mass_spectrometer Pfeiffer обзор (1248468), страница 18
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The extraction orifice is in direct contactwith the plasma. To avoid disturbance of theDimensions in mmPPM 42298plasma, the electrical potential of the extractionorifice could adjusted to the application(positive, negative, ground, floated).The energy filter is a CMA with 0.3 eV FWHM.For the analysis of neutral particles a field-freeion source with a very low energy distributionis used.The optimized software package QuadStar™PPM is part of delivery.Summary PPM 422 Plasma Process MonitorMass range1–5121–10241–2048Detection limit / sensitivityEnergy rangeEnergy resolutionOperating pressure, max.Analyzer with energy analyzerRod system, material/diameter/lengthDetectorQuadrupole control unitCable length QMA/QMSSoftwareTurbomolecular pump, air cooledDiaphragm pumpWeight, analyzer incl.
TurboConnection flange1)1)1)-512 bis +5120.30.1QMA 400Mo/8/200SEM 217/FaradayQMS 42210QuadStar™ PPMTMU 071-03MVP 015-226DN 63 CF-512 bis +5120.30.1QMA 400Mo/8/200SEM 217/FaradayQMS 42210QuadStar™ PPMTMU 071-03MVP 015-226DN 63 CF-512 bis +5120.30.1QMA 400Mo/8/200SEM 217/FaradayQMS 42210QuadStar™ PPMTMU 071-03MVP 015-226DN 63 CFPTM26607PTM26608on requeston requesteVeVmbarmmmkgOrdering numberPPM 422, 230 VPPM 422, 115 VPTM26605PTM26606Two stage version, other mass and energy ranges on request.Stand-alone ComponentsPPM 422Ordering numberCathode unit, yttr. Iridium, for PPM 422BN845983-TAccessoriesOrdering numberSVV 063 PF, safety gate valve, electropn.
24 VDC(Mounted between analyzer and turbo pump)PFF682311)AnalysisIonenanalyseof IonsPPM 422High-end mass spectrometer QMG 422 is used at PPM 422. For the mass spectrometer measurements the technical data of the QMG 422 are valid.The extracted ion currents from the plasma depends on the experimental construction.
So it isn't possible to give data for all measurement parameter of the PPM 422.All PPM 422-systems are tested before delivery with a DC-plasma in an application lab.994.3 Mass Spectrometer for special ApplicationsEPD 400 Endpoint DetectorThe EPD 400 is a differentially pumped mass spectrometer unit with ionoptics for measurement of external generated positive ions.Endpoint detection and process monitoring at ion milling and otheretching processes at vacuum conditions.Detection of positive ions of condensable materials, as e.g. metall ionsat sputter processes.Mass range 1–512 amu.Summary EPD 400 Endpoint DetectorMass range in amufor detection ofAnalyzerRod system, material/diameter/lengthDetectorIon counter preamplifierRF-GeneratorQuadrupole control unitwith ion source power supplyHigh voltage supplyIon counterSoftwareTurbomolecular pump, air cooledDiaphragm pumpConnection flangemm1–512positive ionsQMA 400Mo/8/200SEM 218/FaradayCP 400QMH 400-5QMS 422IS 420HV 420IC 421QuadStarTMTMU 071-03MVP 015-2DN 63 CFOrdering numberEPD 400, with 90°-turn unitPTM26630AccessoriesEPD 400Ordering numberAS 420 for extension of the energy range of the detected ionsBG572672-TDimensions in mm90°-turn unit100DMM 422 Deposition Material MonitorMeasurement of material flow from: electron-beam evaporators, effusion sources, Knudsen cells and evaporator boats.Measurement of impurities in evaporation materials.Mass range 1–512 amu.1 Ion source2 OrificeThe DMM 422 is an high-end mass spectrometer with integrated water cooling (water consumption 15 l/h) for highest stability.
It is usedfor measurement of material vapour fromvarious sources in a high vacuum < 10-6 mbar.Scope of delivery of DMM 422 is include control unit QMS 422, analyzer QMA 400, DN 100CF-F, Cross-Beam ion source, Faraday detectorand water cooled shield and Quadstar softwarepackage.For analysis a vapour beam is leaded by theorifices system and the water cooled shielddirect to the Cross-Beam ion source and passedit without contact. The generated ions willextracted perpendicular to the material beam.With standard orifices following sensitivitiesare met at the location of the ion source(e.g. Cu, m/e 63, insertion depth 246.5 mm):While the integration to the deposition chamber the orifice system must be adjusted to thegiven geometry.
