Диссертация (1105074), страница 21
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— V.5. — P.474-491.44.Shamrai K.P., Virko V.F., Blom H.O. et.al. Discharge disruptions in ahelicon plasma source // Journal of Vacuum Science and Technology A.— 1997. — V.15. — P.2864.45.Александров А.Ф., Рухадзе А.А., Кралькина Е.А. и др. Теорияквазистатических плазменных источников // Журнал ТехническойФизики. — 1994. — Т.64. — С.53–58.46.Shamrai K.P., Taranov V.B. Resonance wave discharge and collisionalenergy absorption in helicon plasma source // Plasma Physics andControlled Fusion. — 1994.
— V.36. — P.1719―1735.15647.Chen F.F., Blackwell D.D. Upper Limit to Landau Damping in HeliconDischarges // Physical Review Letters. — 1999. — V.82. — P.2677.48.Boswell R.W. Modulated RF produced argon magneto-plasma // School ofPhysical Sciences, The Flinders University of South Australia, InternalReport. — 1968. — PR.68/8.49.Boswell R.W. Plasma production using a standing helicon wave // PhysicsLetters. — 1970.
— V.33A. — P.457―458.50.Boswell R.W. Very efficient plasma generation by whistler waves near thelower hybrid frequency // Plasma Physics and Controlled Fusion. — 1984.— V.26. — N.10. — P.1147―1162.51.Boswell R.W. Effect of boundary conditions on radial mode structure ofwhistlers // Plasma Physics. — 1984. — V.31. — P.197-208.52.Boswell R.W., Henry D. Pulsed high rate plasma etching with variableSi/SiO2 selectivity and variable Si etch profiles // Applied Physics Letters.— 1985.
— V.47. — P.1095.53.Boswell R.W., Porteus R.K. Etching in a pulsed plasma //Journal ofApplied Physics. — 1987. — V.62. — P.3123―3129.54.Boswell R.W., Porteus R.K. Large Volume High Density RF InductivelyCoupled Plasma // Applied Physics Letters. — 1987. — V.50. — P.11301132.55.Zhu P., Boswell R.W. Observation of nonthermal electron tails in an RFexcited argon magnetoplasma // Physics of Fluids B: Plasma Physics. —1991. — V.3. — P.869.56.Тараканов В.П. Теоретический и численный анализ нелинейныхзадач физики плазмы посредством кода КАРАТ: диссертация насоискание ученой степени доктора физ.-мат. наук: 01.04.08. — М.2011.
— 267 с.57.Hittorf W. Ueber die Electricitätsleitung der Gase // Annalen der Physik.— 1884. — V.257. — P.90-139.15758.Константинов О.В., Перель В.И. О возможности прохожденияэлектромагнитных волн через металл в сильном магнитном поле //ЖЭТФ. — 1960. — Т.38 — С.161.59.Bowers R., Legendy C., Rose F. E. Oscillatory galvanomagnetic effect inmetallic sodium // Physical Review Letters. — 1961.
— V.7. — P.339.60.Libchaber A., Veilex R. Wave Propagation in a Gyromagnetic SolidConductor: Helicon Waves // Physical Review. — 1962. — V.127. —P.774.61.Chambers R. G., Jones B. K. Measurement of the High-Field Hall Effectby an Inductive Method // Proceedigns of Royal Society London A.
—1962. — V.270. — P.417-434.62.Storey L. R. O. An Investigation of Whistling Atmospherics //Philosophical Transactions of the Royal Society London A. — 1953. —V.246. — N.908. — P.113-141.63.Helliwell R. A., Morgan M. G., Atmospheric whistlers // Proceedings ofthe Institute of Radio Engineers. — 1959. — V.47. — P.200-208.64.Storey L.R. An investigation of whistling atmospherics // PhilosophicalTransactions of the Royal Society A, Mathematical, Physical andEngineering Sciences. — 1953. — V.246. — P.113.65.Appleton E.V. Wireless studies of the ionosphere // Institute of ElectricalEngineers.
— 1932. — V.71. — P.642.66.Booker H.G. Propagation of wave-packets incident obliquely upon astratified doubly refracting ionosphere // Philosophical Transactions of theRoyal Society A, Mathematical, Physical and Engineering Sciences. —1938. — V.237A. — P.411.67.Gallet R. M., Richardson J.M., Wieder B. et al. Microwave whistler modepropagation in a dense laboratory plasma // Physical Review Letters. —1960.
— V.4. — P.347.68.Blevin H.A., Thonemann P.C. Plasma Confinement Using an AlternatingMagnetic Field // Nuclear Fusion Supplement. — 1962. — Part I. — P.55.15869.Blevin H.A., Christiansen P.J. Propagation of helicon waves in anonuniform plasma // Australian Journal of Physics. — 1966.
— V.19. —P.501.70.Blevin H.A., Christiansen P.J., Davies B. Effect of electron cyclotronresonance on helicon waves // Physical Letters A. — 1968 — V.28. —P.230.71.Davies B. Helicon wave propagation: Effect of electron inertia // PhysicalReview Letters. — 1969. — V.22. — P.1246.72.Jolly B., Martelli G., and Troughton J.F. Helicon wave propagation in alaboratory plasma // Plasma Physics. — 1969. — V.10.
