mass_spectrometer Pfeiffer обзор (1248468), страница 13
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150 °C200 ms–60 s/amu20 ms–60 s/amu10 ms–60 s/amu641200–19200 bits/s2 Relais, 24 VDC90 ... 260 VAC3 kgOrdering numberPrisma™ 80PTM04100Scope of deliveryTalkStar™ software with RS-232-C-cable, SP 200 mains unit with cable and installation materialStand-alone ComponentsPrisma™ 80Ordering numberAnalyzer, QMA 200 FElectronics, QME 80Cathode unit, 2 filaments, yttr. IridiumPTM25250PTM28515BN846138-TDimensions in mm58Residual gas analysisPrisma™ 80 – TalkStar™592.1 Residual Gas Analysis at HVPrisma™ QMS 200 Fwith Faraday detectorEconomical residual gas analysis and process-monitoring at highvacuum range.Easy system integration.Fast and error-free data transfer via fiber optics.Multiplex mode.High reliability of operation by two filaments.Mass ranges 1-100 amu, 1-200 amu, 1-300 amuSummary Prisma™ QMS 200 F with Faraday DetectorMass rangeRod system, diameter/lengthDetection limit, min.Sensitifity for ArOperating pressure, max. 1)Contribution to neighboring mass (40/41)Operating temperature/analyzerConnection flangeWeight1)amummmbarA/mbarmbarppm°CkgQMS 200 F11–1006/1001 · 10-121 · 10-31 · 10-4< 10150DN 40 CF-F3QMS 200 F21–2006/1002 · 10-126 · 10-41 · 10-4< 20150DN 40 CF-F3QMS 200 F31–3006/1004 · 10-123 · 10-41 · 10-4< 50150DN 40 CF-F3at reduced emission current of 0.2 mA: 1 · 10-3 mbarGeneral Technical DataResolution, at 10 % peak heightMeasurement speed, scan analogMeasurement speed, scan BargraphMeasurement speed, MIDMeasuring channelsPeak ratio reproducibility2)2)3)0.5–2.5 amu200 ms–60 s/amu20 ms–60 s/amu10 ms–60 s/amu64± 0.5 %Operating temperature/electronicsOperating temperature/analyzerTemperature, storageLAN interfaceRS-232-C interfaceVoltageat constant conditions while 8 hours, N2 and Ar from Air, 100 amudefined by ordering numberInformation to interfaces, inputs and outputs see page 64 und 65Dimensions in mmQMS 200 F60QMS 200 F 90° connection0–40 °C200 °C/300 °C 3)–25 – +70 °C2.5 Mbits/s, ArcNet300–19200 bits/s90 ...
260 VACPrisma™ QMS 200 F VersionsPrisma™ with 90° connection– When there is not enough space for fitting the standard version– Technical Data identical to standard versionAnalyzer for bakeout temperature up to 300 °C– Technical Data identical to standard versionPrisma™ QMS 200 F-Ordering numbersOpen ion source 1PT M03 011 000Connection1 0°2 90°Mass range1–100 amu 11–200 amu 21–300 amu 3Cathode1 Tungsten2 Iridium yttriatedScope of deliveryExample:PT M03 111 2111 – Mass range: 1–100 amu1 – Detector: Faraday1 – Ion source: open2 – Cathode: Iridium yttriated1 – Bakeout temperature: 200 °C1 – Connection: 0°Residual gas analysisDetector Faraday 1Bakeout temperature1 200 °C2 300 °CFor special applicationsPrisma™-Analyzer with Mo-wiring 3on requestQuadStar™ software with RS-232-C-cable and adapter, SP 200 mains unit with cable,"control" plug, installation materialInformation to the software see chapter 1.2.4Stand-alone componentsQMS 200 F with Faraday detectorOrdering numberAnalyzer, QMA 200 F with W-filamentAnalyzer, QMA 200 F with yttr.
