Диссертация (Физические процессы в двухкамерном высокочастотном индуктивном источнике плазмы, помещенном во внешнее магнитное поле), страница 22

Ganguli A., Sahu B.B., Tarey R.D. Investigation of absorptionmechanisms in helicon discharges in conducting waveguides // PlasmaSources Science and Technology. — 2011. — V.20. — P.015021.107. Ganguli A., Sahu B.B., Tarey R.D. Warm electrons are responsible forhelicon plasma production// Plasma Sources Science and Technology. —2014.

— V.23. — P.065050.108. Sung Y.T. Li Y., Scharer J.E. Observation of warm, higher energyelectrons transiting a double layer in a helicon plasma // Physics ofPlasmas. — 2015. — V.22. — P.034503.109. Arnush D. Role of Trivelpiece-Gould Waves in Antenna Helicon WaveCoupling // Physics of Plasmas.

— 2000. — V.7. — P.3042.110. Blackwell D.D., Madziwa T.G., Arnush D. et.al. Evidence for TrivelpieceGould modes in a helicon discharge // Physical Review Letters. —2002.— V.88. — P.145002.111. Kline J.L., Scime E.E., Keiter P.A. et.al. Ion heating in the HELIX heliconplasma source // Physcs of Plasmas. — 1999. — V.6. — P.4767.112. Balkey M., Boivin R., Keiter P.A. et.al.

Ion heating and density productionin a helicon source near the lower hybrid frequency // Plasma SourcesScience and Technology. —.2001. — V.10. — P.284.113. Scime E., Boivin R., Balkey M.et.al. Microwave Interferometer forSteady-State Plasmas // Review of Scientific Instruments. — 2001. —V.72. — P.1672.114. Kline J.L., Scime E., Boivin R. Slow wave ion hearing in the HELIXhelicon source // Plasma Sources Science and Technology. — 2002. —V.11. — P.413.162115.

Sun X., Biloiu C., Scime E. Parallel velocity and temperature of argon ionsin an expanding, helicon source driven, plasma // Plasma Sources Scienceand Technology. — 2004. — V.13. — P.359.116. Hardin R., Sun X., Scime E. 3D laser induced fluorescence measurementsin a helicon plasma // Review of Scientific Instruments. — 2004.

— V.75.— P.4103.117. Gozadinos G., Turner M.M., Vender D. Collisionless Electron Heating byCapacitive RF Sheaths // Physical Review Letters. — 2001. — V.87. —P.135004.118. Kline J.L., Scime E.E., Boivin R.F. et.al. RF absorption and ion heating inhelicon sources // Physical Review Letters. — 2002. — V.88. — P.195002.119.

Sudit D., Chen F.F. Discharge equilibrium of a helicon plasma // PlasmaSources Science and Technology. — 1996. — V.4. — P.43.120. Kline J.L., Scime E.E. Parametric decay instabilities in the HELIX heliconplasma source // Physics of Plasmas. — 2003. — V.10. — P.135.121. Boswell R. W., Sutherland O., Charles C. et.al. Experimental evidence ofparametricdecayprocessesinthevariablespecificimpulsemagnetoplasma rocket (VASIMR) helicon plasma source // Physics ofPlasmas. —,2004. — V.11. — P.5125-5129.122.

Altukhov A.B., Gusakov E.Z., Irzak M.A. et.al. Investigations of shortscale fluctuations in a helicon plasma by cross-correlation enhancedscattering // Physics of Plasmas. — 2005. — V.12. — P.022310.123. Krämer M., Aliev Yu.M., Altukhov A.B. et.al. Anomalous helicon waveabsorption and parametric excitation of electrostatic fluctuations in ahelicon-produced plasma // Plasma Physics and Controlled Fusion.

—2007. — V.49. — A167–A175.124. Scime E.E., Carr J., Galante M. et.al. Ion heating and short wavelengthfluctuations in a helicon plasma source // Physics of Plasmas. — 2013. —V.20. — P.032103.163125. Keesee A.M., Scime E.E. Neutral density profiles in argon helicon plasmas// Plasma Sources Science and Technology. — 2007. — V.16. — P.742–749.126. Houshmandyar S., Scime E.E.

Enhanced neutral depletion in a statichelium helicon discharge // Plasma Sources Science and Technology. —2012. — V.21. — P.035008.127. Magee R.M., Galante M.E., Carr J. et.al. Neutral depletion and the helicondensity limit // Physics of Plasmas. — 2013. — V.20. — P.123511.128. Chen F.F., Evans J.D., Tynan G.R. Design and performance of distributedhelicon sources // Plasma Sources Science and Technology. — 2001.

—V.10. — P.236.129. Watari T., Hatori T., Kumazawa R. et.al. Radio-frequency plugging of ahigh density plasma // Physics of Fluids. — 1978. — V.21. — P.2076.130. Porte L., Yun S.M., Arnush D. et.al. Superiority of half-wavelengthhelicon antennas // Plasma Sources Science and Technology. — 2003. —V.12.

— P.287.131. Chen F.F. Antenna mechanisms and electrostatic fields in helicondischarges // University of California, Los Angeles, Low TemperaturePlasma Technology Laboratory. — 2012. — V.1212.132. Okamura S., Adati K., Aoki T. et.al. Plasma production with rotating ioncyclotron waves excited by Nagoya Type-III antennas in RFC-XX //Nuclear Fusion.

