Диссертация (1143641), страница 44
Текст из файла (страница 44)
Необходимым условием для локализацииявляется лимитирование процесса диффузией к поверхности.3) Предложены конструкции микрореакторов и способы их производства. Найденырешения задач локального осаждения функциональных покрытий в технологии производстваизделий электронной и микросистемной техники: полупроводниковых газовых датчиков,микроэлектромеханических гироскопов и акселерометров. Описан метод решения задачиоптимизации технологического процесса ХОГФ, основанный на систематическом проведениибольшого количества опытов по локальному осаждению в микрореакторе.4) Разработана и экспериментально проверена технология жидкостного анизотропноготравления кремния в микрореакторе.
Создана модель, описывающая изменение геометрии игидравлического сопротивления микроканала во время травления. Предложена методикарасчета максимальной температуры проведения процесса. Показано, что с увеличениемплощади травления при фиксированной теплоотдаче, уменьшается критическая температурасистемы, при превышении которой она переходит в режим неконтролируемого саморазогрева.5) Показано, что с применением технологии жидкостного анизотропного травлениякремния в микрореакторе можно создавать статически уравновешенный микрофлюидныймостикУинстона,являющийсячастьюновойсистемывысокоточногоизмерениядифференциального давления. На основе этой технологии предложен новый, более простойтехнологический процесс изготовления теплораспределяющего модуля на основе тепловыхмикротрубок со сложным профилем поперечного сечения.230ИСПОЛЬЗУЕМАЯ ЛИТЕРАТУРА1Ehrfeld W., Hessel V., Löwe H.
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