Плазменно и термически стимулированное осаждение алмазных пленок многомерные модели химических реакторов (1097823), страница 33

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Реакционный механизм для нейтральных и заряженных компонент.Реакции, коэффициенты скоростей реакцийAbE,Примеbкал/моль чанияk=A×T exp(-E/(RT)),Единицы К, см, кал, моль, R=1.987262 кал/(моль K)1 H + H + H2↔H2 + H29E+16-0.6012 H + CH↔C + H21.65E+140013 H + CH2(S)↔CH + H23E+130014 H + CH3 + (M)↔CH4 + (M)1.39E+16-0.5345361LOW 2.62E+33 -4.760 2440.00TROE 0.7830 74.

2941. 6964.H2 2.00 H2O 6.00 CH4 2.00 CO 1.50 CO2 2.00 C2H6 3.00 Ar 0.70 C2H2 2. H 1.5 H + CH4↔CH3 + H26.6E+081.621084016 H + C2H2 + (M)↔C2H3 + (M)5.6E+12024001LOW 3.8E+40 -7.27 7220.00TROE 0.7507 98.5 1302. 4167.H2 2.00 H2O 6.00 CH4 3.00 CO 1.50 CO2 2.00 C2H6 3.00 Ar 0.70 C2H2 2. H 1.7 H + C2H3↔H2 + C2H23E+130018 H + C2H4 + (M)↔C2H5 + (M)5.4E+110.45418201LOW 0.6E+42 -7.62 6970.00TROE 0.9753 210. 984. 4374.H2 2.00 H2O 6.00 CH4 2.00 CO 1.50 CO2 2.00 C2H6 3.00 Ar 0.70 C2H2 2. H 1.9 H + C2H4↔C2H3 + H213250002.5312240110 H + C2H5↔H2 + C2H42E+1200111 H + C2H6↔C2H5 + H21.15E+081.97530112 C + CH2↔H + C2H5E+1300113 C + CH3↔H + C2H25E+1300114 CH + H2↔H + CH21.08E+1403110115 CH + CH2↔H + C2H24E+1300116 CH + CH3↔H + C2H33E+1300117 CH + CH4↔H + C2H46E+1300118 CH2 + H2↔H + CH350000027230119 CH2 + CH2↔H2 + C2H21.6E+15011944120 CH2 + CH3↔H + C2H44E+1300121 CH2(S) + H2↔CH3 + H7E+1300122 CH2(S) + CH3↔H + C2H41.2E+130-570123 CH2(S) + CH4↔CH3 + CH31.6E+130-570124 CH3 + CH3 + (M)↔C2H6 + (M)6.77E+16-1.186541LOW 3.40E+41 -7.03 2762.0TROE 0.619 73.20 1180.00 9999.00H2 2.00 H2O 6.00 CH4 2.00 CO 1.50 CO2 2.00 C2H6 3.00 Ar 0.70 C2H2 2.

H 1.25 CH3 + CH3↔H + C2H56.84E+120.110600126 C2H + H2↔H + C2H25.68E+100.91993127 H + H + M↔H2 + M1E+18-101CH4 2.00 CO2 0.00 C2H6 3.00 Ar 0.63 C2H2 2. H 1.28 H + CH2 + (M)↔CH3 + (M)6E+14001LOW 1.04E+26 -2.760 1600.00TROE 0.562 91. 5836. 8552.H2 2.00 H2O 6.00 CH4 2.00 CO 1.50 CO2 2.00 C2H6 3.00 Ar 0.70 C2H2 2. H 1.29 H + C2H3 + (M)↔C2H4 + (M)6.08E+120.272801LOW 1.400E+30 -3.860 3320.00TROE 0.782 207.5 2663. 6095.H2 2.00 H2O 6.00 CH4 2.00 CO 1.50 CO2 2.00 C2H6 3.00 Ar 0.70 C2H2 2. H 1.30 H + C2H5 + (M)↔C2H6 + (M)5.21E+17 -0.9915801LOW 1.990E+41 -7.080 6685.00TROE 0.8422 125.

2219. 6882.H2 2.00 H2O 6.00 CH4 2.00 CO 1.50 CO2 2.00 C2H6 3.00 Ar 0.70 C2H2 2. H 1.31 CH2 + CH4↔CH3 + CH3246000028270132 C2H4 + (M)↔H2 + C2H2 + (M)8E+120.44867701LOW 1.580E+51 -9.30 97800.00TROE 0.7345 180. 1035. 5417.140333435363738394041424344454647484950515253545556575859606162636465666768697071H2 2.00 H2O 6.00 CH4 2.00 CO 1.50 CO2 2.00 C2H6 3.00 Ar 0.70 C2H2 2.

