Delta-80T2-200 (1063519), страница 2
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For more flexibility a programmablesyringe dispense system is available.The laptop option with a Windows® like user interface software allows for easy recipe programmingand storage for an unlimited number of recipes.Solvent Dispense Nozzle (Options)Choose this programmable option for solvent cleaning or developing and for adhesion promoterdispense.
It includes all tubing, valve and flowmeter.Bowl Auto Clean (Options)Programmable cleaning cycle cleans the chuck andthe process bowl. The auto-cleaning frequency canbe set either by time or numbers of cycles.Open Bowl (Options)Nitrogen Blow (Options)0The open bowl option with the special sensor controlled adapter ring allows for conventional openbowl spin coating. The adapter permits speeds upto 10,000 rpm without GYRSET® cover and provides additional flexibility to process wafers or substrates.Laptop OptionModular OptionsModular Optio sReleases a jet of nitrogen across your wafer / substrate before processing and helps to remove anydust and dirt particles from the surface, therebycleaning the component. Includes all tubing, valveand flowmeter.11DELTA 80 GYRSET®Delta 80 T2Delta 80 BMThe stand alone cabinet integrates the SUSSDELTA 80 Spin Coater with selected options, likeour DELTA 150 / 200 BM Hotplate Modules into asmall footprint.
The top plate with the front panels ofthe cabinet are made of polished stainless steel.Side and back panels are made of brushed stainless steel and are easily removed allowing easyaccess to all components.The perforated top plate provides a laminar flowassuring proper ventilation through the process. Foradded safety and reduced contamination the mediaand electronic controller are seperated.
All connections for media and power are located on the backof the cabinet simplifying installation.5” CONFIGURATION3” CONFIGURATIONfixedGYRSET 3MODULEfixedGYRSET 5MODULE8” CONFIGURATIONGYRSET 8MODULEfixedquick exchangequick exchangequick exchangehighhighhighquick exchange highquick exchange highquick exchange highsingle sidesingle sidesingle sidedouble sidedouble sidedouble side3” CHUCKSpin CoatersStainless Steel Cabinet5” CHUCK8” CHUCKSpecial RequirementsIf you have special requirements, the SUSS teamwill help you to define and support your particularneed, whether for research or production.OptionsDelta 80 TStainless steel cabinetNitrogen blowProgrammable electronicdispense armDispense pumpsChuck lift-up / downPneumatic dispense arm2Adapter for small substrates, up to 2”LaptopResist nozzle autocleanMotor flange coolingProgrammable bowl autocleanOpen bowl spinningEdge bead removerPressure vessel systems + Media cabinetCotton candy removerMedia filter systemsDelta 80 GyrsetModular Optio sProgrammable solventdispense13TECHNICAL DATAWafer / Substrate SizeWafer Size::up to ø 8” (ø 200 mm)Supstrate Size:up to 6” x 6” (150 x 150 mm)Spin CoatersDELTA 80 BMRequirementsVoltage:230 VAC / 50 Hz / 16 ACompressed air:5 - 6 bar / tube OD 8 mmVacuum:min.
- 0.7 bar / tube OD 6 mmNitrogen:4.5 bar / tube OD 6 mmExhaust:OD 100 mm (1x)DimensionsSpinner module (W x D x H):443 x 440 x 830* (17.4” x 17.3” x 32.7”*)*with open GYRSET® cover and waste bottleController (W x D x H):465 x 386 x 133 mm (18.3” x 15.2” x 5.2”)Panel interface (W x D x H):196 x 56 x 110 mm (4.3” x 7.7” x 2.2”)DELTA 80 T + T2RequirementsVoltage:400 VAC / 50 Hz / 16 ACompressed air:5 - 6 bar / tube OD 8 mmVacuum:min.
- 0.7 bar / tube OD 8 mmNitrogen:4.5 bar / tube OD 8 mmExhaust:OD 100 mm (3x)DimensionsFootprint (W x D x H):1200 x 642 x 1317 mm (47.2” x 25.3” x 51.9”)Syringe Dispense OptionDELTA SERIESSemiautomatedProcess EquipmentThe SUSS Delta Series offers a wide range of laboratory equipment that can process wafers or substrates ranging from pieces up to 22” diameter or16” square. The Delta Series includes processmodules for the following applications:• Substrate Dryers• Coating Systems• Hot Plates• Cool Plates• Develop and Etching Systems• Cleaning Systems• Vapor Priming (HMDS)DELTA 80 T3Voltage:400 VAC / 50 Hz / 16 ACompressed air:5 - 6 bar / tube OD 8 mmVacuum:min.
- 0.7 bar / tube OD 8 mmNitrogen:4.5 bar / tube OD 8 mmExhaust:OD 100 mm (3x)Tecical DataDimensions4Footprint (W x D x H):1674 x 642 x 1317 mm (65.9” x 25.3” x 51.9”)Data depend on individual process conditions and can vary according to equipment configurations. Not all specifications may be valid simultaneously.Illustrations in this brochure are not legally binding.
Design and specification of custom built machines depend on individual conditions and can varyaccording to equipment configurations.For stand alone operation the Delta Series modulescan be integrated into attractive stainless steel cabinets. The cabinets can support from one up to threedifferent process modules. For example, it is possible to have a coater, vapor prime and hot platemodule located in a single cabinet. The modulardesign allows our customers a great deal of flexibility configuring process equipment while minimizingspace.Technical DataRequirements15.
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