by the operator.To aim for best in class temperature distribution SUSS HP8 doesn’trely on conventional heating cartridges.

Instead, several metersof heating coils are arranged within the base plate in a processproven pattern. This avoids hot or cool spots and ensures a uniformtemperature distribution. The hot plate is specifically coated forincreased mechanical and chemical resistance and easy cleaning.The tool is offered in three different housings (bench mount, tabletop and stand alone) and can be conveniently controlled througha dedicated touch screen controller. If combined with the coat anddevelop platform RCD8, the HP8 can be optionally controlled usingthe same touch screen PC as the RCD8.

The table top and benchmount version fits the SUSS MicroTec LabSpin series nicely as wellin size and look & feel.Not only the form factor and control possibilities offer high flexibility,but the variety of available options such as lift pins, proximity bakeand nitrogen purge perfectly adapt to the daily lab needs.The hot plate is equipped with lift pins as a standard, whichpermits convenient and safe substrate handling. The proximityoption allows setting of the distance between substrate and hotDisplay of SUSS HP8www.suss.comHot plateThe SUSS HP8 is available in three different versions: as a tabletop (TT) unit, for integration into a wet bench (BM) or as a standalone machine.Bench Mount (BM)Table Top (TT)Stand Alone (T)technical dataGeneralWafer SizeUp to 200 mm round or 6" squareUser InterfaceDedicated touch panel controller# of Recipesmax.

200# of Steps/Recipemax. 40Step Time0 - 999 s in 1 s stepsOptional User InterfaceVia controller of SUSS RCD8 tool# of Recipes>1000# of Steps/Recipemax. 50Step Time0 - 999 s in 1 s stepsOutputsVacuumNitrogen purge (optional)Easy HandlingVia 3 lift pinsTemperatureUp to 250 °CTemperature Uniformity+/-0.5 °C up to 120 °C+/-1 % for 120 °C and aboveProgrammable Heating Ramp1 °C/min up to 10 °C/min(with dedicated touch panel controller)OptionsProximity setting > 0.1 mmNitrogen purgeVersionsBM, TT, TTool SizeDependent on Configuration(w x l x h)HP8 BM (370 mm x 390 mm x 330 mm)HP8 TT (370 mm x 470 mm x 420 mm)HP8 T (600 mm x 710 mm x 1050 mm)Data, design and specification depend on individual process conditions and can vary according toequipment configurations. Not all specifications may be valid simultaneously. Illustrations, photosand specifications in this brochure are not legally binding.

SUSS MicroTec reserves the right to changemachine specifications without prior notice.TOUCH SCREEN CONTROLLERThe dedicated touch screen controller allows convenient editingof the recipes with the capability to choose time, temperature,heating ramps and switched on vacuum or nitrogen purge individually for each step.Visit www.suss.com/locations for your nearest SUSS representativeor contact us:HP8 · 01/2013 · DS_HP8_2013 · V1SÜSS MicroTec AGPhone: +49 89 32007-0E-Mail: info@suss.comScreenshot of touchscreen panel with intuitive graphical user interfacewww.suss.com.

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