H 1.H + C2H + (M)↔C2H2 + (M)1E+17-101LOW 3.750E+33 -4.800 1900.00TROE 0.6464 132.0 1315. 5566.H2 2.00 H2O 6.00 CH4 2.00 CO 1.50 CO2 2.0 C2H6 3.00 Ar 1.74 C2H2 2. H 1.CH2(S) + C2H6↔CH3 + C2H54E+130-5501CH3 + C2H4↔C2H3 + CH4227000292001CH3 + C2H6↔C2H5 + CH461400001.74104501CH2(S) + M↔CH2 + M1.5E+1306002H2 2. CH4 2.0 C2H2 2.0 C2H4 2.0 C2H6 3.0 Ar 0.6 H2O 2.00 H 1.C2+M↔C2(X) + M ,1.8E+10003CH4 1. C2H2 1. C2H4 1. C2H6 1. Ar 0.5 C 1. CH3 1. C3 1. CH2(S) 1.

H 100.C + CH↔C2(X) + H2.5E+13000.5k12C + C2H↔C3 + H3.45E+14 -0.120 k41+k42C + C2H2↔C3H + H1.85E+14 -0.1204C + C2H2↔C3 + H21.6E+14 -0.1204CH + C2↔C3 + H7E+1300ОАCH + C2(X)↔C3 + H9E+1300ОАCH + C2H↔C3H + H1E+1400k46CH + C2H2↔C3H2 + H1E+14005C2 + CH2↔C3H + H7E+1300ОАC2 + CH3↔C3H2 + H7E+1300ОАC2 + C2H↔C4 + H6E+13006C2 + C2H2↔C4H + H6E+13003,6C2 + C4H↔C2H + C46E+13006C2H + H↔C2(X) + H23.6E+130282707C2(X) + CH2↔C3H + H1E+1400ОАC2(X) + CH3↔C3H2 + H1E+1400ОАC2(X) + C2H↔C4 + H1E+14006C2(X) + C2H2↔C4H + H1E+14003,6C2(X) + C4H↔C2H + C41E+14006C2H + C2H↔C4H + H6E+1300ОАC2H + C2H↔C2H2 + C29E+1100ОАC2H + C2H↔C2H2 + C2(X)9E+1100ОАC2H + C2H2↔C4H2 + H7.8E+13008C2H + C4H2↔C4H + C2H21E+1400ОАC2H2 + C2H2↔C4H2 + H21E+140522009C2 + C2↔C3 + C2E+140010C2(X) + C2↔C3 + C2E+140010C2(X) + C2(X)↔C3 + C2E+140010H + C2 + (M)↔C2H + (M)3E+16-10ОАLOW 1.1E+33 -4.800 1900.00TROE 0.6464 132.

1315. 5566.H2 2.00 H2O 6.00 CH4 2.00 CO 1.50 CO2 2.0 C2H6 3.00 Ar 1.74 C2H2 2. H 1.C + C + (M)↔C2 + (M)1.5E+16-10ОАLOW 0.55E+33 -4.800 1900.00TROE 0.6464 132. 1315. 5566.H2 2.00 H2O 6.00 CH4 2.00 CO 1.50 CO2 2.0 C2H6 3.00 Ar 1.74 C2H2 2. H 1.C + C + (M)↔C2(X) + (M)1.5E+16-10ОАLOW 0.55E+33 -4.800 1900.00TROE 0.6464 132. 1315. 5566.H2 2.00 H2O 6.00 CH4 2.00 CO 1.50 CO2 2.0 C2H6 3.00 Ar 1.74 C2H2 2. H 1.C + H + (M)↔CH + (M)2E+16-10ОАLOW 0.73E+33 -4.800 1900.00TROE 0.6464 132. 1315.

