Dicing MEMS (1063251), страница 2
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The 7200 saw may be equipped with an optional on-line dressing station tomaintain blade edge shape. The dressing station option is fully integrated into the 7200saw software package and all dressing process parameters may be pre-defined along withH e a d q u a r t e r s – Advanced Dicing Technologies Ltd.www.adtdicing.comAdvanced Technology Center, Haifa 31905, Israel, Tel.: 972-48545222, Fax: 972-4-8550001the frequency at which the blade is dressed.
The dressing station may be used fordressing of new blades, for periodic cleaning of blades from accumulated buildup whichcauses blade overload, and for blade reshaping.Figure 5: Optional dressing station.Summary and ConclusionsWe have seen that dicing MEMS is accompanied by several challenges that stem fromthe sensitivity of these devices to mechanical pressure, to contamination and toelectrostatic discharges. ADT has presented an array of innovative process- andequipment-based solutions to answer these challenges without the need for modificationsof the MEMS device itself in the form of hermetic caps and protective layers.H e a d q u a r t e r s – Advanced Dicing Technologies Ltd.www.adtdicing.comAdvanced Technology Center, Haifa 31905, Israel, Tel.: 972-48545222, Fax: 972-4-8550001.
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