mass_spectrometer Pfeiffer обзор (1248468), страница 14
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Iridiumfor Axial ion source1 piece5 pieces2 pieces1 pieceBN845061-TBN845018-TBN845052-T–BN845082-TBN845031-TBN845088-TBN845291-TBN845166-T–BN845282-T–for Cross-Beam ion source (also gas tight)for Grid ion sourceResidual gas analysisAnalyzer QMA 125SEM 217secondary electron multiplier, 17 Cu-Be-dynodes, 400 °C, max.BG521611-XQuadrupole Control Unit QMS 422Quadrupole controller QC 422 (technical data and dimensions see page 74)PTM26580Quadrupole Electronics QME 125contains RF-generator, ion source supply and high voltage supply for SEMQME 125-1; 2.45 MHz (1-100 amu), cable length QME/QMA 0.17 m, weight 2.5 kgQME 125-1; 2 MHz (1-100 amu), cable length QME/QMA 6 m, weight 4 kgQME 125-2; 2 MHz (1-200 amu), cable length QME/QMA 0.17 m, weight 2.5 kgcable QME/control unit, 10 mcable QME/control unit, 20 mQME holder, DN 63 CFPTM36376PTM36382-1PTM36378BG448197-TBG448170-TBG546510-TElectrometer preamplifier EP 422fast, highly sensitive current-to-voltage converter with auto ranging in all rangesfor direct connection to the analyzer, include cable to QMEPT444570-TAccessories, QMG 422Input/Output modules and components for multiplex mode and for completion with ion countersee accessories for QMG 422, page 73Dimensions in mm*– Axial beam ion source = 30.5 mm– Grid ion source = 29 mm– Cross-Beam ion source = 18.6 mm(10 mm to the middle of the sensitivevolumen)– Gas tight Cross-Beam ion source =18.6 mm (10 mm up to the gas connection)QMA 125 with 90° off-axis SEM673 Mass spectrometer for gas analysisContentsPage3 Mass spectrometer for gas analysis3.13.23.36868Gas Analysis at Pressure Range < 10-4 mbar70QMG 422 with QMA 400/410/43070Stand-alone Components QMG 42272Accessories QMG 42273Quadrupole Controller QMS 42274RF-generator QMH 400/41075Gas Analysis at Pressure Range up to 10 mbar76SPM Sputter Process Monitor76Stand-alone Components/Accessories79HPA 200 High Pressure Analyzer80Stand-alone Components/Accessories81Examples for Combination of Stand-alone Components82Gas Analysis at Pressure Range up to 1 bar84OmniStarTM GSD 301 O, for general gas analysis84Deliverable options of OmniStarTM GSD 301 O85Gas Stream Selector GSS 30085ThermoStarTM GSD 301 T for coupling to thermobalance86QuadStarTM Analysis Software86Accessories87Examples for Combination of Stand-alone Components88Vacuum chambers and LN2 cold trapp89Gas Inlet Systems/Stand-alone Components/Accessories90Pumping Systems9269AppendixAnalysisof IonsIonenanalyseGasanalysisGasanalyseResidualgas analysisPartialdruckmessungFundamentals3.1 Gas Analysis at Pressure Range < 10-4 mbarQMG 422 with QMA 400/410/430Unit resolution in all mass ranges, even up to 2048.Detection of neutrals, positive and negative ionsHigher resolution selectable, also at low mass numberse.
g. for the separation of He and D2.Multiplex modeFulfills analytical requirements ppb range detection limit,high reproducibility and long term stability, small contribution to neighboring masses, large dynamic.Scope of deliveryAnalyzerPreamplifierRF generatorEPPC0.7 mIon sources:AxialCross-Beam- (with magnet)Gas tight Cross-Beam- (with magnet)Grid- (vacuum annealed)Cross-Beam with ion opticsDetectors:Faraday/90° off-axis SEMBakeout temperature:400 °CTechnical Data of controller QMS 422 see page 7470QuadStar™ 422QMH400410QMADN 63 CFDN 100 CFController QMS 422Standard 3 mOption 10 mBasic configuration:Quadrupole controller QC 422Ion source – power supply IS 420High voltage supply HV 420/421Accessory modules:See page 73QuadStar™ Software withRS-232-C Cable and AdapterSummary QMG 422Detection limit, min.Sensitivity for Ar, min.1)Operating pressure, max.FaradaySEMPartial pressure ratio with SEMAnalyzerRod system, material/diameter/length90° off-axis SEMHigh voltage supplyRF-generatorElectrometer preamplifierOperating temperature/AnalyzerBakeout temperature/AnalyzerConnection flangembarA/mbarmbarmbarppbmm°C°C1-1281-1281-3401-3401-3005 · 10-161 · 10-31 · 10-41 · 10-5< 0.3QMA 410Mo/16/300SEM 217HV 420QMH 400-1EP 4221504003)DN 100 CF-F–1 · 10-31 · 10-41 · 10-5< 0.3QMA 410Mo/16/300SEM 218HV 421QMH 400-1EP 4221504003)DN 100 CF-F1 · 10-155 · 10-41 · 10-41 · 10-5< 0.5QMA 410Mo/16/300SEM 217HV 420QMH 410-3EP 4221504003)DN 100 CF-F–5 · 10-41 · 10-41 · 10-5< 0.5QMA 410Mo/16/300SEM 218HV 421QMH 410-3EP 4221504003)DN 100 CF-F2 · 10-152 · 10-41 · 10-41 · 10-5<1QMA 430st.
