DS_Delta12L (1063226)
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LithographyBondingLift-off, Develop,Clean, Resist StripThe cabinet of the DELTA 12 L and all parts, which arein contact with process chemicals, are made of stainlesssteel. For safety reasons an automatic process chamberdoor with a safety interrupt sensor is integrated.Different cleaning technologies like the high-pressurespray or megasonic nozzle are available as options andassure a high quality cleaning process. It is also possibleto integrate a temperature control for chemicals.To receive a quote from your localsales office go to: www.suss.comor send an email to: info@suss.com■High pressure spray option for lift-off,cleaning, and resist strip■Wafer size up to 얒 12앨 (얒 300 mm)■Substrates / masks size up to9앨쎹9앨 (230쎹230 mm)■Fragile substrate processing(e.g. InP, GaAs)■Easy to maintain■For solvent applications such as lift-offwith nMP or solvent develop, resist strip,clean■Brushless servo motor with resolver■Spin speed up to 4.000 rpm■Programmable acceleration and deceleration ramp■Up to 20 programmable recipes■Up to 40 steps each recipe■Diagnostic system with clear text■Dry wafer in / dry wafer out■Optional gas sensor■Optional recirculation■Repeatable single wafer processingTestingThe DELTA 12 L meets all expectations of a modernsolvent spin processor for substrates up to Ø 12씵(Ø 300 mm) or substrates up to 9씵҂9씵 (230҂230 mm),with all the advantages of a functional and moderndesigned aesthetically pleasing system cabinet.Wet ProcessingFeatures and benefitsSystem Configuration• The Delta12L system is integrated into a standalone cabinet with wheels and adjustable feets• The front door with tinted viewing windows allowthe operator user friendly control of all instrumentsand additional options• Closed process chamber with safety door madeof stainless steel and safety glass• Backlit LCD display with 240҂64 pixel• Programmable DELTA controller• Standard user interface• All process parameters are password protected• Up to 8 programmable outputs for customizedoptions• All supplying connectors are located on the backsideof the moduleRequirements••••Voltage: 400 VAC / 50 Hz / 16 ACompressed air: 5– 6 barVacuum: min.
– 0.7 barExhaust: OD 100 mm (3x)ASIASUSS MicroTec KK (Japan)GITC 1-18-2, Hakusan, Midori-kuYokohama, Kanagawa, Japan 226-0006Phone (+81)-45-931-5600 · Fax (+81)-45-931-5601SUSS MicroTec (Shanghai) Co., Ltd.580 Nanjing W. RdNanzheng Building Room 606 · 200041 Shanghai PRCPhone (+86) 21-52340432 · Fax (+86) 21-52340430SUSS MicroTec (Taiwan) Co., Ltd.8F-11 · No. 81 · Shui-Lee RoadHsin-Chu · 300 · TaiwanPhone (+886)-(3)-5169098 · Fax (+886)-(3)-5169262SUSS MicroTec Co., LTD (South and Northeast Asia)3388/92-93 · 25th Floor · Sirinrat BuildingRama IV Road · Klongtoey · Bangkok 10110 · ThailandPhone (+66)-(0)-2350 6038 · Fax (+66)-(0)-2633 5728EUROPEOptions•••••••••••••••Programmable electronic dispense armSyringe / Cartridge dispense systemsStationary nozzlesLow or high-pressure sprayHeating options for chemicalsHigh process spray up to 150 bar for lift-off, cleaningand photoresists stripFan spray nozzles; puddle/stream dispenseAtomizing nozzlesMegasonic nozzle cleanSeparate media cabinetDrain separationDifferent media filtersDifferent chucksNotebook for easy recipe programming and storingCustomized options availableSUSS MicroTec Ltd.Unit 1 Scopwick Lodge FarmScopwick Heath’ · Lincolnshire LN4 3DL · EnglandPhone (+44)-(0) 1526-323147 · Fax (+44)-(0) 1526-322214SUSS MicroTec S.A.S.BP24 · 131 Impasse Barteudet · F-74490 Saint Jeoire · FrancePhone (+33)-(0) 4 50 35 83 92 · Fax (+33)-(0) 4 50 35 88 01SUSS MicroTec Test Systems GmbHSüss-Strasse 1 · D-01561 Sacka/Dresden · GermanyPhone (+49)-(0) 35240-73-0 · Fax (+49)-(0) 35240-73-700SUSS MicroTec Lithography GmbHSchleissheimer Strasse 90D-85748 Garching/Munich · GermanyPhone (+49)-(0) 89/3 20 07- 0 · Fax (+49)-(0) 89/3 20 07-162Dimensions• Footprint (W҂D҂H):1200҂792҂1278 mm (47.2씵҂31.2씵҂48씵)NORTH AMERICASUSS MicroTec Inc.Western Regional Sales Office8240 So.
Kyrene Road Suite 101 · Tempe, AZ 85284-2117 · USAPhone (+1) (480) 557-9370 · Fax (+1) (480) 557-9371SUSS MicroTec Inc.228 Suss Drive · Waterbury Center, VT 05677 · USAPhone (+1) (802) 244-5181 · Fax (+1) (802) 244-5103Data, design and specification of custom built machinesdepend on individual process conditions and can varyaccording to equipment configurations. Not all specifications may be valid simultaneously. Illustrations in thisbrochure are not legally binding. SUSS reserves the rightto change machine specifications without prior notice..
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