— 1986. — V.26. — P.1491.133. Charles C., Degeling A.W., Sheridan T. E. et.al. Absolute measurementsand modeling of radio frequency electric fields using a retarding fieldenergy analyzer // Physics of Plasmas. — 2000. — V.7. — P.5232-5241.134. Tysk S.M., Shane M., Denning C.M. et.al. Optical, wave measurements,and modeling of helicon plasmas for a wide range of magnetic fields //Physics of Plasmas. — 2004. — V.11.

— P.878-887.135. Chen F.F., Hsieh M.J., Light M. Helicon waves in a nonuniform plasma //Plasma Sources Science and Technology. — 1994. — V.3. — P.49.164136. Chevalier G., Chen F.F. Experimental modeling of inductive discharges //Journal of Vacuum Science and Technology A. — 1993. — V.11. —P.1165.137. Chen F.F., Chevalier G. Diagnostics of RF plasmas for semiconductoretching // California Microelectronics Innovation and Computer ResearchOpportunities Project Report.

— 1993. — V.1991/1992. — P.348.138. Curreli D., Chen F.F. Equilibrium theory of cylindrical discharges withspecial application to helicons // Physics of Plasmas. — 2011. — V.18. —P.113501.139. Chen F.F., Arnush D. Generalized theory of helicon waves I: Normalmodes // Physics of Plasmas. — 1997. — V.4. — P.3411.140. Chen F.F., Arnush D. Generalized theory of helicon waves II: Excitationand absorption // Physics of Plasmas. — 1998. — V.5. — P.1239 – 1254.141.

Light M., Sudit I.D., Chen F.F. et.al. Axial propagation of helicon waves// Physics of Plasmas. — 1995. — V.2. — P.4094.142. de Heer F.J., Jansen R.H., van der Kaay W. Total cross sections forelectron scattering by Ne, Ar, Kr and Xe // Journal of Physics B: Atomic,Molecular and Optical Physics. — 1979. — V.12. — N.6. —P.979―1002.143. de Heer F.

J., Jansen R. H. J. Total cross sections for electron scattering byHe // Journal of Physics B: Atomic, Molecular and Optical Physics. —1977. — V.10. — N.18. — P.3741-3758.144. Gianturco F. A., Rodriguez-Ruiz J.A. Elastic scattering of low andintermediate-energy electrons by Kr and Xe atoms // Zeitschrift für PhysikD Atoms, Molecules and Clusters. — 1994. — V.31. — P.149―159.145. Buckman S.J, Lohmann B. Low-energy total cross section measurementsfor electron scattering from helium and argon // Journal of Physics B:Atomic, Molecular and Optical Physics.

— 1986. — V.19. — P.2547―2564.165146. Gulley R.J., Alle D.T., Brennan M.J. et.al. Differential and total electronscattering from neon at low incident energies // Journal of Physics B:Atomic, Molecular and Optical Physics. — 1994. — V.27. — P.25932611.147. Franck C.M., Grulke O., Klinger T. Magnetic fluctuation probe design andcapacitive pickup rejection // Review of Scientific Instruments.

— 2002.— V.73. — P.3768.148. Kramer M., Clarenbach B., Lorenz B. et.al. Electron Heating and PlasmaProduction in Helicon Plasma // 31st European Physical SocietyConference on Plasma Physics. — 2004. — V.28G. — N.P-1.029.149. Tarakanov V.P. User’s Manual for Cоde «KARAT.BRA» // Springfield,VA: BRA. 1992. — 176p.166Список публикаций по теме диссертации1. E A Kralkina, A A Rukhadze, V B Pavlov, K V Vavilin, P A Nekliudova, AK Petrov and A F Alexandrov, “RF power absorption by plasma of a lowpressure inductive discharge” Plasma Sources Science and Technology, 25, p.015016, 2015.2.

K. Vavilin, E. Kralkina, P. Nekludova, A. Petrov, A. Nikonov, V. Pavlov,A. Airapetov, V. Odinokov, G. Pavlov, and V. Sologub, “Hybrid plasmasystem for magnetron deposition of coatings with ion assistance” Journal ofPhysics: Conference Series, 669, 20153. А. Александров, А. Петров, К. Вавилин, Е. Кралькина, П. Неклюдова,А. Никонов, В. Павлов, А. Айрапетов, В. Одиноков, В. Сологуб иГ. Павлов, “Исследование параметров плазмы геликонного разряда вмакете ВЧ гибридной плазменной системы” Прикладная физика, 3,с. 25–28, 20154.

А. Александров, К. Вавилин, Е. Кралькина, В. Павлов, А. Петров,В. Тараканов, “Математическое моделирование индуктивного ВЧразряда, помещенного во внешнее магнитное поле, посредствомпрограммы КАРАТ” Прикладная физика, 5, с. 44–47, 20155.

А. Александров, Е. Кралькина, П. Неклюдова, В. Павлов, А. Петров,A. Рухадзе,К. Вавилин,“ПоглощениеВЧмощностиплазмойиндуктивного разряда низкого давления” Инженерная физика, 11, 20156. А. Петров,К. Вавилин,Г. Козлов,Е. Кралькина,П. Неклюдова,А. Никонов, В. Павлов, “Параметры плазмы в ВЧ индуктивномдвухкамерном источнике малой мощности при наличии внешнегомагнитного поля” Вестник Московского университета.

Серия 3:Физика, астрономия, 6, 2015.7. Петров А.К. «Характеристики модели высокочастотного ионногодвигателя с ускорением ионов скачком потенциала двойного слоя»,Электронныйжурнал«ТрудыМАИ»,74,http://www.mai.ru/science/trudy/published.php?ID=49282, 2014.URL:.