Ir-filamentElectronics QME 200, 1–100 amuElectronics QME 200, 1–200 amuElectronics QME 200, 1–300 amuCathode unit, 2 filaments, Tungsten, for open ion sourceCathode unit, 2 filaments, yttr. Iridium, for open ion sourcePTM25251PTM25250PTM28504PTM28500PTM28502BN846139-TBN846138-TAccessoriesQMS 200 F with Faraday detectorOrdering numberOptical HUB, OHA 200, 5 PortsOptical HUB, OHA 200, 10 PortsArcNet-PCMCIA adapter setPCI-PCMCIA Bridge for PCFiber optic cable, 10 mFiber optic cable, 20 mFiber optic cable, 50 mTotal pressure gauge PKR 251, DN 40 CF, Viton sealed, 5 · 10-9 till 1000 mbarTotal pressure gauge PKR 261, DN 40 CF, metal sealed, 5 · 10-9 till 1000 mbarSensor cable, PKR-QMS 200, 3 mPT442510-TPT442520-TPT442530-TPT442540-TP51596152HP51596152KP51596152QPTR26002PTR26252PT448250-T612.2 Residual Gas Analysis at UHVPrisma™ QMS 200 M with C-SEMEconomical residual gas analysis and process-monitoring at HV andUHV range.Also usable for gas analysis application.Easy system integration.Fast and error-free data transfer via fiber optics.Multiplex mode.High reliability of operation by two filaments.Mass ranges 1–100 amu, 1–200 amu, 1–300 amuSummary Prisma™ QMS 200 Mwith continuous Secondary electron multiplierMass rangeamuRod system, diameter/lengthmmDetection limit, min.mbarFaradayC-SEMSensitifity for ArA/mbarFaradayC-SEMOperating pressure, max.mbarFaradayC-SEMContribution to neighboring mass (40/41) ppmOperating temperature/analyzer°CConnection flangeWeightkgQMS 200 M11–1006/1005 · 10-121 · 10-145 · 10-42001 · 10-41 · 10-5< 10120DN 40 CF-F4.4QMS 200 M21–2006/1001 · 10-11< 2 · 10-143 · 10-42001 · 10-41 · 10-5< 20120DN 40 CF-F4.4QMS 200 M31–3006/1002 · 10-11< 4 · 10-141.5 · 10-41001 · 10-41 · 10-5< 50120DN 40 CF-F4.4General Technical DataResolution, at 10% peak heightMeasurement speed, scan analogMeasurement speed, scan BargraphMeasurement speed, MIDMeasuring channelsPeak ratio reproducibility1)0.5–2.5 amu200 ms–60 s/amu20 ms–60 s/amu10 ms–60 s/amu64± 0.5 %Operating temperature/electronicsOperating temperature/analyzerTemperature, storageLAN interfaceRS-232-C interfaceVoltage0–40 °C200 °C/300 °C 2)– 25 – +70 °C2.5 Mbits/s, ArcNet300–19200 bits/s90 ...
260 VAC1)at constant conditions while 8 hours, N2 and Ar from Air, from air, Faraday,100 amu2) defined by ordering numberInformation to interfaces, inputs and outputs see page 64 and 65Dimensions in mm**QMS 200 Mopen ion source* gas tight ionsource 90.662QMS 200 MQMS 200 M 90° connectionCross-Beam ion sourceopen ion sourcePrisma™ QMS 200 M VersionsPrisma™ with 90° connection– When there is not enough space for fittingthe standard version– Technical Data identical to standard versionAnalyzer for bakeout temperature up to 300 °C– Technical Data identical to standard versionCross-Beam ion source– For qualitative and quantitative analysis– for corrosive gas applicationsGas tight ion source– Particularly suitable for analyzing gases orgas mixtures which are under higherpressure and are conveyed directly to theionization chamber of the ion source throughpressure reduction inlets– improved signal/background ratio– Low gas comsumption– Low vacuum time constant– Conductance 0.8 l/s for N2Prisma™ QMS 200 M-Ordering numberBakeout temperature1 200 °C2 300 °CPT M03 020 000Mass range1–100 amu 11–200 amu 21–300 amu 3C-SEM 2Connection1 0°2 90°Cathode1 Tungsten2 yttr.
IridiumExample:PT M03 121 2121 – Mass range: 1–100 amu2 – C-SEM1 – Source: open ion2 – Cathode: yttr. Iridium1 – Bakeout temperature: 200 °C2 – Connection: 90°Residual gas analysisIon sourceopen (standard) 1gas tight (only with W-cathode) 2Cross-Beam (only with W-cathode 3For special applicationsPrisma-Analyzer with Mo-wiringon requestScope of deliveryQuadStar™ software with RS-232-C-cable and adapter, SP 200 mains unit with cable, “control” plug, installation materialInformation to the software see chapter 1.2.4Stand-alone componentsQMS 200 M with C-SEMOrdering numberAnalyzer, QMA 200 M, open ion source with W-cathodeAnalyzer, QMA 200 M, open ion source with yttr. Ir-cathodeAnalyzer, QMA 200 M, open ion source with W-cathode, 300 °CElectronics QME 200 with C-SEM-supply, 1–100 amuElectronics QME 200 with C-SEM-supply, 1–200 amuElectronics QME 200 with C-SEM-supply, 1–300 amuCathode unit, 2 filaments, Tungsten, for open ion sourceCathode unit, 2 filaments, yttr.