steel/8/200SEM 217HV 420QMH 400-5EP 422150400DN 63 CF-FPTM27318PTM27305-PTM27317PTM27310-PTM27319PTM27315-PTM27320PTM27321PTM27322PTM27302-PTM27311----PTM27323with ion sourceOrdering numberAxial-, with Re filamentCross-Beam-, with two W filamentsCross-Beam-, with magnet and two W filamentsGas tight Cross-Beam-, with two W filamenteGas tight Cross-Beam-, with magnetand two W filamentsGrid-, with W filamentPTM27316PTM27300PTM27301Mass range in amuDetection limit, min.Sensitivity for Ar, min.1)Operating pressure, max.FaradaySEMPartial pressure ratio with SEMAnalyzerRod system, material/diameter/length90° off-axis SEMHigh voltage supplyRF-generatorElectrometer preamplifierOperating temperature/AnalyzerBakeout temperature/AnalyzerConnection flangembarA/mbarmbarmbarppbmm°C°C-1-5121-5121-10241-20481 · 10-155 · 10-41 · 10-41 · 10-5<0.5QMA 400Mo/8/200SEM 217HV 420QMH 400-5EP 4221504003)DN 63 CF-F5 · 10-41 · 10-41 · 10-5<0.5QMA 400Mo/8/200SEM 218HV 421QMH 400-5EP 4221504003)DN 63 CF-F2 · 10-41 · 10-41 · 10-5QMA 400Mo/8/200SEM 217HV 420QMH 410-1EP 4221504003)DN 63 CF-F1 · 10-41 · 10-41 · 10-5QMA 400Mo/8/200SEM 218HV 421QMH 410-2EP 4221504003)DN 63 CF-Fwith ion sourceOrdering numberAxial-, with Re filamentCross-Beam-, with two W filamentsCross-Beam with magnet and two W filamentsgas tight Cross-Beam-, with two W filamentsgas tight Cross-Beam with magnetand two W filamentsCross-Beam-, with two W filaments and ion optics, 3 lenses2)Grid-, with W filamentPTM27330PTM27331PTM27332PTM27333-PTM27340-PTM27350-PTM27406PTM27334--PTM27336PTM27335-PTM27341-Other combinations of devices on request.Stand-alone components and accessories see next page.For gas analysis please also see Prisma™ QMS 200 Mpage 62 and 63.Gas analysisMass range in amu1) Faradayin deflection unit, unit resolution, crossbeam ion source with magnet,emission 1 mA2)Isolated3)with magnet max.
300 °C713.1 Gas Analysis at Pressure Range < 10-4 mbarStand-alone Components QMG 422AnalyzersRod system/materialRod diameter/lengthOperating temperature/AnalyzerBakeout temperature/AnalyzerConnection flangeWeight with 90°-SEMmm°C°CkgQMA 400QMA 410QMA 430QMF 150/Mo8/2001504001)DN 63 CF-F10.7QMF 160/Mo16/3001504001)DN 100 CF-F17.2QMF 130/st. steel8/2001504001)DN 63 CF-F10.7Ordering numberwith SEM 217, Axial ion source, Re filamentwith SEM 217, Cross-Beam ion source, two W filamentswith SEM 217, Cross-Beam ion source, with magnetand tow W filamentswith SEM 217, gas tight Cross-Beam ion source, two W filamentswith SEM 217, Cross-Beam ion source, two W filaments,ion optics, 3 lenseswith SEM 217, Grid ion source, W filamentPTM07710PTM07711-PTM09710PTM09711PTM07718PTM08711-PTM07713PTM08712PTM09712PTM07717--PTM07715-PTM09713Filaments of QMA 400/410/430RheniumBN845022-TBN845052-T-TungstenBN845024-TBN845088-TBN845095-Tyttr.
