Process Guidelines rev. 1 (1063229), страница 6
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Moststandard processing chemicals have been pre-authorized. No other chemicalsmay be brought into the facility without the specific authorization of QuinnLeonard. In general, you should obtain approval before buying or ordering achemical. You need to provide information, i.e. MSDS, etc., that the chemical isneeded and can be used safely in the laboratory.7.4.2 Chemical Practice:A little bit of common sense and courtesy when using chemicals will make thelaboratory safer and make it easier for the staff to monitor chemical use. Below area few requirements.Post-It notes are available in the process cleanroom.
You must label all containers(beaker, crystallizing dishes, graduated cylinders, etc.) with your name, the chemicalname, date, and time. Clearly and legibly. This simple step will save the staff anduser considerable time in identifying forgotten or spilled chemicals.Since we have a limited amount of chemical space, cooperation by users isrequired. Often there will be several people working in the same hood. Beconsiderate of other user’s space and safety.
Dispose of your chemicals as soon asyou are finished in the appropriate waste carboy.7.4.3 Labware:Clean glassware and plastic ware are available for all to use in the laboratory. Rinseand dry your labware before returning it to the storage shelf. Do not leave it in thehoods to air dry. We do not have the work space or glassware to accommodatethis.7.4.4 Hot Plates:While you may think hotplates are mundane, they can in fact, be very dangerouswhen used in chemical hoods.
Fires and melt down of the plastic hoods are bothsignificant concerns. The following rules apply to hotplate use.•You cannot use a hotplate to heat chemicals without authorization from QuinnLeonard. All hotplates used for heating chemicals must be attended.•The wafer baking hot plates are not to be used with chemicals.46Basic Photoresist Processing Techniques•You may not heat solvents with flash points of <130° F.7.4.5 Personal Protective Equipment:A variety of protective gear for chemical use is provided for your use in the facility.Aprons face shields, goggles, and appropriate gloves are all available above the wetchemical bench.We generally stock Latex clean room gloves.
If you are allergic to Latex, pleaseinform Quinn Leonard. Some non-Latex gloves are available above the cubbies inthe second gowning room.You must always where gloves when entering the clean room. They keep yourfingerprints off things such as samples and vacuum systems.Latex gloves off good resistance to solvents commonly used in our laboratory.However, you may want to change gloves occasionally to avoid contamination. Donot re-use your latex gloves.7.4.6 Chemical Bench Use Rules:All chemical operations are to be done in the chemical benches.
You are expectedto clean up after yourself. Do not leave beakers, towels, etc., or chemical or liquidresidue on the benches. The work surface should be clean and dry when youstart, and clean and dry when you leave.If you plan to use any acids, do not use them near solvents. This isolation is forsafety. A considerable hazard is presented when mixing certain solvents and acids.For example, mixing alcohol and nitric acid makes a nice rocket fuel. Similarly,organics mixed with peroxides can be explosive.7.4.7 Chemical Storage:We have very limited chemical storage space.
The facility stocks and supplies thechemicals commonly required for processing in the facility. Users are not allowed tobring in their own stocks of these chemicals. Working stocks of chemicals are keptin the chemical cabinets near the fume hoods. Extra stock is kept in a storage areaoutside of the SRC. If you run out of a specific chemical during working hours,page Quinn Leonard. We will bring the chemical to you in the clean room. Whenyou empty a chemical bottle, place the bottle under the eyewash station and a staffmember will dispose of it properly.7.4.8 Approved Mixtures:47Basic Photoresist Processing TechniquesYou may not arbitrarily mix chemicals together in the facility.
Only specificallyapproved solutions can be made, such as MIBK-IPA. Check with Quinn Leonardbefore you begin.7.4.9 Pregnancy:Users who believe themselves to be pregnant should discuss laboratory use withQuinn Leonard as soon as possible. This need not severely restrict laboratory usebut should nonetheless be discussed. (see section 7.5 Specific Chemical Hazards)7.4.10 Emergency Response Equipment:If there is an emergency, dial 911 immediately. There are 3 fire extinguishers inthe CNTech clean room.
