mass_spectrometer Pfeiffer обзор (1248468), страница 19
Текст из файла (страница 19)
MassRelativesymbol number abundance [%]60Neodymium Nd61Promethium Pm62SamariumSm14214314414514614815027.1112.1723.858.3017.225.735.62––1441471481491501521543.0914.9711.2413.837.4426.7222.7163EuropiumEu15115347.8252.1864Gadolinium Gd1521541551561571581600.202.1514.7320.4715.6824.8721.9065TerbiumTb15966Dysprosium Dy1561581601611621631641000.050.092.2918.8825.5324.9728.1867HolmiumHo16510068ErbiumEr16216416616716817069ThuliumTm16970YtterbiumYb1681701711721731741760.143.0314.3121.8216.1331.8412.7371LuthetiumLu17517697.412.5972HafniumHf1741761771781791800.185.2018.5027.1413.7535.2473TantalumTa1801810.0199.9974TungstenW1801821831841860.1326.4114.4030.6428.4175RheniumRe18518737.0762.9376OsmiumOs1841861871881891901920.021.591.6413.316.126.441.00.141.5633.4122.9427.0714.88AtomicnumberElementChem.
MassRelativesymbol number abundance [%]77IridiumIr19119337.362.778PlatinumPt1901921941951961980.010.7832.933.825.37.2179GoldAu19780MercuryHg1961981992002012022040.1510.0216.8423.1313.2229.806.8581ThalliumTi20320529.5070.5082LeadPb2042062072081.4823.622.652.383BismuthBi20910084PoloniumPo85AstatineAt86RadonRn87FranciumFr88RadiumRa89ActiniumAc90ThoriumTh23210091Protactnium Pa92UraniumU2342352381000.00560.720599.2739100AppendixAtomicnumber1075 AppendixVapor pressure (mbar)Curves of vapor pressureVapor pressure (mbar)Temperature (°C)Temperature (°C)108Composition of atmospheric airThe relative humidity is usually listed separately for a given temperature.
For periodicchecking of the mass spectrometer it is convenient ot use air (main components). Todemonstrate the limit of detection and thedetectable partial pressures, the rare gases(He, Xe and Kr) are often used with entry ofair.Percent by weightPercent by volume (x 10 = pressure [mbar])N2O2ArCo276.523.01.290.0478.120.90.930.03MaincomponentsNeHeKrXe1.2 · 10–37 · 10–53 · 10–44 · 10–51.8 · 10–35.2 · 10–41.1 · 10–48.7 · 10–6Rare gasesCh4H2N2OTogether appr. 2 ppmfor mass spectrometry of minorsignificanceSensitivity for QMA 120GasMass numberof base peakTotal sensitivity forbase peakx 10–5 [A/mbar]Sum of fragment ionsx 10–5 [A/mbar]HeNeAr420406.46.424–7.234KrH2N2842286.8132017–23COO2CO2283244201413221619CH4C2H6C3H8162829283426546874C4H10 (n)C4H10 (iso)H2O434318222420746826Natural constantsVelocity of light in vacuumAcceleration due to gravity (standard value)Avogadro’s constantc = 2.997925 · 108 m · s–1g = 9.80665 m · s–2NA = 6.0221 · 1023 mol–1Electron chargeFaraday’s constantPlanck’s constante = 1.6022 · 10–19 CF = NAe = 96485 C · mol–1h = 6.6262 · 10–34 J · sBoltzmann’s constanteUniversal gas constanteAbsolute zerok = 1.3806 · 10–23 J · K–1R = kNA = 8.3143 J · K–1 mol–1T0 = O K or ϑ0 = –273.15 °CNormal molar volume of an ideal gas(0 °C and 1013 mbar)Atomic mass unitVmolar.0 = 0.022414 m3 · mol–11 u = 10–3 kg mol–1 · 1/NA = 1.66055 · 10–27 kgRest mass of ElectronProtonNeutronDeuteronAlpha particleHydrogen atomHelium atommempmnmdm␣mHmHeMass ratio proton/electronmp/me = 1836Specific charge of ElectronProtone/mee/mpRest energy of ElectronProtonme c2 = 0.5110 MeVmp c2 = 938.3 MeVCompton wavelength of electronλcAppendix= 9.1095 · 10–31 kg = 0.548580·10–3 u= 1.6726 · 10–27 kg = 1.007277 u= 1.6749 · 10–27 kg = 1.008665 u= 3.3436 · 10–27 kg = 2.013554 u= 6.6447 · 10–27 kg = 4.001506 u= 1.6735 · 10–27 kg = 1.007825 u= 6.6465 · 10–27 kg = 4.002603 u= 1.7588 · 1011 A · s · kg–1= 9.5788 · 107 A · s · kg–1= 2.4263 · 10–12 m1095 AppendixReferences[ 1 ] W.