IridiumBN845057-TBN845282-T-for axial ion sourcefor Cross-Beam ion source (gas tight)for grid ion sourceQty.1 piece5 pieces2 pieces1 pieceSecondary electron multiplierOrdering numberSEM 217 with 17 Cu-Be-dynodes, 400 °C, max.SEM 218 with conversion dynode, 18 Cu-Be-dynodes, 400 °C, max.HC-SEM 218 mounted at flange, for conversion SEM 217 to SEM 218BG521611-XBG444220-TBG444248-TQuadrupole Control Unit QMS 422Ordering numberQuadrupole Controller QC 422 (technical data and dimensions see page 74)PTM26580Ion source supply IS 420Ordering numberFor installation at controller QMS 422.
5 slots of QMS are needed.The IS 420 supplies ion source and ion optics.cable IS 420/QMA, 3 mcable IS 420/QMA, 10 mBG512900-TBG548082-TBG548083-THigh voltage supply HV 420/421for installation at controller QMS 422HV 420, two slots of QMS 422 and one cable HV/SEM are neededsupplies voltage, 0 till –3.5 kV in steps of 1 V, for SEM 217HV 421, three slots of QMS 422 and two cables HV/SEM are neededsupplies voltage, 0 till –3.5 kV in steps of 1 V, for SEM 217/218,supplies voltage for detection of positive and negative ions with SEM 217,and supplies voltage for additional acceleration (–6 kV) for SEM 218cable HV/SEM, 3 mcable HV/SEM, 10 m1)with magnet max.
300 °C72Ordering numberBG546040-TBG442250-TBG541978-TBG541979-TRF-generator QMH 400/410Ordering numberinclude cable QMH/QMA 0.7 m; technical data see page 75QMH 400-1; 2.05 MHzQMH 400-5; 2.25 MHzQMH 410-1; 1.7 MHzQMH 410-2; 1.3 MHzQMH 410-3; 1.4 MHzExtension cable QMH/QMS 422, 7 mPTM23067PTM23066PTM40566PTM40567PTM40568BG448175-TElectrometer Preamplifier EP 422Ordering numberfast, highly sensitive current-to-voltage converter with auto ranging in all rangesfor direct connection to the analyzer, include cable to QME/QMHPT444570-TAccessories QMG 422Input/output board for QMS 422Ordering numberAI 421 analog input, 16 channels, ±10.24 V, 12 bitIC/AO 421 analog output include ion counter, 12 channels, ±10.24 V, 12 bitDI 420 Digital input, 32 inputsDO 420 Digital output, 32 outputsBG442240-TBG442320-TBG574700-TBG546004-TFor completion with ion counterOrdering numberIC/AO 421 ion counter include analog output, counting frequency, max.
50 MHz; pulse width min. 10 nsCP 400 ion counter preamplifier, pulse width 10 ns typ, pulse pair resolution <20 ns, dimensions page 75cable CP/IC, 3 mcable CP/IC, 10 mBG442320-TPT442210-TBG448134-TBG448199-TOrdering numberTechnical data see page 65OHA 200, Optical HUB, 5 PortsOHA 200, Optical HUB, 10 PortsArcNet-PCMCIA adapter setPCI-PCMCIA Bridge for PCFiber optic cable, 10 mFiber optic cable, 20 mFiber optic cable, 50 mPT442510-TPT442520-TPT442530-TPT442540-TP51596152HP51596152KP51596152QChambers and gas inlet for combination of complete systems for higher pressure rangessee page 82/83 and page 88.Dimensions in mm*– Axial beam ion source = 26 mm– Grid ion source = 27 mm– Cross-Beam ion source = 35.5 mm(23.5 mm to the middle of the sensitive volume)– Gas tight Cross-Beam ion source = 48 mm(gas connection in axis)– Ion optics, 3-lense = 129 mm– Cross-Beam ion source with axial ion optics = 43.5 mm– Cross-Beam ion source with 3-lense ion optics = 171 mmQMA 400, QMA 430QMA 410with 90° off-axis SEMwith 90° off-axis SEMEP 422 Electrometer preamplifier73Gas analysisFor LAN- and multiplex mode3.1 Gas Analysis at Pressure Range < 10-4 mbarQuadrupole Controller QMS 422The QMS 422 contains the quadrupole controller QC 422,a power supply and a data bus with 14 free slots.Configuration adapted to the application.The main features are:– extremely high measurement speeds are achieved thanksto the multiprocessor technology, which facilitates paralleldata acquisition and sequence control.– Electrometer amplifier with autoranging results in a widedynamic range within one mass scan.
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