04_Operating_Instructions_TruPlasma_Bias _3003[1] (1032055), страница 2
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Transportation and storageTransportationTruPlasma Bias 3003 system must be firmly situated in a horizontal position.StorageStorage environments should be dry, free of aggressive vapors and not exposed totemperatures from beyond the 3k3 class range – EN 50178 (i.e.: -25, +55ºC). See table‘Environment’.Operating Instructions for TruPlasma Bias 3003 GeneratorRev.
3.1.1.1.P.09.01Page 7TruPlasma Bias series 3000/70002. Explanation of symbols and notesFailure to comply with these precautions means that slight physicalinjury or damage to property is possible.Failure to comply with these warnings means that death, seriousphysical injury or damage to property are possible.Failure to comply with these information can cause faults or failure ofthe TruPlasma Bias 3003 system performance.Useful notice and tips about correct handling, operationand maintenance.Operating Instructions for TruPlasma Bias 3003 GeneratorRev.
3.1.1.1.P.09.01Page 8TruPlasma Bias series 3000/70003.General informationThe TruPlasma Bias 3003 Power Supply is designed for powering industrialvacuum process chambers in PVD surface treatment technologies. Its dual HV and LVoutput feature enables effective operation in low and high voltage modes deliveringsufficient supply to the etching, glowing and coating process stages.The power-electronic design is based on switched mode technology which ensureslow output current ripples, high efficiency, small dimensions and weight, and also lowaudio noise generation. Modular construction of the power converter circuits simplifiestransportation, installation and servicing duties.All units are microprocessor-controlled.
All control-signal connections are digitaland opto-isolated giving high resistance to electric disturbances.A multi-control system gives the user a possibility of selecting from three optionalcontrol sources:• Local: DISPLAY console located on the front panel of the TruPlasma Bias3003,• Remote: RS-232 and RS-485 link for the PC computer,• Remote: ANALOG - potentiometers, switches, LEDs and gauges connected tothe analog control connectors (*optional).The TruPlasma Bias 3003 power supply is assembled in one industrial steelenclosure ready to insert into a 19’’ rack power system. All cable ends and electricterminals for user connections are located at the front of the module.3.1.
TruPlasma Bias 3003 block diagramThe power supply section is equipped with appropriate voltage (current and poweroptional) regulator. It delivers the sufficient voltage to the section responsible fordetecting and quenching arc occurrences.A block diagram of the TruPlasma Bias 3003 is shown below.
TruPlasma Bias3003 block diagram consists of the following functional blocks:input EMI filter to reduce the EMI interferences delivered to the mains.power relays providing a soft switch-onthree-phase rectifier and filterhigh frequency switched-mode DC/AC power converterhigh frequency pulse transformer and high frequency rectifieroutput filter circuitsolid state switch coupled with arc switch-off circuitryHV / LV range selection circuitrycontrol electronics and LCD display panelOperating Instructions for TruPlasma Bias 3003 GeneratorRev. 3.1.1.1.P.09.01Page 9TruPlasma Bias series 3000/7000OUT-HV/LVrangeselectionARCOFFCIRCUITSWITCHSOLID ST.Vo lta g e meas.C u rre nt meas.V/VEMIfilterOUT+RELAYSTransformerPulse5~-RECTIFIERT3~21~+4DisplayPanelFilterconverterDC/ACCONTROLCIRCUITS4~342~~13~-+2+4~1342+~~131~+2FILTERCIRCUITSWITCHINGSTART UPCIRCUITRYQ start upFuseEMIf ilter3x2,5AL1 L2 L3PEOperating Instructions for TruPlasma Bias 3003 GeneratorRev.
3.1.1.1.P.09.01AnalogRS232Page 10TruPlasma Bias series 3000/70004.Electrical and mechanical specification4.1. Electrical and mechanical specification in tablesOverallMains voltageV3 x 400 ±10%Mains frequencyHz50 – 60Maximum mains input currentA3 x 5.3APower supply section:Operation modesOutput voltage and current:HV DC modeLV DC mode- HV (High Voltage) DC- LV (Low Voltage) DCVA0 … 1200V0 … 300V0 … 2.5A0 … 10AControl modes:LocalRemoteRemoteOutput parameters controlU, regulationI, P regulation: *optionalArc detection criteria:Imax an arc is detected when the outputcurrent exceeds the Im valueadj.
Imax threshold 10 … 110% Inseparately in HV and LV modesUxI(cross detection)an arc is detected (if UxIdetection mode is enabled) whenoutput current exceeds the Ixthreshold value while the outputvoltage drops below the Ux valuedU(dynamic voltage change)a spark is detected (in casespark detection mode isselected) when the outputvoltage drops rapidly by 75%of its valueVIadj. Ux threshold 0 … 300V,adj. Ix threshold 10 … 100% InBoth values adjustable separately in HVand LV modespreset ∆U = 75% UactArc detection timeµs<1Spark quenching timeµs<0.5Maximum arcing frequency- display panel- RS232 or RS485- analog portArc/s50FusingA3 x 16A, B-classEfficiency%Approximately 95%Operating Instructions for TruPlasma Bias 3003 GeneratorRev.