5566.H2 2.00 H2O 6.00 CH4 2.00 CO 1.50 CO2 2.0 C2H6 3.00 Ar 1.74 C2H2 2. H 1.C + C2 + (M)↔C3 + (M)1.5E+16-10ОАLOW 0.55E+33 -4.800 1900.00TROE 0.6464 132. 1315. 5566.14172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112H2 2.00 H2O 6.00 CH4 2.00 CO 1.50 CO2 2.0 C2H6 3.00 Ar 1.74 C2H2 2. H 1.C + C2(X) + (M)↔C3 + (M)6E+16-10LOW 2.2E+33 -4.800 1900.TROE 0.6464 132. 1315. 5566.H2 2.00 H2O 6.00 CH4 2.00 CO 1.50 CO2 2.0 C2H6 3.00 Ar 1.74 C2H2 2. H 1.C3 + CH↔C4 + H2E+1300C3 + CH2↔C4H + H2E+1300C3 + CH3↔C4H2 + H2E+1300C3H + H↔C3 + H21E+1400C3H + H2↔H + C3H23.08E+1403110H + C3H + (M)↔C3H2 + (M)1E+17-10LOW 3.750E+33 -4.800 1900.00TROE 0.6464 132.

1315. 5566.H2 2.00 H2O 6.00 CH4 2.00 CO 1.50 CO2 2.0 C2H6 3.00 Ar 1.74 C2H2 2. H 1.H + C3 + (M)↔C3H + (M)3E+14-10LOW 1.10E+31 -4.800 1900.00TROE 0.6464 132. 1315. 5566.H2 2.00 H2O 6.00 CH4 2.00 CO 1.50 CO2 2.0 C2H6 3.00 Ar 1.74 C2H2 2. H 1.H + C4 + (M)↔C4H + (M)3E+16-10LOW 1.10E+33 -4.800 1900.00TROE 0.6464 132. 1315.H2 2.00 H2O 6.00 CH4 2.00 CO 1.50 CO2 2.0 C2H6 3.00 Ar 1.74 C2H2 2. H 1.C4H + H↔C4 + H22E+1300C4H + H2↔C4H2 + H4100002.4200C4H + C4H↔C4 + C4H21.2E+1400H + C4H + (M)↔C4H2 + (M)1E+17-10LOW 3.750E+33 -4.800 1900.00TROE 0.6464 132.