Paul, H. Steinwedel, Z. Naturforschung 80 (1953) 448[ 2 ] W. Paul, H.P. Reinhard, U. v. Zahn, Z. Physik (1958) 143[ 3 ] P. Dawson, Quadrupole Mass Spectrometry, Elsevier, Amsterdam (1976)[ 4 ] H.S.W. Massey, E.H.S. Burhop: Electronic and Ionic Impact Phenomena Vol.1, UniversityPress Oxford (1969)[ 5 ] R.I. Reed: Ion Production by Electron Impact, Academic Press, London (1962)[ 6 ] P.A.
Redhead, J.P. Hobson and E.V. Kornelsen: The Physical Basis of Ultrahigh Vacuum,Chapman & Hall, London (1968)[ 7 ] P.A. Redhead: J. Vac. Sci. and Technol. 3 (1966) 173[ 8 ] W.M. Brubaker, 14th National Vacuum Symposium, p. 23, American Vacuum Society, 1967[ 9 ] Fachbericht Balzers BG 800 003 PD, „Das Funktionsprinzip des Quadrupol-Massenspektrometers“, 1990[10] Sar-El, Rev. Sc. Instr.
38–9, 1967[11] I.C. Abraham, J.R. Woodworth, M.E. Riley, P.A. Miller, Sandia National Laboratories“Ion Energy Distributions at the RF-Biased Electrode in an Inductively-Driven Discharge”Proceedings of the 47th International Symposium of the American Vacuum Society October2000[12] Ellmer, D. Lichtenberger, Surface and Coatings Technology, 74–75, 586 (1995)“Plasma diagnostics by energy resolved quadrupole mass spectrometry of a reactivemagnetron sputtering discharge from an Fe target in Ar-H2S atmospheres”[13] Feurprier, Ch.
Cardinaud, B. Grolleau, and G. Turban, Plasma Sources Sci. Technol. 6, 1(1997)“Etch product identification during CH4-H2 RIE of InP using mass spectrometry”[14] Ch. Hollenstein, A.A. Howling, C. Courteille, D. Magni, S.M. Scholz, G.M.W. Kroesen,N. Simons, W. deZeeuw, and W. Schwarzenbach, J. Phys D: Appl. Phys. 30, 1 (1997)“Silicon oxide particle formation in RF plasmas investigated by infrared absorption spectroscopy and mass spectroscopy”[15] T.H. Ahn, M. Itoh, K.
Nakamura and H. Sugai, Proc. 1996, Int. Conf. on Plasma Physics,Nagoya, 1996"Negative ions in a pulsed-power inductively-coupled chlorine plasma for etching"[16] M.G. Blain and R.L. Jarecki and R.J. Simson Sandia National Laboratories, Albuquerque,New MexicoJ. Vac. Sci. Technol A 16 (4), Jul/Aug 1998“Chemical downstream etching of tungsten”[17] M.G. Blain J.Vac.Sci.Technol. A 17 (2), 665–667, Mar/Apr 1999“Mechanism of nitrogen removal from silicon nitride by nitric oxide”Katsuyuki Okada, Shojiro Komatsu and Seiichrio Matsumoto“Ion Energy Distributions in a Low Pressure Inductively Coupled Plasma used for Nanocrystalline Diamond Deposition”Proceedings of ISPC-15 (Orleance, France, 2001)[18] M.