3.1.1.1.P.09.01Page 11TruPlasma Bias series 3000/7000Mechanical specification:kgWeightSize (W x H x D)mm19(19”) 482 x 133 x 545Environmental specification:Ambient operating temperature°C°F0 … 3532…95Relative humidity%g/m35...85 (Non-condensing)1…25Air pressurekPambar80-106800-1060 (approximately 2000 abovesea level)Pollution degree<2 (see chapter 5.1. Installation site:contamination)4.2. Power characteristic for TruPlasma Bias 3003moduleU[V]1200HV mode300LV mode02.5Operating Instructions for TruPlasma Bias 3003 GeneratorRev. 3.1.1.1.P.09.0110I [A]Page 12TruPlasma Bias series 3000/70005.Installation5.1.
Installation siteEnclosureThe TruPlasma Bias 3003 power supply is built in a standard 19" enclosure and isdesigned to fit into a standard 19", 800mm deep rack cabinet. The weight of this deviceis ca. 19kg, and the mechanical construction of the cabinet should be strong enough tohold it. It is very important to assure a proper flow of cooling air close to the cooling fans.Forced ventilation inside cabinet is recommended. Device should work in properenvironmental conditions.
Inlet air temperature must not exceed 35°C.ContaminationCooling air should be free of corrosive vapors and particles that could becomeconductive after exposure to moisture. Proper environment conditions ensure long-lastingfaultless performance - significantly increasing the MTBF.UnpackingInspect the devices packaging for damage and compare the contents of thepackage with delivery documents. If any signs of improper handling have been noticedplease notify the AC company before further proceedings. You must never use deviceswhich bear traits of damage.5.2. FusingThe TruPlasma Bias 3003 power supply has a set of 16A, B-class mains fusesinstalled on the rear side of the enclosure. In case the 16A mains fuses break, anexamination of the power supply’s interior is necessary, so the user should not exchangethese fuses by himself.
External fusing is recommended. A set of 16A, C class externalfuses will provide the necessary circuit protection.Operating Instructions for TruPlasma Bias 3003 GeneratorRev. 3.1.1.1.P.09.01Page 13TruPlasma Bias series 3000/70006.Connection terminalsAll connection terminals are located at the rear side, and should be covered by aprotection grid after cabling.
Sufficient gaps (at least 1U) between modules installedtogether inside one cabinet should be provided for cabling.The power supply is assembled in one industrial steel casing in the 19” standard.Make sure that the connected wire is not under voltage!Mains supply and PE4x at least1.5mm2 cableOutput2x at least1.5mm2 cableFusesRS-232RS-485 or ProfibusAnalog ControlTruPlasma ArcControlOperating Instructions for TruPlasma Bias 3003 GeneratorRev.
3.1.1.1.P.09.01Page 14TruPlasma Bias series 3000/70006.1. Power and control terminalsPower terminals descriptionTerminalDescriptionCableCable endingsMAINS3x 400 VACmin. 3 x 1.5mmPEProtective earthmin. 1.5mm2fellureOUTPUT1200V / 10Amin. 2 x 1.5mm2 high voltage(preferably 3kV) cable2x fellureCable endings23x fellureControl terminals descriptionTerminalDescriptionCableRS232Communicationwith PCstandard RS232 connection. See pin SUBD 9pin femaleassignment belowRS485Field buscommunication,interlock input androof-fan controloutputOne or two twisted pairs shieldedfor RS485.0,5mm2 for the interlock and rooffan control.See pin assignment belowSUBD 9pin maleProfibus(optional)Communicationwith PCOne twisted pair shieldedSUBD 9pin malewith terminatorsARM control24V (protected by a 470Ω serial resistor) appears at pins14(+) and 4(-) when an arc occurs.
This is used to switchoff any cooperating TruPlasma Arc power supply ifnecessary.SUBD 25pin maleAnalogcontrol:see belowSUBD 25pin femaleOperating Instructions for TruPlasma Bias 3003 GeneratorRev. 3.1.1.1.P.09.01Page 15TruPlasma Bias series 3000/70006.2. Analog control terminal descriptionPower Supply Analog Control Connector - SUBD25pin MALE (at device side).Pin nrNameTypeDescription1UactAnalog output0...10 V against GND represents 0…1200 V output voltage in HV modeand 0 … 300V in LV mode2IactAnalog output0…10 V against GND represents 0... 2.5A output current inHV mode and 0 ... 10A in LV mode.3PactAnalog output0…10 V against GND represents 0..
3kW output power14UsetAnalog inputSetpoint value for the output voltage0…10 V at this pin against GND represents a set-point of 0…1200V in HVmode and 0 ... 300V in LV mode.15Ix setAnalog inputCurrent threshold value for the cross arc detector.0..10 V at this pin against GND represents a threshold of 0…2.5A in HVmode and 0 … 10A in LV mode16IsetAnalog inputSetpoint value for the output current0 ... 10 V at this pin against GND represents a set-point of 0…2.5A in HVmode and 0 ... 10A in LV mode.4,17GNDGround8ONenableDigital InputIt must be active (connected to +24V) to enable power ON. Power isswitched off if this pin goes inactive.9HVrequestDigital InputConnect momentarily to 24V with the ONenable input active to switchpower supply ON in HV mode10LVrequestDigital InputConnect momentarily to 24V with the ONenable input active to switchpower supply ON in LV mode12InterlockDigital inputInterlock must be disabled (connected to +24V, pin 6 or 19) to enablepower supply switch-ON.
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