mass_spectrometer Pfeiffer обзор (1248468), страница 16
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IridiumValve interface HPI 010 (with orifice)electropneumatic, 24 VDC, without control unitmanualBN846138-TB8071104EHB8070201GGAccessoriesHPA 200Ordering numberHeater jacket for HPA chamberPKR 261, FullRange™ GaugeCable, PKR-QME 200; 0.6 mBG442668PTR26252PT448249-T813.2 Gas Analysis at Pressure Range up to 10 mbarExamples for Combination of Stand-alone ComponentsMass spectrometer arrangements for gas analysis at pressurerange 10-5 to 10 mbar.See also chapter 1.3.1 Mass spectrometer arrangements forpressure < 10 mbar.Differentially pumped mass spectrometer withopen ion source and pressure reduction by:a) 50 mbar > p > 1 · 10–4 mbarQuadStarTMUDV 040b) 10 mbar > p > 1 · 10–7 mbarp < 1 · 10–5 mbarRS-232-C orfiber-optic cableRS-232-C orLAN interfaceprocess chamberPrismaTMopen ion sourceC-SEM2 x relay output,2 x analog input,4 x analog output2 x relay inputSVV double gate valvewith 1 x apertureTMU 07124 VDC90–240 V, 50/60 Hzc) 10 mbar > p > 1 · 10–7 mbara) UHV gas dosing valve UDV 040 as anadjustable conductance.b) Double gate valve, one slide with orificefor pressure reduction, one closed slide.For residual gas analysis (both slides open)at pressure <10-5 mbar and gas analysis atpressure up to 10 mbar (only slide withorifice closed).c) Valve interface HPI 010 for residual gasanalysis at pressure <10-5 mbar and gasanalysis at two different pressures up tomax.
10 mbar (adjustable by two orifice)MVP 015–4HPI 010, manual,with 2 x aperturesStand-alone ComponentsQuadrupole Mass SpectrometerOrdering numberPrisma™ QMS 200 M with C-SEM, Technical Data see page 62 and 63QMS 200 M1, Mass range 1–100 amuQMS 200 M2, Mass range 1–200 amuQMS 200 M3, Mass range 1–300 amuChamber for QMS 200 M, dimensions see page 89Heater jacket for chamberPTM03121111PTM03221111PTM03321111PT442830-TBG442668QMG 422Quadrupole Mass Spectrometer QMG 422 with analyzer QMA 400/430, 90°-off-axis-SEM 217,axial-, Cross-Beam- or grid-ion source.Selection, ordering number and technical data see page 70/71Chamber for QMA 400/430, dimensions see page 89BG442540-XTurbomolecular pumping stationOrdering numberTSU 071, water cooled, connection flange DN 63 CF, consist of:Turbo-Drag-pump TMU 071 with heating, venting valve, air drier and diaphragm pump MVP 015-2,TSU 071, 190-260 V, 50/60 HzTSU 071, 90-125 V, 50/60 HzPMS0602212PMS0601212Other turbo pumping stations and combinations of stand-alone components on requestTotal pressure measurement outfitsOrdering number10-9Measurement range 1000 till 5 ·mbar, consist of:TPG 261 SingleGauge™, 90–260 VDCPKR 261, FullRange™ Gauge, DN 40 CFCabel, PKR-TPG 261, 3 m82PTG28280PTR26252PT448250-TGas Inlet ValveOrdering numberUHV gas dosing valveUDV 040, DN 40 CF, inlet VCR 1/4", manual operatedAll metal valve, valve seat – Cu-alloy, valve plate – Sapphire, housing – st.
