mass_spectrometer Pfeiffer обзор (1248468), страница 17
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The adaption to the inletpressure is be done by changing the orifice ofthe GEV 010.TMU 071TMH 071MVP 015-2Sample gas stream approx. 2 - 3 sccm.Depending on the application the mass spectrometer PrismaTM or QMG 422 could be used.MVP 015-2The sketch shows an oil-free turbo pumpingstation for the pressure stage at the GEV 010.Example with gas inlet system UDV 040QMA 400 withCross-Beam ion sourceLN2 cryo trapEP 422QMS 422heated Quarz capillaryUDV 040 withgas transfer pipeInlet pressure range 100 - 1200 mbar.SEV 217The simplified sketch show the gas inlet, 90degree turned. A gas tube feeds the sample gasas a beam direct to the Cross-Beam ion sourceof the analyzer.inlet pressure100–1200 mbarQMH400-5TMU 071TMH 071with adjustable gas inlet valve UDV 040 andvalve EVB 016 SX at the pumping line of thepressure stage for adjustment to inlet pressureand sample gas consumption.Depending on the application the mass spectrometer PrismaTM or QMG 422 could be used.MVP 015-4MVP 015-2Example with gas inlet system GES 020Optimized for trace analysis of pure gas byminimization of the internal surfaces andvolume.QMA 410 withCross-Beam ion sourceEP 422QMS 422inlet pressure900–1200 mbarGES 020heated quarz capillary gas transfer pipewith gold apertureSEV 217TMU 200 MTMH 071MVP 015-288TPD 011MVP 055-3QMH400-1Inlet pressure range 900 - 1200 mbar.With that gas inlet system constiting of quartzcapillary and gold orifice it is possible to verifyreactive gases (e.g.
O2) in a range < 10 ppm.The sketch shows a combination of turbo-dragpump TPD 011 and diaphragm pump asbacking pump unit of the magnetic bearingturbo pump TMU 200 M. This combination ofpumps is complete oil-free and features highestcompression ratio for light gases.Vacuum chambers and LN2 cold trappLow background – requisities for solving many different analyticalproblems.High-quality, slit-free model.No memory effects.Reproducible measurement data.Ordering numberChamber for Prisma™ QMS 200 F and QMS 200 M, and QMA 125 with FaradayPT442830-T(include elbow 90°)Dimensions in mmGas analysisOrdering numberChamber for QMA 125 with 90°-off-axis SEM and for QMA 400 and QMA 430BG442540-XDimensions in mmOrdering numberChamber for QMA 410 with Cross-Beam ion sourcePF000025Dimensions in mmOrdering numberLN2-Cold trapp, DN 63 CF, with cooling finger for reduction of residual gas background at the area of the ion sourceLN2-capacity 1.9 lPT160001893.3 Gas Analysis at Pressure Range up to 1 barGas Inlet SystemsTwo-stage gas inlet system for demixing-free inlet of gas mixtures atpressure range up to 1000 mbar for analysis with quadrupole massspectrometer.First pressure stage is a capillary in st.