Iridium, for open ion sourceCathode unit, 2 filaments, Tungsten, for gas tight ion sourceCathode unit, 2 filaments, Tungsten, for Cross-Beam ion sourcePTM25253PTM25252PTM25273PTM28505PTM28501PTM28503BN846139-TBN846138-TBN846281-TPT160000-TAccessoriesQMS 200 M with C-SEMOrdering numberOptical HUB, OHA 200, 5 PortsOptical HUB, OHA 200, 10 PortsArcNet-PCMCIA adapter setPCI-PCMCIA Bridge for PCFiber optic cable, 10 mFiber optic cable, 20 mFiber optic cable, 50 mVacuum chamber for differential pressure stageTotal pressure gauge PKR 251, DN 40 CF, Viton sealed, 5 · 10-9 till 1000 mbarTotal pressure gauge PKR 261, DN 40 CF, metal sealed, 5 · 10-9 till 1000 mbarSensor cable, PKR-QMS 200, 3 mPT442510-TPT442520-TPT442530-TPT442540-TP51596152HP51596152KP51596152QPT442830-TPTR26002PTR26252PT448250-T632.2 Residual Gas Analysis at UHVPrisma™ QMS 200 M ConnectivityTotal pressure measurementand system locking as optionVoltage 90–260 V ACFrequency 47–63 HzTPR Pirani CompactGauge24 V DC-4105·armbarmb0010Mains unit SP 200LxWxH180 x 95 x 60 mm-95·10armbCable lenght 3 marmb0010Weight 0.7 kgPKR FullRange™ CompactGaugeOther gauge types via analog inputor external lockingArcNet boardat PCContact5 V DCPCSpecificationExternal startAnalog outputsAnalog inputsDigital outputsContact5 V DC4 Channels– 5.12 – + 5.12 V16 bitMeasured values(i.
e. ion current)Ratios(concentration)Diagnosis by recorder,OscilloscopeProcess control2 Channels– 5.12 – + 5.12 V11 bitReading in of datae. g. pressure,temperature, gas flow2 RelaysN. O.24 V DCFree assignmentof switching functionsCorrelation of process dataand spectrometer dataForward breakoverpoint on/offValve open/closeAlarmCharacteristicsApplication examples64Starting ofmeasurementcycleComponents for multiplex mode and Software-UpdateOptical HUB OHA 200Fast and error-free data transfer via fiber-optics,even over long distances, up to 1000 m.Stand-alone ComponentsOptical HubOrdering numberOHA 200, 5 PortsOHA 200, 10 PortsPT442510-TPT442520-TAccessoriesOrdering numberArcNet-PCMCIA adapter setPCI-PCMCIA Bridge for PCFiber optic cable, 10 mFiber optic cable, 20 mFiber optic cable, 50 mPT442530-TPT442540-TP51596152HP51596152KP51596152QSoftware-UpdateOrdering numberUpdate for QuadStar™ and TalkStar™PT882093-TBOptical HubACABC= 157.5 mm= 62.2 mm= 199.0 mm65Residual gas analysisMultiplexing – simultaneous operation of several instrumentsvia the same optical interface.2.2 Residual Gas Analysis at UHVQMG 422 with QMA 125Residual gas analysis – even in the extreme UHV range.Modular, versatile, expandable.Ideal for residual gas analysis at accelerator.Mass ranges 1–100 amu, 1–200 amuAnalysis of fast processesScope of deliveryAnalyzerElectrometerpreamplifierQuadrupoleelectronicsController QMS 422QuadStar™ 422EP 422QME 125-1or 125-2QMA 125Ion sources:AxialCross-BeamGridDN 63 CFPCStandard 0.17 m,for high radiationexposure 6 mm(for 1–100 amu only)Detector: Faraday/90° off-axis SEMStandard 3 mOption 10/20 mBakeout temperature: 400 °CQuadStar™ softwarewith RS-232-C cableand adapterSummary QMG 422VersionMass rangeRod system, diameter/lengthQuadruopl-ElectronicsConnecting cable QMA/QMEDetection limit, min.amummSensitifity for ArA/mbarOperating pressure, max.mbarPartial pressure ratio with SEMOperating temperature/analyzerBakeout temperatureConnection flangeppm°C°CmmbarFaraday90°-SEMFaraday90°-SEMFaraday90°-SEMVersion withAxial ion source with Re filamentCross-Beam ion source with two W filamentsgas tight Cross-Beam ion source with two W filamentsGrid ion source with W filamentvacuum annealed QMA with grid ion source, W filamentOther combinations of devices on requestTechnical data of controller QMS 422 see page 746690°-SEM/Faraday1–1006/100QME 125-10.172 · 10-115 · 10-151.5 · 10-410001 · 10-41 · 10-5< 0.1150400DN 63 CF-F90°-SEM/Faraday1–1006/100QME 125-161 · 10-105 · 10-145 · 10-510001 · 10-41 · 10-5< 0.1150400DN 63 CF-F90°-SEM/Faraday1–2006/100QME 125-20.174 · 10-111 · 10-141 · 10-410001 · 10-41 · 10-5< 0.1150400DN 63 CF-FOrdering numberPTM27103PTM27104PTM27105PTM27106PTM27107PTM27154PTM27155PTM27110Stand-alone Components, QMG 422Ordering numberwith 90°-SEM, axial ion source, Re filamentwith 90°-SEM, Cross-Beam ion source, two W filamentswith 90°-SEM, gas tight Cross-Beam ion source, two W filamentswith 90°-SEM, grid ion source, W filamentvacuum annealed QMA with 90°-SEM, grid ion source, W filamentPTM10774PTM10775PTM10770PTM10776PTM10777Filaments to QMA 125Qty.RheniumTungstenyttr.
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