04_Operating_Instructions_TruPlasma_Bias _3003[1] (1032055)
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TruPlasmaBias 3003Power SupplyUSER MANUALNotice!This operating manual is required for the safe operationof the TruPlasma Bias 3003 Power Supplies. Therefore, youshould keep the operating manual close to the unit.TruPlasma Bias series 3000/7000Operating instructionsfor TruPlasma Bias 3003Power SupplySupplyHUETTINGER ElectronicSp. z o.o.Marecka 47PL - 05-220 Zielonkatel:+48 22 761 38 00fax: +48 22 761 38 01info@pl.huettinger.comwww.huettinger.comOperating Instructions for TruPlasma Bias 3003 GeneratorRev.
3.1.1.1.P.09.01Page 2TruPlasma Bias series 3000/7000HeadquartersHÜTTINGER ElektronikGmbH + Co. KGHUETTINGER ElectronicSp. z o.o.Bötzinger Straße 8079111 FreiburgGermanyTel. +49 761 89 71-0Fax +49 761 89 71-1150info@de.huettinger.comMarecka 47PL-05-220 ZielonkaPolandTel. +48 22 761 38 00Fax. +48 22 761 38 01info@pl.huettinger.comHUETTINGER Electronic Inc.111 Hyde RoadFarmington, CT 06032USATel.
+1 860 255 65 55Fax +1 860 255 64 23info@us.huettinger.comHÜTTINGER Electronic K.K.Shinyokohama Tobu AK bldg. 7F3-23-3 Shinyokohama, Kohoku-ku,Yokohama city, Kanagawa 222-0033JapanTel. +81 45 470 3761Fax +81 45 470 3510info@jp.huettinger.comHÜTTINGER Electronics Ltd.11H, Century Ba-Shi Building398 Huai Hai Zhong RoadShanghai 200020-P.R.ChinaPhone +86-21-63 85-12 38 ext 301Telefax +86-21-63 85-16 60info@cn.huettinger.comOperating Instructions for TruPlasma Bias 3003 GeneratorRev.
3.1.1.1.P.09.01Page 3TruPlasma Bias series 3000/7000© 2009, HUETTINGER Electronic.All rights reserved. This manual is purposed to enable the reader to install andoperate safely the equipment described below. Making copies of any part of this manualfor any purpose other than these is a violation of Poland copyright law.In the interest of providing even better equipment, HUETTINGER Electronicreserves the right to make product modifications without notification or obligation. To thebest of our knowledge, the information contained in this manual is the most accurateavailable as of the date on the front page.© 2009, HUETTINGER Electronic.To ensure years of dependable service, HUETTINGER Electronic ® products arethoroughly tested be among the most reliable and highest quality systems available.
Allparts and labour carry our standard 3-year warranty.For Customer Service or Support, call:HUETTINGER Electronic Sp. z o.o.tel:+48 22 761 38 00fax: +48 22 761 38 01service@pl.huettinger.comReturning Units for RepairBefore returning any product for repair or adjustment, call HUETTINGERElectronic Service and discuss the problem with a representative service engineer. Beprepared to give the serial number of the unit and the reason for the purposed return.This consultation call will allow Customer Service to determine if the unit needs to bereturned. Such technical consultation is always available at no charge.Operating Instructions for TruPlasma Bias 3003 GeneratorRev. 3.1.1.1.P.09.01Page 4TruPlasma Bias series 3000/7000Table of contentspage1.Safety information ................................................................................................61.1.1.2.1.3.1.4.Important information ............................................................................................
6Personnel ................................................................................................................. 6Safety standards profile.......................................................................................... 6Transportation and storage ....................................................................................
72. Explanation of symbols and notes..........................................................................83.General information .............................................................................................93.1.4.TruPlasma Bias 3003 block diagram........................................................................ 9Electrical and mechanical specification..............................................................114.1.4.2.5.Electrical and mechanical specification in tables ................................................. 11Power characteristic for TruPlasma Bias 3003 module ........................................
12Installation...........................................................................................................135.1.5.2.6.Installation site ...................................................................................................... 13Fusing..................................................................................................................... 13Connection terminals ..........................................................................................146.1.6.2.6.3.6.4.Power and control terminals................................................................................. 15Analog control terminal description..................................................................... 16RS-232 and RS-485 terminals description .............................................................
18Profibus terminals description .............................................................................. 207.Working with the Front Panel Console ............................................................218.Description of displayed data and settings.......................................................248.1.8.2.8.3.9.Basic controls and readouts ..................................................................................
24Basic ON/OFF and mode settings.......................................................................... 24User setup menu.................................................................................................... 25Setting the arc detection criteria .......................................................................2610.Interfaces..........................................................................................................2910.1.10.2.RS-232/RS-485 transmission protocol ................................................................... 29Profibus transmission protocol ............................................................................. 36Operating Instructions for TruPlasma Bias 3003 GeneratorRev.
3.1.1.1.P.09.01Page 5TruPlasma Bias series 3000/70001.Safety information1.1. Important informationThe TruPlasma Bias 3003 Power Supply is designed to power industrial vacuumprocess chambers operating in PVD surface treatment technologies. Any other use, or anyuse beyond the foregoing, is deemed to be improper.
The HUETTINGER Electroniccompany shall not be liable for any loss and damages resulting from such usage.Correct usage also includes:• compliance with all instructions from the operating manual,• adherence to inspection and maintenance intervals.Safe operating procedures and proper use of the equipement are theresponsibility of the user of this system.1.2. PersonnelOnly qualified personnel may work with the TruPlasma Bias 3003. "Qualified"means that the staff will be familiar with safe installation, maintenance and operation.All of the personnel working with this equipment must take precautions to protectthemselves against possible electrical shocks or other fatal injuries. They must beacquainted with the entire TruPlasma Bias 3003 operating instruction manual andunderstand all of its contents.Do not be careless around the equipment!1.3.
Safety standards profileThe TruPlasma Bias 3003 Power Supply was designed and constructed incompliance with requirements included in the following standards and EC directives:•EN 60950:•EN 50178:•EN 61000-6-4:•EN 61000-6-2:1992 "Safety of information technology equipment,including electrical business equipment"1998 "Electronic equipment for use in powerinstallations"2001 "Generic standards -Emission standards forindustrial environments"2001 "Generic standards – Immunity for industrialenvironments”Operating Instructions for TruPlasma Bias 3003 GeneratorRev. 3.1.1.1.P.09.01Page 6TruPlasma Bias series 3000/7000EC directives:•73/23/EEC•89/336 EMCLow Voltage Directive – Law for electricalequipment within certain voltage limitsDirective as amended by 93/68/EEC – Laws relatingto electromagnetic compatibilityCheck the external fuse value and grounding circuit beforeswitching the mains on.Never unscrew the front terminal cover before switching themains off.The positive output of the power supply must be connectedto the chamber potential (grounded).1.4.
Характеристики
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