steel (GES 010/052) or quartz(GES 020/UDV 040). By heating of the capillary, most condensation ofvapor can be prevented.The second pressure stage is an orifice (GES 010/020/052) or opening ofvalve (UDV 040).Summary Gas Inlet SystemsGas Inlet SystemGES 010GES 052GES 0201)UDV 040Actuationmanualopenmanual 2)1000st. steel0.15/1000200electromagn.24 VDC1000st. steel0.15/10001201000Quarz0.15/10002001000Quarz0.15/1000200DN 40 CFDN 16 ISO-KFDN 40 CFDN 16 ISO-KFDN 40 CF1/4" VCR maleMaterials with media contactst. steel, gold, PTFEst. steel, VitonScope of deliveryValve GEV 010with heating jacket,throttle line,capillary hose,assemblycomponents,Valve GEV 052,capillary withheater,shut-off valvein pump pipingOrdering numberBG444530-TInlet pressureCapillary, heatedinner diameter/lengthOperating temperature, maxConnection flangeHigh vacuum sideRoughing sidembarmm°CDN 40 CF1/4" VCR malequartz,quartz, goldst. steel, sapphire,Cu-alloyFlange withGas dosing valveorifice andUDV 040 withpumping connection, heating jacket,capillarycapillary withwith heaterheater and pumping connectionOrdering numberBG444540-TBK355370-TBK355366-TStand-alone ComponentsOrdering numberCapillary with heating jacket, length 1 m, ID 0.15 mm/AD 1/16" BK353584-TOrifice holder, for GEV 010BK375004-TBK353584-TAccessoriesGas Inlet SystemsOrdering numberOrifice – 0.005 mmOrifice – 0.01 mmOrifice – 0.02 mmOrifice – 0.03 mmOrifice – 0.05 mmOrifice – 0.1 mmConversion kit for gas tight ion source/QMA 400Gas tube for chamber BG442540-X andCross-Beam ion sourceGas connection on the customer's sideBK362334BK212573BK212574BK212575BK212576BK212577BK375579-TPumps/pumping stations for first pressure stage see page 901)Immersion depth of orifice designed to match chamber BG442540-X and Cross-Beam ion source2)UDV for automatic control on request90BK362334BK212573BK212574BK212575BK212576BK212577BG442259-TPT160000-TBK353995-TBK353995-TGES 010 (BG 444530-T)GES 052 (BG 444540-T)GES 020 (BK 355370-T)UDV 040 (BK 355366-T)Gas analysisDimensions in mm913.3 Gas Analysis at Pressure Range up to 1 barPumping SystemsThe right selection of pumping systems for the analysis vacuum systemis important for the efficiency of the quadrupole mass spectrometer.Pfeiffer Vacuum-turbomolecular pumps and their accessories could beoptimal configurated to the different analytical applications.See also chapter 1.3.1Examples for special configurated pumping systems for the analyzervacuum system.a) Turbo-Drag-Pumping system for gasmixtures with corrosive or explosivecomponentsWith inert gas the bearings of the turbo pumpand the fore line pump will be protected andthe sample gas will be rarefied.
This reducesload of corrosion and protects the systemagainst explosive gases.b) und d) Turbo-Drag-Pumping system with anadditional turbo pump at the foreline sidea)b)With such a pump combination the compression ratio for light gases (H2, He) will increased.This reduces the background and increasesthe detection limits for these gases.c) und d) Turbo-Drag-Pumping system withmagnetic bearing Turbo-Drag-PumpTMU 200 MFor evacuation of large analyzer chambers(QMA 410).These pumping systems with magnetic bearing turbo pumps are absolute free of oil andfree of maintenance.c)d)Our complete program of turbo pumps with detailed information youcan find at our Pfeiffer-Vacuum catalogue.9293Gas analysis4 Mass spectrometer for ion analysisContentsPage4 Mass spectrometer for ion analysis4.14.24.39494Ion Beam Analysis96QMG 422 Secondary Ions Mass Spectrometer96Accessories96Plasmamonitoring98PPM 422 Plasma Process Monitor98Stand-alone Components/Accessories99Mass Spectrometer for special Applications100EPD 400 Endpoint Detector100Accessories100DMM 422 Deposition Material Monitor10195AppendixAnalysis of IonsGasGasanalyseanalysisResidual gas analysisFundamentals4.1 Ion Beam AnalysisTargetIonsanndeautrlparQMG 422 Secondary IonsMass SpectrometertsPrimaryion beamAr+Mass ranges 1-340 amu, 1-512 amu and 1-1024 amu,option 1-2048 amu.Detection of positive and negative ions.3-linses ion optics with beam stop, insulatedIon counter with integrated 12-channel analog outputSIMS (Secondary Ion Mass Spectrometry) is a proventechnique for surface analysis.
