04_Operating_Instructions_TruPlasma_Bias _3003[1] (1032055), страница 4
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User setup menuAccessible from SETUP access levelDisplayModif. Description>CNTROL: ANALOG<>ArcDet ImHV= 0.5A<>ArcDet IxHV=0.7A<YesThe control mode (control source) can be switchedbetween DISPLAY-console or ANALOG. The RS232control mode is automatically activated when RS232transmission is detected and the RS232 control featureis selected at the PC, and deactivated when this featureis deselected or no transmission is present for morethen 5sec.YesYes>ArcDet UxHV=100V<Yes>ArcDet ImLV= 3.5A<Yes>ArcDet IxLV= 3.0A<Yes>ArcDet UxLV= 50V<YesSettings explained in chapter 9.Enable / Disable:>Imax:HV-EN./LV-EN.<Yes>UxI :HV-EN./LV-EN.<Yes>dUYes:HV-EN./LV-EN.<>BreakTime = 50ms <YesAfter each arc the power supply will be inhibited forthis much time.>RampRate = 20units<YesThe voltage recovery ramp slope setting.
This can bechanged from 5 to 40 units. The larger the setting thesteeper the slope.>ArcRecoveryYesAUTO: automatically lowers the output voltage whenconstant arcing occurs. “Arc recovery”parameter set to AUTO means that after eachdetected (and switched off) arc the outputvoltage is a slightly decreased (during thenext cycle). It results in decreasing thenumber of arc occurs. When the arcs arestopped the output voltage starts to increaseagain to the previous set value.NORM: AUTO feature disabled255<YesRS485 bus address9600 bps<YesSerial port baud rate settingNORM <>RS485 ADDRESS>RS SPEEDOperating Instructions for TruPlasma Bias 3003 GeneratorRev.
3.1.1.1.P.09.01Page 25TruPlasma Bias series 3000/70009.Setting the arc detection criteriaArcs which may occur in normal process conditions may damage the treatedsurface by leaving arc tracks. On the other hand, some arc energy might be needed insome cases to burn out grease and other contamination particles left on the surface.Selecting the proper arc detection criteria has a significant influence on the powersupply’s response to the arc, and thus the quality of the treated surface. The TruPlasmaBias 3005 detects an arc in 3 ways:•••dynamic voltage change (dU)simultaneous voltage drop and current increase – the cross detector (UxI)overcurrent (Imax)Each arc detection criteria can be switched ON or OFF separately in HIGH and LOWvoltage modes.
Also, the Imax and UxI threshold settings can be separately adjusted ineach mode. In order to change these settings from the display panel you must switch toSETUP ACCESS (enter code 1) and select the USER SETUP MENU screen.The parameters, which influence the response to arcs are listed belowParameterDescriptionCurrent threshold for the Imax detection criteria in HV mode>ArcDet ImHV= 2A<Current threshold for the UxI detection criteria in HV mode.>ArcDet IxHV= 1A<Voltage threshold for the UxI detection criteria in HV mode>ArcDet UxHV=100V<Current threshold for the Imax detection criteria in LV mode>ArcDet ImLV= 7A<Current threshold for the UxI detection criteria in LV mode>ArcDet IxLV= 6A<Voltage threshold for the UxI detection criteria in LV mode>ArcDet UxLV= 80V<Enable / Disable:The arc detection criteria can beImax arc detection>Imax:HV-EN./LV-EN.<ENabled or DISabled in HVmode andUxI arc detection>UxI :HV-EN./LV-DIS<LVmode separately.dU arc detection>dU :HV-EN./LV-DIS<The output power is inhibited for this time.
2 … 50ms>BreakTime = 50ms <The voltage come-back ramp. 5 … 40 units>RampRate = 40units<When set to AUTO the power supply will slightly decrease the>ArcRecovery NORM <Notes11112output voltage after each arc, thus holding the voltage value ina balancing state between arcing and non arcing.Notes:1.
This setting should always be LOWER then the setpoint for the output currentregulator, otherwise the output current will not be able to trip the arc detectionlevel.2. It is wise not to disable the Imax detection for a normal production process.Operating Instructions for TruPlasma Bias 3003 GeneratorRev. 3.1.1.1.P.09.01Page 26TruPlasma Bias series 3000/7000The basic principal of the arc detectors operation is shown on the graph below.- The dU (dynamic voltage change) detector is the fastest possible way of detecting anarc.
This is because the output of the power supply is inductive, and an arc makes thevoltage drop much faster then the current can rise. However the dU detector can failin case the succeeding arcs occur before the voltage reaches a certain value fromwhich a voltage drop will be recognized. This value is ca. 150V.- The UxI detector is static and will detect an arc as well as a long-term short circuit atthe output of the power supply protecting the treated surface from being burnt byarcs.
The reaction time in this case is 10..100 times longer then the response of thedU detection.- The Imax detector will switch off the power if the output current exceeds the Imaxlevel regardless the reason (arc or overload).IsetCurrent regulator setting above the Ix and Imax settingsImaxIxVoltageU1CurrentArc energyI1150VU225%U1UxUarc0AB CDE F GHJ KLTime[see below]This figure shows the response of the dU, UxI and Imax detector. The events are asfollows:0-A:A:B:C:C-D:Process runs. (e.g.: U1= 300V; I1=10A)Arc occurs.
Voltage drops immediately, current starts rising.Arc is detected by the dU detector and arc quenching begins (A-B < 0.5us).Current starts decreasing. The decrease rate depends on the inductance of thecables used to connect the TruPlasma Bias 3003 with the chamber.The arc current reaches 0.
