USP_8353255_Suss (1063351), страница 2
Текст из файла (страница 2)
In this case, thecentering pin 1 extends into the hole of the substrate 2 orthrough the hole.65FIG. 1b shoWs a section through FIG. 111 along the dashedline. The substrate 2 is held by the centering pin 1 and thesupport surface 8 on Which the substrate 2 rests. The supportsurface 8 is formed by an end surface of the means 4 forUS 8,353,255 B234varying the distance between substrate 2 and disk 3. The axisA about Which the substrate 2 is rotated during the coatingprocess (eg lacquering) is shoWn as dash-dotted line in FIG.1b. Below the distance varying means 4 for varying the disdiscussed here.
In vieW of the remaining characteristics, reference is made to the description ofFIGS. 1a, 1b and 10. Thisalternative holding and rotating means is suitable for substrates 102 Which do not have a central hole. According toFIG. 2a, the substrate 102 rests With a ?rst side (in FIG. 2a theloWer side) on a support surface 108. A counter pressureelement 107 presses With a counter surface 109 against thesecond side (in FIG. 2a the upper side) of the substrate 102.Thus, the substrate 102 is clamped betWeen the tWo surfaces108 and 109. The counter surface 109 of the counter pressureelement 107 has a suf?ciently small diameter (as compared tothe substrate 102), so that the process of coating the substrate102 is not disturbed.tance betWeen substrate 2 and disk 3 there is provided a motor(not shoWn in FIG.
1b) Which can rotate the distance varyingmeans 4 and thus also the substrate 2 and the centering pin 1.A disk 3 is arranged beloW the substrate 2. The diameter of thedisk 3 is at least the same as the diameter of the substrate 2.During the coating process, the distance dl betWeen substrate2 and disk 3 is, e.g., 0.1 to 0.3 mm, preferably 0.2 mm. Thedisk 3 is held by the disk holder 5. The disk holder 5 can beheld by the distance varying means 4. The disk 3 can berotated synchronously With the substrate 2. In this case, thedisk holder 5 can be connected rigidly With the distancevarying means 4.Because of the small distance dl betWeen substrate 2 anddisk 3, air sWirls at the edge of and beloW the substrate 2 canbe avoided. Without disk 3, these air sWirls Would causecontamination of the edge and the rear surface.
A homogeFIG. 2b shoWs, again analogously to FIG. 10, the loadingand unloading of a substrate 102 into and out of the deviceaccording to the invention by means of a conventional grippersystem 6.A further alternative of holding the substrate 102 can besuction cups (not shoWn). For this purpose, the substrate 10220neous coating (lacquering) of the substrate With layer thickness tolerances of less than 20% Would hardly be possible innecessary in this case.The invention claimed is:this case. Such air sWirls can also be in?uenced by a housing1. A device for coating a substrate (2; 102) by spinning-off(not depicted in FIG.
1b) Which surrounds the shoWn device.During spinning-off the coating (lacquer), the disk 3 prevents25(lacquer) doWnWards at the edge of the substrate and mightto be coated (lacquered). As discussed above, the distancebetWeen substrate 2 and disk 3 is relatively small, e.g. 0.2 mm.Thus, it is not possible to load and unload substrates 2 in an30diameter as the substrate (2; 102), and35can be elongated or is movable relative to the disk (3);andWherein the distance varying means (4) is con?gured as theend effectors (edge grippers). Therefore, the present inven40tering pin (1) for engagement With an axial bore of themuch that an automated loading and unloading by means ofconventional gripper systems is possible.substrate (2).2.
The device according to claim 1, comprising means for45means of a disk holder (5).50the coating material, comprising:55In case the device according to the invention is located in ahousing (not shoWn in FIGS. 1b and 10), it can be advantaof possible alternatives for holding the substrate 102. Therefore, only the neW aspects of holding the substrates 102 areholding and rotating means for holding and rotating thesubstrate (2; 102) about an axis (A) essentially perpendicular With respect to the substrate plane;a disk (3) Which is arranged beloW the substrate (2; 102)and coaxially thereto and Which has at least the same60(beyond the edge of the housing). This can simplify loadingand unloading the substrate 2 into and out of the device.
Tothis end it is of course necessary to additionally increase thedistance betWeen substrate 2 and disk 3.FIGS. 2a and 2b shoW a further alternative out of a plurality4. The device according to claim 1 Wherein the holding androtating means is con?gured as clamping means for pressingcoaxially against both sides of the substrate (102).5. A device for coating a substrate (2; 102) by spinning-offd2.geous to move both the substrate 2 and the disk 3 upWardsrotating the disk (3) synchronously With the substrate (2; 102)about the axis (A).3. The device according to claim 1, Wherein the disk (3) isaxially movable relative to the distance varying means (4) bysubstrate 2 at the substrate edge (edge gripper).