It can be used either asan independent method of measurement or in conjunction with other surface analysis methods such as ESCA(Electron Spectroscopy for Chemical Analysis) and AES(Auger Electron Spectroscopy). SIMS is always chosenwhen its high sensitivity and the capability to detectisotopes are crucial to the result of the analysis.Scope of deliveryAnalyzerPreamplifierCP 400QMAIon optics 3 lensesDN 63 CFDN 100 CFDetectors:Faraday/90° off-axis SEMBakeout temperature:400 °CRF generatorControl unit QMS 422QuadStar™ 422QMH400410PC0.7 mStandard 3 mOption 10 mBasic configuration:Quadrupole controller QC 422Ion source power supply IS 420High voltage supply HV 421Ion counter with analog output IC/AO 421Options:see page 73QuadStar™ Software withRS-232-C cable and adapter96Summary QMG 422 Secondary Ions Mass SpectrometerMass range in amuDetection limitfor positive particlesfor negative particlesdynamic rangefor positive particlesfor negative particlesOperating pressure, max.AnalyzerRod system, material/diameter/length90° off-axis SEMIon optics with beam stop, isolatedHigh voltage supplyRF-generatorIon counter preamplifierIon counterOperating temperature/analyzerBakeout temperature/analyzerConnection flangecpscpscpscpsmbarmm°C°C1–3400.1101071051 · 10-5QMA 410Mo/16/300SEM 2173 lensesHV 421QMH 410-3CP 400IC/AO 421150400DN 100 CF-F1–5120.1101071051 · 10-5QMA 400Mo/8/200SEM 2173 lensesHV 421QMH 400-5CP 400IC/AO 421150400DN 63 CF-F1–10240.1101071051 · 10-5QMA 400Mo/8/200SEM 2173 lensesHV 421QMH 410-1CP 400IC/AO 421150400DN 63 CF-FOrdering numberQMG 422 Secondary Ions Mass SpectrometerPTM27312PTM27337PTM27342Also deliverable verions with– 2-lenses ion optics– 3-lenses ion optics with Cross-Beam ion source– 2-lenses ion optics with Cross-Beam ion sourceStand-alone components, technical data and dimensions of control unit QMS 422, Analyzer QMA 400/410,RF-generator QMH 400/410 and ion counter preamplifier CP 400 see pages 70 till 75.AS 420 Adapter-SIMSOrdering numberfor extension of the energy range of the detected ionsBG572672-TInput/output board for QMS 422Ordering numberAI 421 analog input, 16 channels, ±10.24 V, 12 bitDI 420 digital input, 32 inputsDO 420 digital output, 32 outputsBG442240-TBG574700-TBG546004-TFor LAN- and multiplex modeTechnical data see page 65OHA 200, Optical HUB, 5 PortsOHA 200, Optical HUB, 10 PortsArcNet-PCMCIA adapter setPCI-PCMCIA Bridge for PCFiber optic cable, 10 mFiber optic cable, 20 mFiber optic cable, 50 mOrdering numberPT442510-TPT442520-TPT442530-TPT442540-TP51596152HP51596152KP51596152Q97AnalysisIonenanalyseof IonsAccessories4.2 PlasmamonitoringPPM 422 Plasma Process MonitorDetection of neutral particles and of positive and negative ions inplasma.Energy analysis of neutral particles and positive and negative ions.Measurement of radicals.Endpoint detection of plasma processes.Wide dynamic range.High measurement speed.Mass ranges 1–512 amu, 1–1024 amu and 1–2048 amu.Energy range –512 till +512 eV.PPM 422 (without cover at vacuum side)Principle construction of PPM 4221 Turbopump2 Secondary electron multiplier SEM3 Deflection unit4 Quadrupole mass filter5 Extraction diaphragm6 Flahover shield7 Input optics8 Ion source9 Adapter optics10 Energy analyzerThe PPM 422 is a differentially pumped massspectrometer unit with integrated energy analyzer for measuring of neutral particles, positive and negative ions and for energy analysisof ions and neutral particles at plasma processes.The diagram above shows the complete analyzer.
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