Process Guidelines rev. 1 (1063229), страница 7
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How do I obtain access to the CNTech facilities?For CNTech students, understand your research goals and discuss any possibleproblems with Quinn Leonard. Go to the SRC and obtain a radiation badge. Also,contact Bruce Neumann, the SRC Safety Officer, for safety training. Then contactJanice Eddington for clean room training.For outside users, your principal investigator should contact Franco Cerrina or DonThielman.
Then follow the steps above.2. How do I obtain keys to the SRC and PSL Storeroom?A CNTech staff member must accompany you to the SRC Administration Office.Ask for Pam Layton or Michelle Kirch.3. Who do I contact for Clean Room Training?Make sure you have fulfilled the pre-requisites, refer to Question #1. Then contactJanice Eddington for clean room training.4.
Who do I contact for SEM, AFM, or E-beam Training?Contact Scott Dhuey.5. How do I schedule time for equipment use?Once you have been trained on the tool that you would like to use, go to:http://meetingmaker.doit.wisc.edu/meetingmaker/default.htmlName: cntech_studentThe password will be given to you when you have completed your training.6. How to I obtain new Si Wafers?See Quinn Leonard. Remember to fill out the sign out sheet on his door.52Basic Photoresist Processing Techniques7. Where can I find Clean Room supplies and suits?Clean Room notebooks, pens, tweezers, wafer pucks, etc. can be found in thegowning area as well as in the process clean room.
Supplies are replenished on aweekly basis. Gowns are also changed on a weekly basis. Contact Laurel Washa ifyou need a different size of suit, hood, boots, etc. If you need something specific,contact Laurel Washa or Janice Eddington.8. Where can I find general laboratory supplies?General laboratory supplies can be purchased in the PSL Storeroom. It is chargedto your account. Ask George Krivkovich or Linda Marks about your account number.9. How do I order chemicals?General clean room chemicals, such as solvents and developers, are orderedregularly by CNTech staff. Chemical supply in the process clean room is checkedweekly and new bottles are brought in when necessary.
Call a staff member if yourun out of a chemical. We will bring in a new bottle in for you.If you need to order a specific chemical, first check with Quinn Leonard. We mayhave it stored elsewhere. If a order needs to be placed, make sure you forward aMSDS to Quinn Leonard and notify us that it’s coming. Do not expect us or theshipping/receiving department at PSL to know what you ordered or what to do withit.Purchase order forms need to be sent to George Krivkovich. Do not order itemsonline yourself.10.
Where can I find processing conditions for commonly used resists?Spin speed curves for commonly used resists can be found on the wall in theprocess cleanroom. Some exposure and development data is also listed. However,since some resists are very sensitive to different processing conditions, only use theinformation as a starting point for your research. For more information about resistprocessing, contact Dan Maleug.53.
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