Fahland, C. Charton, V. Kirchhoff, U. Stöhr„Deposition of multilayer optical coatings onto plastic webs by pulse magnetron sputtering;challenges and opportunities“Proceedings 6th. International Symposium on Sputtering and Plasma Processes (ISSP),p. 189, Kanazawa, Japan 2001,Fachbericht Balzers, BG 800 041 AD, „Nachweis von Äthanol in Wasser“; 1994Trade namesOmniStar™*ThermoStar™*Prisma™*FullRange™*QualyTest™TurboCubeUniDry™DuoLine* Trade names Inficon110PacLinePackageLineDigiLineSplitFlow™ TurboMagneticTurboCompact TurboCorrosiveTurboOnToolDryPump™AppendixNotices111Notices112AppendixNotices113NoteInformation and advertising statements in this product catalog are,regardless of type, and in particular descriptions, figures, drawings,samples, information on quality, procurement, composition,performance, consumption and usability as well as measurementsand weights of the product lines, without engagement if not expresslybeing designated otherwise.
Such information does not provide anassurance or warranty commitment of any kind.Slight deviations from the product information are considered asaccepted, in-as-much as these are not unacceptable to the orderingparty.We expressly reserve the right of introducing changes in case oferror and for technical reasons.Pfeiffer Vacuum GmbH, January 2005TradenamesInficon:QuadStar™TalkStar™Prisma™OmniStar™ThermoStar™SingleGauge™FullRange™ImprintMass spectrometer catalogPfeiffer Vacuum GmbH, June 2005The right of technical alterations is reservedProtective charge Euro 15,–PK 0085 PEPfeiffer Vacuum GmbHHeadquarters/GermanyBerliner Straße 43D-35614 AsslarTel. +49-(0) 6441-802-0Fax +49-(0) 6441-802-202info@pfeiffer-vacuum.dewww.pfeiffer-vacuum.net114General Terms and Conditions of Sales and SupplyVacuum is nothing,but everything to usAnalytical instrumentsBiotechnologyResearch and DevelopmentGlass coatingSemiconductor industryMedicine and Life SciencePharmaceuticalsProcess technologyTool coatingAdditional markets such aspackaging and automotiveindustriesI.
TenderIn the absence of any separate contractual agreements, Pfeiffer Vacuum will, as supplier only effect deliveries andprovide services under the terms and conditions set forth hereunder. Any divergent purchasing conditions of the purchaser will under no circumstances, even if not expressly refuted – and neither by acceptance of an order –, becomepart of the contract.
These General Standard Terms and Conditions shall apply both to the present business as wellas to any future business.II. Tender and Conclusion of a ContractThe information contained in price lists, catalogues and advertising media referring to Pfeiffer Vacuum’s performancesdo not represent any tenders. Documents like figures, drawings, weight and measure information pertaining to a tenderare subject to change without notice and only approximately relevant, unless they have not explicitly been declaredas binding.
Any verbal advice, collateral agreements and promises of whatever nature shall be ineffective, unless theseare confirmed on Pfeiffer Vacuum’s part as agreed upon in writing. Minor deviations from product specifications shallbe accepted as approved of. In the absence of a special agreement, a contract will only be formed upon receipt ofPfeiffer Vacuum’s written order confirmation or upon the supply of the merchandise. With regard to Pfeiffer Vacuum’ssamples, cost estimates, plans, drawings and similar information, either of material or immaterial nature – also inelectronic form –, as well as all other documents Pfeiffer Vacuum will reserve all proprietary rights and copyrights;these may only be made accessible to third parties with Pfeiffer Vacuum’s prior written consent.III.
![](https://s.studizba.com/z.php?f=/templates/si/i/noavatar.png&w=100&h=100&t=1"){kind=avatar}