Arc is extinguished.BREAKTIME=2 … 50ms. This time can be set by the user. During this time thepower is switched off.Operating Instructions for TruPlasma Bias 3003 GeneratorRev. 3.1.1.1.P.09.01Page 27TruPlasma Bias series 3000/7000D-E:E:E-F:F:F-G:G-H:H-J:K:L:Voltage starts rising with a rate dependent on the user’sRAMPRATE=5 … 40units setting.Before the voltage reaches 150V (U2<150V) another arc occurs. This, however isnot detected by the dU detector because this detection method needs an initial150V output voltage to reset the detector. This level is not reached yet.The arc current rises. This increment ramp depends on the voltage, cableinductance, power supply’s output inductance and settings. Typically E-F =10..100us.The current value reaches the cross detector (UxI) Ix level while the voltage is belowthe detectors Ux level (arc voltage ca 20-30V) so the UxI arc detector is activatedand the arc is quenched.Again this time depends mainly on the cable inductance.Again the breaktime.The output current and voltage reach their previous values.An additional load appears (e.g.
another ion source - arc or magnetron - activated)leading to a current increase without an arc on the substrate.The Imax detector is triggered and the power is switched off.Operating Instructions for TruPlasma Bias 3003 GeneratorRev. 3.1.1.1.P.09.01Page 28TruPlasma Bias series 3000/700010. Interfaces10.1. RS-232/RS-485 transmission protocolThe Bias acts as a slave device in the communication process. It never initiatesa transmission. The master computer (PC) sends a command which is executed by the Biasand a reply is generated (with respect to note 1). The recognized commands arepresented below. Additional commands can be implemented if necessary.The baud rate can be set from 2400 to 38400 from the Bias front panel console tocorrespond to the rate set at the PC.8913 Normal runPC to Bias01234567891011$16$E9$89$13AdrUset0Uset1Uset2Uset3Iset0Iset1Iset212131415161718192021Iset3Pset0Pset1Pset2Pset300BitsSH2)SL2)Where:AdrUset (float)Iset (float)Pset (float)RS485 address0..255Voltage setpoint [V] 0..300V (LV), 0..1200V (HV)Current setpoint [A] 0..10000mA (LV), 0..2500mA (HV)Power setpoint [kW]0...3000WControl Bits:0: Take over control (1); Do not take over control (0)1: Auto adjust UxI (1); Normal (0) (on request)2: Mains relays ON (1), Relays OFF (0)3: Power ON (1), Power OFF (0)4: Mode: HV (1), LV (0)5: Arc counter reset(1 – for 1 transmission)6: 7: Bias to PC01234567891011$16$E9$40$00Uact0Uact1Uact2Uact3Iact0Iact1Iact2Iact312131415161718192021Imax1Imax0UxI1UxI0Bits0Bits1dU1dU0SH2)SL2)Where:Uact (float)Iact (float)Imax (integer)UxI (integer)dU (integer)Output voltage [V]Output current [A]Imax arc counterUxI arc counterdU arc counterOperating Instructions for TruPlasma Bias 3003 GeneratorRev.
3.1.1.1.P.09.010...1200V0... 10000mA0 ..100000...100000...10000Page 29TruPlasma Bias series 3000/7000Bits0: Acknowledge bits 1:0: Digital control ack (1); other (0)1: Not Used2: Relays ON ack3: Power ON ack4: Mode ack: 1: HV; 0: LV5: Not Used6: Not Used7: =1 for 1 transmission after resetBits1: Acknowledge bits 2:0: Interlock Ack1: OverTemp Ack2: PowerFail Ack3: Not used4: Commun. Fail Ack5: EEsum Error Ack6: Not Used7: AlarmActive Ack5112 Show Identification StringPC to Bias0123456$0B$F4$51$12xxAdr$EA7891011$6200SH2)SL2)Where:AdrxxAddress for RS485Ignored0..255 1)Bias reply (OK.)0123$1A$E5$40$004 … 23 (20 ascii characters)“124Operating Instructions for TruPlasma Bias 3003 GeneratorRev. 3.1.1.1.P.09.01“2425SH2)SL2)Page 30TruPlasma Bias series 3000/70008003 Set a floating point valuePC to Bias0123456$0D$F2$80$03AdrChan1Chan2789101112Val0Val1Val2Val3SH2)SL2)Where:AdrChan (int)Val (float)Address for RS4850..255 1)Channel number (see channel assignment tables)Value to be setBias reply012345$06$F9AckH3)AckL3)SH2)SL2)8004 Read a floating point valuePC to Bias012345678$09$F6$80$04AdrChan1Chan2SH2)SL2)Where:AdrChan (int)Address for RS4850..255 1)Channel number (see channel assignment tables)Bias reply (OK.)0123456$0A$F5$40$00Val0Val1Val2789Val3SH2)SL2)Bias reply (Fail)012345$06$F9AckH3)AckL3)SH2)SL2)Operating Instructions for TruPlasma Bias 3003 GeneratorRev.
3.1.1.1.P.09.01Page 31TruPlasma Bias series 3000/70008006 Set a byte valuePC to Bias0123456789$0A$F5$80$06AdrChan1Chan2ValSH2)SL2)Where:AdrChan (int)Val (byte)Address for RS4850..255 1)Channel number (see channel assignment tables)Value to be setBias reply012345$06$F9AckH3)AckL3)SH2)SL2)8007 Read a byte valuePC to Bias012345678$09$F6$80$07AdrChan1Chan2SH2)SL2)Where:AdrChan (int)Address for RS4850..255 1)Channel number (see channel assignment tables)Bias reply (OK.)0123456$07$F8$40$00ValSH2)SL2)Where:Val (byte)Asked byte valueBias reply (Fail)012345$06$F9AckH3)AckL3)SH2)SL2)Operating Instructions for TruPlasma Bias 3003 GeneratorRev.
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