The distanceout of the device according to the invention as shoWn in FIG.10. Alternatively, the disk holder 5 including the disk 3 can bemoved along the distance varying means 4 in order to increasethe distance dl betWeen substrate 2 and disk 3 to the distanceholding and rotating means; andWherein the holding and rotating means comprises a cendistance betWeen substrate 2 and disk 3 can be increased sovarying means 4 for varying the distance betWeen substrate 2and disk 3 can be elongated or moved relative to the disk.
Bydoing so, it is possible to increase the distance betWeen thesubstrate 2 and the disk 3 to d2 (see FIG. 1b and FIG. 10).Then, it is possible to load and unload a substrate 2 into andWherein the disk (3) has a hole coaxially With respect to theaxis (A), and the distance varying means (4) extendsthrough the hole for supporting the substrate (2, 1 02) andtors (?nger or fork grippers) or by means of normal edge gripFIG.
10 exemplarily shoWs hoW a substrate 2 is loaded andunloaded into and out of the device of the present invention bymeans of a conventional gripper system 6 Which grips theand coaxially thereto and Which has at least the samedistance varying means (4) for varying the distance (d)betWeen substrate (2; 102) and disk (3),automated manner into and out of a coating device Withoutany additional measures by means of normal Wafer end effection provides a lifting mechanism by means of Which thethe coating material, comprising:holding and rotating means for holding and rotating thesubstrate (2; 102) about an axis (A) essentially perpendicular With respect to the substrate plane;a disk (3) Which is arranged beloW the substrate (2; 102)air sWirls.
No air stream is caused Which draWs the coatinglead to contamination of the edge and the rear surface. Thedisk 3 alloWs a thickness homogeneity of the coating of lessthan 3% because no air sWirl causes the coating (lacquer) toaccumulate at the edge of the substrate.The disk 3 has at least the same diameter as the substrate 2is sucked to the support surface 108 by means of suction cups.A centering pin 1 or a counter pressure element 107 is notdiameter as the substrate (2; 102), anddistance varying means (4) for varying the distance (d)betWeen substrate (2; 102) and disk (3); andWherein the disk (3) has a hole coaxially With respect to theaxis (A), and the distance varying means (4) extends65through the hole for supporting the substrate (2, 1 02) andcan be elongated or is movable relative to the disk (3);andUS 8,353,255 B265wherein the distance varying means (4) is con?gured as theWherein the disk (3) has a hole coaxially With respect to theaxis (A), and the distance varying means (4) extendsholding and rotating means;Wherein the distance (d) betWeen the substrate (2; 102) andthe disk (3) is 0.1 to 0.3 mm, during the coating process.through the hole for supporting the substrate (2, 1 02) andcan be elongated or is movable relative to the disk (3);andWherein the distance varying means (4) is con?gured as the6.
The device according to claim 5, comprising means forrotating the disk (3) synchronously With the substrate (2; 102)about the axis (A).7. The device according to claim 5, Wherein the disk (3) isaxially movable relative to the distance varying means (4) bymeans of a disk holder (5).8. The device according to claim 5, Wherein the holdingand rotating means comprises a centering pin (1) for engageholding and rotating means; andWherein the holding and rotating means is con?gured asclamping means for pressing coaxially against both10(d) betWeen the substrate (2; 102) and the disk (3) is 0.1 to 0.3mm, during the coating process.ment With an axial bore of the substrate (2).9. A device for coating a substrate (2; 102) by spinning-off11.
The device according to claim 9 comprising means forthe coating material, comprising:rotating the disk (3) synchronously With the substrate (2; 102)holding and rotating means for holding and rotating thesubstrate (2; 102) about an axis (A) essentially perpendicular With respect to the substrate plane;a disk (3) Which is arranged beloW the substrate (2; 102)about the axis (A).12.
The device according to claim 9 Wherein the disk (3) isaxially movable relative to the distance varying means (4) bymeans of a disk holder (5).and coaxially thereto and Which has at least the samediameter as the substrate (2; 102), anddistance varying means (4) for varying the distance (d)betWeen substrate (2; 102) and disk (3); andsides of the substrate (102).10. The device according to claim 9 Wherein the distance20.
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