Configuration and localisationwill by done with help of a product specialist.– evaporator source,at a = 10°: 2.5 · 10–13 A/nm s–1.– evaporator source, perpendicular underanalyzer: 5 · 10–13 A/nm s–1AnalysisIonenanalyseof IonsDimensions in mmDMM 4221015 AppendixContentsPage5 Appendix102102Tables104Curves of vapor pressure108Composition of atmospheric air109References110General terms and conditions of sales and supply112103AppendixAnhangAnalysis of IonsGas analysisResidual gas analysisFundamentals5 AppendixTablesRelative probalities of ionizationreffered to nitrogen, appr. 100 eV electronenergyHeNeD20.150.300.35H2AirN20.441.01.0O2H2OCO1.01.01.05ArNONH31.21.21.3HFCO2HCI1.41.41.6N2OKrSO21.71.02.1SF6XeCH42.32.41.6C2H6C3H8C4H102.63.74.9n-C5H12C6H14C6H66.06.65.9C6H5CIC6H5CH3C6H4(CH3)27.06.87.8CH3OHCH3CICH2CI21.83.13.7CHCI3CCI4CCI2F24.86.02.7C2H5OHC2H5CI3.64.0Mass spectrum of CO2at 70 eV electron energym/eIntensityIon1216222.466.241.7812C+2829446.550.06100.001245461.160.4113C16O +212C16O18O+10416O+12C16O ++2C16O+C16O+12 16C O2+13Key fragment ionsMass numberKey fragments124H+H2+He+678C++N++O++121314C+CH+N+CH2+CO++151617CH3+O+OH+NH+CH4+NH3+NH2+181920H2O+F+HF+H3O+20NE+222426CO2+C2+C2H2+272829C2H3+N2C2H5+C2H4+CO+15N14N+303132C2H6+CF+O2+NO+CH2OH+32S+343536H232S+35CI+34S+H35CI+36Ar+37383937CIH37CI+C3H3+C3H+C3H2+39K+404142Ar+C3H5+C3H6+C3H4+41K+434445C3H7+CH3CO+C3H8+CO2+N2O+C2H5O+ (Alcohol)464850NO2+SO+CF2+555758C4H7+C4H9+(CH3)2 CO+ (Aceton)646977SO2+CF3+C6H5+ (Phenyl)788587C6H6+ (Benzol)C35CIF2+ (Freon)C37CIF2+ (Freon)(He++)+Ar++22NE+18O16O+38Ar+C2H5OH+92.593.5101185Re++Re++C35Cl2F+ (Freon)103105130C35Cl37ClF+ (Freon)C37Cl2F+ (Freon)C2HCl3+ (Trichlor)132134136C2HCl3+ (Trichlor)C2HCl3+ (Trichlor)C2HCl3+ (Trichlor)149151Phthalic ester (Softening agent)C235Cl2F3+ (Freon)153155182C235Cl37ClF3+ (Freon)C237Cl2F3+ (Freon)W+183184185W+W+Re+186187W+Re+187Relative ion currents of fragment ions90 eV energy of ionizationMass number123H2He3100CH4H2O16.52.4NeN2COC2H6O2ArCO2C3H89.65.01001213143.07.816.015161785.0100 01.21820226.3140.71.23.30.89.70.60.92.34.71.826 07.22.81816.01000100 010.222.62.12526273.822.233.4282930100 00.7100 01.20.89.843.5100 020.022.231323413.061.0100 021.7100 00.43637380.344.66.70.0639404120.22.615.010042434445100 01.2AtomicnumberElementChem.
MassRelativesymbol number abundance [%]1HydrogenHD1299.9850.014922HeliumHe340.00013799.9998637.4292.583LithiumLi674BerylliumBe95BoronB101119.6180.396CarbonC121398.8931.1077NitrogenN141599.63370.36638OxygenO16171899.7590.03740.20399FluorineF1910NeonNe20212211SodiumNa2312Magnesium Mg242526100AtomicnumberElementChem. MassRelativesymbol number abundance [%]13AluminiumAl14SiliconSi28293010092.214.703.0915Phosphorus P3116SulfurS32333495.00.764.2217ChlorineCl353775.5324.4718ArgonAr3638400.3370.06399.60019PotassiumK39404193.10.01186.8820CalciumCa40424344464896.970.640.152.060.0030.1821ScandiumSc4522TitaniumTi464748495010090.920.268.8227100AppendixTable of naturally occuring isotopes4.822.824.00.810010078.7010.1311.177.937.2873.945.515.341055 AppendixAtomicnumberElementChem.
MassRelativesymbol number abundance [%]AtomicnumberElementChem. MassRelativesymbol number abundance [%]23VanadiumV50510.2499.7644RutheniumRu24ChromeCr505253544.3183.769.552.3825Manganese Mn5596989910010110210426IronFe5456575845RhodiumRh10346PalladiumPd27CobaltCo5928NickelNi586061626467.8826.231.193.661.081021041051061081100.9610.9722.2327.3326.7111.8147SilverAg10710951.3548.6548CadmiumCd1061081101111121131141161.220.87512.3912.7524.0712.2628.867.581005.8291.662.190.331005.511.8712.7212.6217.0731.6118.5810029CopperCu636569.0930.9130ZincZn646667687048.8927.814.1118.570.6249IndiumIn31GalliumGa697160.439.61131154.2895.7250TinSn32Germanium Ge707273747620.5227.437.7636.547.761121141151161171181191201221240.960.660.3514.307.6124.038.5832.854.725.9451AnthimonySb12112357.2542.7552TelluriumTe1201221231241251261281300.092.460.874.616.9918.7131.7934.4853IodineJ12754XenonXe12412612812913013113213413655CesiumCs13356BariumBa1301321341351361371380.100.092.426.597.8111.3271.6657Lanthanum La1381390.0999.9158CeriumCe1361381401420.190.2588.4811.0759PraseodymiumPr14133ArsenicAs7534SeleniumSe7476777880821000.879.027.5823.5249.829.1935BromineBr798150.5449.4636KryptonKr7880828384860.352.2711.5611.5556.9017.3737RubidiumRb858772.1527.8538StrontiumSr848687880.569.867.0282.5639YttriumY8940ZirconiumZr909192949641Niobium42Molybdenum Mo43106NbTechnetium Tc9310051.4611.2317.1117.402.8010092949596979810015.849.0415.7216.539.4623.789.63––1000.090.091.9226.444.0821.1826.8910.448.87100100ElementChem.
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