SteelHeater jacket, 200 °C, for UDVQuartz capillary, inlet side, 2 mQuartz capillary, vacuum side, 1 mPFI52031PT420376-TPT420537-TPT418976-TOrdering numberOne slide with standard valve plate, one slide with tapped hole for taking up a orifice.Housing and valve plate - st. steel, valve seal - Viton, bakeout temperature max. 200 °C.Fastening screw and orifice must be ordered separately.Double gate valve, DN 40 CF, manualDouble gate valve, DN 40 CF, electropneumatic, 24 VDCFastening screw for orificeOrifice 0.01 mmOrifice 0.02 mmOrifice 0.03 mmOrifice 0.05 mmOrifice 0.1 mmPT160100-TPT160101-TBK356429BK212573BK212574BK212575BK212576BK212577Valve interface HPI 010Ordering numberValve combination with shutter and two by-pass lines with orifices 0.1/0.3 mm, see page 80HPI 010, DN 40 CF-F, manual, DN 40 CFHPI 010, DN 40 CF-F, electropneumatic, 24 VDCB8070201GGB8071104EHGas analysisDouble gate valveDimensions in mmUDV 040Double gate valve, manualDouble gate valve, electropneumatic833.3 Gas Analysis at Pressure Range up to 1 barOmniStar™ GSD 301 O, for generalgas analysis at atmosphere pressureQuantitative gas analysis – incl.
non-polar molecules, inert gases, etc.Low detection threshold (<1 ppm) even for condensable gases.Temperature-controlled gas line (st. steel capillary)Software controlled shutter valve.Certain identification of unknown gases.Control of up to 64 gas componentsAs good as no memory effectsShort response timeOnline process controlMass ranges 1–100 amu, 1–200 amu, 1–300 amuPrinciple construction of OmniStar with shutter valve atgas inlet1 Heating for conditioning of analysis chamber2 Heated gas inlet chamber3 Temperature-controlled gas line (capillary)4 Prisma™ quadrupole mass spectormeterQuadStar™ Analysis Software– Qualitative analysis of all gases– Definition of process windows and setting of alarms– Quantitative analysis with on-line calculationn of concentration– Convenient data evaluation supported by a spectrumlibrary, statistical and magnifying functions, and a cursor– Simultaneous process data acquisition via analog inputs(e.g.
temperature)– Data exchange with other programs, QuadStarTMsuppoorts DDE– Presentation of mass spectrometric data as a function ofprocess data– Application specific user interface can be easily createdExamples of applicationAir analysisAir cleaning analysisAnalog scan of air. Mass range 1–200 amu. Average of14 scans at 10s/amu each. N2 = 78.1%(28 amu). 136Xe = 7.8 ppb (136 amu).The OmniStar™ has a very wide dynamic range of morethan 8 orders of magnitude.Concentration of toluene (91 and 92 amu) as a function oftime.
Argon (36 amu) and krypton (84 amu) from the airserve as reference gases to verify the stability. Measurementat atmospheric pressure in Multiple Ion Detection (MID)mode with the OmniStar™.84Deliverable options of GSD 301 O for customized applicationsOmniStar™OmniStar™Pressure range of 1 to 1000 mbarPressure range of 5 · 10-3 to 1000 mbarThe pressure in the analysis chamber is automatically controlled.Connection: DN 16 ISO-KF.The pressure in the analysis chamber is automatically controlled.Connection: DN 16 ISO-KF.For corrosive and explosive gase.g.
CDD exhaust monitoringVersion with controlled purge gas system.Effective protection against corrosion andexplosive gas mixtures.Gas analysisOmniStar™Analysis of liquidsMembrane gas inlet for measuring e. g. gasesdissolved in water.Gas Stream Selector GSS 300Heated gas inlet system for up to 12 gas streams –sample gases and calibration or zero gasesQuadStarTM for arbitrary switching of gas streams.OmniStar™853.3 Gas Analysis at Pressure Range up to 1 barThermoStar™ GSD 301 T for couplingto thermobalanceReactive and condensable gases are detectable even in smallconcentrations.Minimal contact of medium with metal parts.Temperature-controlled gas line (quartz capillary)No chemical reaction.Certain identification of unknown gases.Mass ranges 1–100 amu, 1–200 amu, 1–300 amuPrinciple construction of ThermoStar™with open gas inlet1 Heating for conditioning of analysis2 Heated gas inlet chamber3 Temperature-controlled test gas line(capillary)4 Prisma™ quadrupole mass spectrometerQuadStar™ Analysis Software– Qualitative analysis of all gases evolvingduring thermal analysis.– Simultaneous data acquisition from a thermal analyzer via Analog Input Module (e.