1315. 5566.H2 2.00 H2O 6.00 CH4 2.00 CO 1.50 CO2 2.0 C2H6 3.00 Ar 1.74 C2H2 2. H 1.H(3)H(2) + hw4400000000→H(2)H + hwCij→H(2) + H2H+H+H7.2E+1000→H(3) + H2H+H+H1.1E+1100→Плазмохимический механизмH(2) + eH(3) + e1.99E+150.0343800→H(3) + eH(2) + e6.02E+140.080→H+eH(2)+e3.85E+150.11237000→H(2) + eH+e1.45E+150.082900→H(2) + ArArH+ + e1E+13016130→H(3) + ArArH+ + e1E+1300→H+eH+ + e + e3.85E+150.11316000→H(2) + eH+ + e + e6E+14078330→H(3) + eH+ + e + e6E+14034559→Ar+ + H2ArH++H2.36E+140.140→Ar+ + CHC+ + H + Ar4.74E+1400→Ar+ + CH2CH+ + H + Ar4.74E+1400→Ar+ + CH2(S)CH+ + H + Ar4.74E+1400→Ar+ + CH3CH2+ + H + Ar4.74E+1400→Ar+ + CH4CH3++H+Ar4.74E+1400→Ar+ + CH4CH2+ + H2 + Ar8.37E+1300→Ar+ + C2C2++Ar2.5E+1400→Ar+ + C2(X)C2+ + Ar2.5E+1400→Ar+ + C2HC2H+ + Ar2.5E+1400→Ar+ + C2H2C2H2+ + Ar2.5E+1400→Ar+ + C2H4C2H3+ + H + Ar5.23E+1400→Ar+ + C2H4C2H2++H2+Ar1.37E+1400→Ar+ + C3C3+ + Ar2.5E+1400→Ar+ + C3HC3H+ + Ar2.5E+1400→ОАОАОАОА66ОАОАОА5566.666ОА1112131314151415ОАОА14141416k103k103k103k10317171515151717171515142113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165H+ + CHH+ + CH2H+ + CH2H+ + CH2(S)H+ + CH2(S)H+ + CH3H+ + CH4H+ + C2H+ + C2(X)H+ + C2HH+ + C2HH+ + C2H2H+ + C2H2H+ + C3H+ + C3HH+ + C3HH+ + C3H2C+ + H2C+ + CHC+ + CHC+ + CH2C+ + CH2C+ + CH4C+ + CH4C+ + C2HC+ + C2H2CH+ + HCH+ + H2CH2+ + HCH2+ + H2CH2+ + CHCH2+ + CH2CH2+ + CH4CH2+ + CH4CH2+ + CH4CH3+ + HCH3+ + CHCH3+ + CH2C2+ + H2C2+ + H2C2H+ + H2C2H2+ + H2C2H2+ + CH4C3+ + H2H+ + Ar + ArH+ + Ar + H2H+ + Ar + HArH+ + MAr+ + e + eAr+ + e + eH+ + e + eH+ + e + eH+ + e + Ar→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→→CH+ + HCH+ + H2CH2+ + HCH+ + H 2CH2+ + HCH3+ + HCH3+ + H2C2+ + HC2+ + HC2+ + H2C2H+ + HC2H+ + H2C2H2+ + HC3+ + HC3+ + H2C3H+ + HC3H+ + H2CH+ + HC2+ + HCH+ + CCH2+ + CC2H+ + HC2H2+ + H2C2H3+ + HC3+ + HC3H+ + HC+ + H2CH2+ + HCH+ + HCH3+ + HC2H2+ + HC2H3+ + HC2H2+ + H2 + H2C2H3+ + H2 + HCH3+ + CH3CH2+ + HC2H2+ + H2C2H+ + H2C2H+ + HH+ + C2HC2H2+ + HC2H3+ + HC2H3+ + CH3C3H+ + HArH+ + ArArH+ + H2ArH+ + HAr + H+ + MAr + e + hwAr + eH(2) + eH(3) + eH(2) + Ar1.14E+158.4E+148.4E+148.4E+148.4E+142E+151.4E+151.86E+151.86E+159E+149E+141.2E+151.2E+151.2E+151.2E+151.2E+151.2E+159E+132.3E+142.3E+143.1E+143.1E+141.9E+145.8E+146E+141.32E+159E+137.2E+147.2E+144.2E+144.3E+146E+142.3E+141.4E+148.4E+134.2E+144.26E+146E+148.4E+149E+141E+153E+142.46E+151.8E+141.3E+211.3E+211.3E+213.6E+151.9E+265.0E+245.43E+242.46E+251.6E+2700000000000000000000000000000000000000000000-0.75-0.75-0.750-1.5-1.5-1.5-1.5-2.500000000000000000928000000000005400000000210000002500016000000092000000001818181818181818181818181818181818181818181818181818181818181918181818181919181818181918ОАОАОАОА2020ОАОАОА143166167168169170171172173174175176177178179180181182183184185186187188189190191192193194H+ + e + H2H+ + e + HH+ + e + ArH+ + e + H2H+ + e + HAr+ + e + HArH+ + eArH+ + eC+ + eCH+ + eCH2+ + eCH2+ + eCH3+ + eCH3+ + eC2+ + eC2H+ + eC2H+ + eC2H2+ + eC2H2+ + eC2H3+ + eC2H3+ + eC2H3+ + eC3+ + eC3H+ + eC3H+ + eH2 + eH- + HH- + eH- + M+→→→→→→→→→→→→→→→→→→→→→→→→→→→→→H(2) + H2H(2) + HH(3) + ArH(3) + H2H(3) + HAr + H(2)Ar + H(2)Ar + H(3)CC+HC + H2CH + HCH2 + HCH + H2C+CC2 + HCH + CC2H + HCH + CHC2H + HCH2 + CHC2H2 + HC2 + CC2 + CHC2H + CH- + HH2 + eH + 2eH(n>1) + M1.6E+271.6E+274E+274E+274E+275.6E+272.89E+142.89E+148.56E+139.9E+171.3E+181.3E+181.82E+181.82E+183.12E+181.4E+181.4E+181.56E+181.56E+181.4E+181.4E+181.4E+183.12E+181.56E+181.56E+181.45E+151.08E+154.52E+146.00E+16-2.5-2.5-2.5-2.5-2.5-2.50.0.-0.61-0.42-0.5-0.5-0.5-0.5-0.5-0.5-0.5-0.5-0.5-0.5-0.5-0.5-0.5-0.5-0.50.500.5000000002784000000000000000000764400444500ОАОАОАОАОАОА21ОА181818181818181818181818181818181822231423,24В СГС единицах коэффициенты скоростей k1[c-1], k2×NA [см3/с] и k3×NA2 [см6/с] для одно, двух и трех-частичныхреакций, соответственно, NA =6.022×1023 [моль-1] - число Авогадро.1Smith G.

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