— P.863.73.Lehane J.A., Thonemann P.C. An experimental study of helicon wavepropagation in a gaseous plasma // Proceedings Physical Society. — 1965.— V.85. — P.301.74.Чечкин В.В., Васильев М.П., Григорьева Л.И. и др. Резонансныйнагрев плазмы сильным высокочастотным полем // Письма в журналтеоретической и экспериментальной физики. — 1965. — Т.2. —P.418.75.Vasil'ev M.P., Grigor'eva L.I., Longinov A.V., et al. Plasma heating by afast magnetosonic wave of large amplitude // Journal of Experimental andTheoretical Physics. — 1968. — V.27. — P.882.76.Shafranov V.D.
Propagation of an Electromagnetic Field in a Medium withSpatial Dispersion // Journal of Experimental and Theoretical Physics. —1958. — V.34. — P.1019.77.Shoji T. // Institute of Plasma Physics Annual review. — 1986. — P.67.78.Shoji T. // Institute of Plasma Physics Annual review. — 1987. — P.63.79.Shoji T. // Institute of Plasma Physics Annual review. — 1988. — P.83.80.Chen F.F. RF production of high density plasmas for accelerators // LasersParticle Beams.
— 1989. — V.7. — P.551.15981.Perry A.J., Boswell R.W. Fast anisotropic etching of silicon in aninductively coupled plasma reactor // Applied Physics Letters. — 1989. —V.55. — P.148.82.Perry A.J., Vender D., Boswell R.W. Application of the helicon source toplasma processing // Journal of Vacuum Science and Technology B. —1991. — V.9.
— P.310.83.Chen F.F., Chevalier G. Experiments on helicon plasma sources // Journalof Vacuum Science and Technology A. —,1992. — V.10. — P.1389.84.Chen F.F. and Chevalier G. RF production of long, dense plasma columns// International Conference on Plasma Physics III. — 1992. — P.1701.85.Nakano T., Gottscho R.A., Sadeghi N.et al. Helicon wave excited plasma// Japan Society of Applied Physics.
— 1992. — V.61. — P.711.86.Lieberman M.A., Lichtenberg A.J. Principles of plasma discharges andmaterials processing // John Wiley & Sons. — 1994.87.Light M., Chen F.F. Helicon Wave Excitation with Helical Antennas //Physics of Plasmas. — 1995. — V.2. — P.1084.88.Ellingboe R., Boswell R.W., Booth J.P.et.al. Electron beam pulsesproduced by helicon-wave excitation // Physics of Plasmas.
— 1995. —V.2. — P.1807.89.Ellingboe A.R. and Boswell R.W. Capacitive, inductive and helicon‐wavemodes of operation of a helicon plasma source // Physics of Plasmas. —1996. — V.3. — P.2797-2804.90.Degeling, A.W., Jung C.O., Boswell R.W. et.al. Plasma production fromhelicon wave /// Physics of Plasmas. — 1996. — V.3.
— P.2788.91.Chen F.F. Physics of helicon discharges // Physics of Plasmas. — 1996. —V.3. — P.1783-1793.92.Chen F.F. DC probe detection of phased EEDF’s in RF discharges //Plasma Physics and Controlled Fusion. — 1997. — V.39. — P.1533.16093.Molvik W., Ellingboe A.R., and Rognlien T.D. Hot-electron productionand wave structure in a helicon plasma source // Physical Review Letters.— 1997.
— V.79. — P.233.94.Miljak D.G., Chen F.F. Helicon wave excitation with rotating antennafields // Plasma Sources Science and Technology. — 1998. — V.7. —P.61.95.Ferrari R.L., Klozenberg J.P. The dispersion and attenuation of heliconwaves in a cylindrical plasma-filled wave-guide // Journal of PlasmaPhysics. — 1968. — V.2. — P.283-289.96.Chen F.F. Landau damping of helicon waves // Australian NationalUniversity. — 1985. — Report ANU-PRL IR 85/12.97.Chen F.F. Plasma ionization by helicon waves // Plasma Physics andControlled Fusion. — 1991.
— V.33. — P.339―364.98.Ellingboe R., Boswell R. W., Booth J.P. et.al. Time and spatially resolvedoptical emission in a helicon reactor // Gaseous Electronics Conference. —1993. — Abstract CA-5.99.Chen F.F. and Decker C.D. Electron acceleration in helicon sources //Plasma Physics and Controlled Fusion. — 1992. — V.34. — P.635.100. Loewenhardt P.K., Blackwell B.D., Hamberger S.M.
Helicon wavepropagation in the SHEILA heliac // Plasma Physics and ControlledFusion. — 1995. — V.37. — P.229.101. Shoji T., Mieno T., Kadota K. Control of energy distribution of electronsand hydrocarbon film deposition by whistler wave discharge //Proceedings of International Seminar on Reactive Plasmas. — 1991. —P.377.102. Chen R.T.S., Breun R.A., Gross S. et.al.
Experimental studies ofmultimode helicon plasma waves // Plasma Sources Science andTechnology. — 1995. — V.4. — P.337.103. Blackwell D.D., Chen F.F. Probe detection of phased beams // Bulletin ofthe American Physical Society. — 1995. — V.40. — P.1771.161104.
Chen F.F. DC probe detection of phased EEDF’s in RF discharges PlasmaPhysics and Controlled Fusion. — 1997. — V.39. — P.1533.105. Sudit D., Chen F.F. A nonsingular helicon wave equation for a nonuniformplasma // Plasma Sources Science and Technology. — 1994. — V.3. —P.602.106.
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