g.temperature, sample weight, differentialweight loss).– Convenient data evaluation supported by aspectrum library, statistical and magnifyingfunctions and a cursor.– Data exchange with other programs viabinary code or ASCII files. QuadStar™ supports also DDE.– Presentation of mass spectrometric data as afunction of the thermobalance temperature.TA of calcium oxalate. The evolving gases watervapour (18), carbon monoxide (28), and carbondioxide (44) are shown together with the weightand temperature as a function of time.86Technical DataMass rangeGas connectionGas inletPressur reductionGas flow rateSample pressureOperating temperature capillaryAnalyzerRod system, material/diameter/lengthDetectorMass spectrometer electronicsSoftwareDimensions (L x W x H)Weightamusccmmbar°CmmmmkgOmniStar™ThermoStar™1–100/1–200/1–300st.
steel capillarysoftware controlled inlet valve2 stages, fractionation-free1–21000up to 200QMA 200 Mst. steel/6/100C-SEM/FaradayQME 200 MQuadStar™720 x 280 x 420451–100/1–200/1–300quartz capillarycontinuously open2 stages, fractionation-free1–21000up to 200QMA 200 Mst. steel/6/100C-SEM/FaradayQME 200 MQuadStar™720 x 280 x 42045Inputs and Outputs of GSD 301:2 outputs –5.12 bis +5.12 V, 16 bit.Output of measured data (e.g. ion current) or ratios (e.g.
concentrations).For process control and data output via oscilloscope or recorder.Analog input:2 inputs –5.12 bis +5.12 V, 11 bit.Reading of data e.g. pressure, gas flow, temperature, weight.For correlation of spectrometer data and process data.Digital output:1 relay, N.O., 24 VDC with free allocation of switching functions1 relay, forward brake-over for pump status. Switched at 90 % of the rated turbo speed.For monitoring the pumping station.Digital input:1 contact, 5 VDC; for starting the measurement cycle.GSD 301-Ordering numberCapillary1 Meter 12 Meter 2without 3Voltage230 V, 50 ... 60 Hz 6115 V, 50 ...
60 Hz 7123456Gas analysisAnalog output:Mass range1-100 amu1-200 amu1-300 amu1-100 amu, corrosive gas1)1-200 amu, corrosive gas1)1-300 amu, corrosive gas1)PT M00 000VersionThermoStar™, Standard 1ThermoStar™ with calibration device 2OmniStar™, Standard 3Filament1 Tungsten2 yttr. IridiumOther versions, e.g. for other inlet pressures, onrequest1) Corrosivegas version only with OmniStar™AccessoriesGSD 301Cathode unitTungstenyttr. IridiumConnection für 1/4" pipeGas Stream Selector GSS 300 (only for OmniStar™)for 6 gas inlets, 230 V, 50/60 Hzfor 6 gas inlets, 115 V, 50/60 Hzfor 12 gas inlets, 230 V, 50/60 Hzfor 12 gas inlets, 115 V, 50/60 HzAdapter for usual thermobalances (only for ThermoStar™)Ordering numberBN846281-TBN846395-TBG442778-TPT444750-TPT444751-TPT444760-TPT444761-Ton request873.3 Gas Analysis at Pressure Range up to 1 barExamples for Combination of Stand-alone ComponentsMass spectrometer configurations for gas analysis at pressure range up to 1 bar.Information to the respective components youcan find at the followed pages.By an optimize configuration of gas inletsystem, mass spectrometer and pumping unitsfor pressure stage and analyzer chamber it ispossible to meet a multitude of applications atpressure range up to 1000 mbar.See also chapter 1.3.2 Mass spectrometerarrangements for pressure > 10 mbar.Example with gas inlet system GES 010for general determination of gas concentrationin range of 100 % - 10 ppm.GES 010inlet pressure heated SS capillaryinlet pressure900–1200 mbarGEV 010 with aperture(open/close)Inlet pressure range 900 - 1200 mbar.PrismaTMopen ion sourceC-SEMthrottleWith valve GEV 010 the gas inlet could beclosed/opened.
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