An emergency shower and eye wash station is located inthe process cleanroom. Most chemical burns, particularly in the eyes, should bewashed for 20 minutes before seeking further medical attention.7.4.11 Chemical Accidents:You are primarily responsible for cleaning up any minor chemical spill you cause.Dispose of any broken glass or wafers in the two labeled buckets under theeyewash station.For major chemical spills or any unanticipated chemical reaction, you must evacuatethe area or laboratory and call a staff member.
You must remain available toprovide information. In addition to normal emergency response, all accidentsinvolving chemicals and all accidents involving personal injury must be reported tothe facility management in writing as soon as possible after the incident.Explanations should include the nature of the event, the procedures being followedor not followed at the time, and actions required to prevent future similar incidents.Bruce Neumann can supply the appropriate form. In addition, for cases involvingpersonal injury to employees, the university may require additional documentation.48Basic Photoresist Processing Techniques7.5 Specific Chemical Hazards:7.5.1 Acetone and Flammable Solvents:Acetone is widely used throughout the facility. It is a very flammable solvent with alow flash point (i.e.
it can be ignited at a low ambient temperature). Because of this,it presents a significant fire hazard. A spill of a gallon bottle of acetone could causea catastrophic fire of explosion.Spilled solvents can react explosively with chemical oxidizers present, e.g.,peroxides, nitric acid. Call or page a staff member if a large spill occurs.7.5.2 Chlorinated Solvents:Chlorinated solvents (chlorobenzene, methyl chloride) are used in various resistprocesses. They are particularly bad for you, causing cancer, organ damage, etc.They should not be mixed with normal solvents in waste carboys. There is adedicated “Halogenated Organic Solvents” carboy for chlorinated solvents.
As withmost solvents, they can be readily absorbed through the skin.7.5.3 Glycol Ethers:Commercial photoresists and electron beam resists are dispersed in a variety ofsolvents. The composition of these mixtures is generally not disclosed on the bottle;you must look for it on the MSDS. One family of chemicals, the glycol ethers,commonly used in photoresists, masquerades under a variety of names. It is notoften clear that many of these are the same chemical. In addition, the commontrade name “Cellosolve” is often used. As is:Methyl CellosolveEthylene glycol mono methyl ether2-methoxyethanolEthyl Cellosolve2-ethoxyehtnaol (2EE)Ethylene glycol mono ethyl etherThey are all the same solvent.
To further complicate things, each solvent has anacetate relative, so we haveCellosolve AcetateEthyl Cellosolve Acetate (ECA)Ethylene glycol mono ethyl ether acetate2-Ethyoxy ethyl acetatewhich are all identical. Most photoresists contain one or more of these as solvents.49Basic Photoresist Processing TechniquesMembers of this family of chemicals have been shown to be teratogens and haveother effects on reproduction in laboratory animals. A number of recent studiesfunded by IBM and others have found evidence that these chemicals can lead tomiscarriage and other reproductive effects. To quote from the MSDS for AZ 2131Thinner (2-Ethoxyethyl Acetate and N-Butyl Acetate)“In studies with laboratory animals, 2-ethoxyethl acetate cause birth defects,increased fetal death, delayed fetal development, caused blood effects, testiculardamage and male infertility.”The liquid and vapor are eye and respiratory tract irritants and may cause kidneydamage, narcosis, and paralysis.
Primary routes of exposure are inhalation, skinabsorption, and skin and eye contact with vapors.As with all chemicals, these are only the effects we know about. Theseexperimental laboratory exposures were large amounts but nonetheless it is prudentto be careful with these solvents.If after reading this section, you still do not have sufficient respect for thesechemicals, please go back and read it again.In all emergency situations call 911 bydirectly dialing 9-1-1 from any phone.50Basic Photoresist Processing TechniquesPart 8: Commonly Used AbbreviationsCAR – Chemically Amplified ResistCNTech – Center for NanotechnologyEBR – Edge Bead RemovalEBL – E-Beam LithographyHMDS – HexamethyldisilazaneIPA – Isopropyl AlcoholMIBK – Methyl Isobutyl KetonePAB – Post Applied BakePEB – Post Exposed BakePR – PhotoresistPXRL – Proximity X-Ray LithographySR – Synchrotron Radiation51Basic Photoresist Processing TechniquesPart 9:Frequently Asked Questions1.
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