QMG220 Pfeiffer масс-спектрометр (1248464), страница 4
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The flickering LED at the ethernet connector in the QME 220 (RJ45 connector) indicates data communication in progress.If this LED remains dark, a communication error betweenQMG 220 and the PC has to be suspected. In this case, checkthe cables and components along the communication path. Alsocheck the PC for correct configuration and installation (application software, firewall status etc.).Carry out the subsequent steps under QUADERA® (→[1]):System configuration:QUADERA\Online Help\Cross-References from Manuals\#001.Initial Start Up (Commissioning):QUADERA\Online Help\Cross-References from Manuals\#002.Operation (measuring mode):QUADERA\Online Help\Cross-References from Manuals\#003.36BG 5214 BE(2007-03)QMG220.oi5 Maintenance5.1 QMA 200(Filament Replacement)Skilled personnelFilaments are supplied as preassembled units.
They should only be changed byqualified personnel.Preparation(applies to all ion source types)Detach all electrical connections to the QME 220.Separate the QME 220 from the analyzer by performing the same stepsdescribed in chapter 3.2.4 but in reverse order.Detach the analyzer from the vacuum chamber.Place the analyzer into the supplied mounting tool.5.1.1 HS Ion SourceRequired toolsRequired material•Open-end wrench AF 10•flat-nosed pliers•Screwdriver size 0•Special socket wrench AF 3/3.2 (→Replacement filament assembly (→48)49).ProcedureMounting toolGrip the U-sections with flat-nose pliers and loosen the 3 screws so that theU-sections are just being kept in position by the screws.Take off the 3 nuts.Carefully pull the filament assembly upward.Dispose of the used filament assembly.BG 5214 BE(2007-03)QMG220.oi37Open the packing tube of the replacement filament assembly.
Carefully liftoff the support bracket while gripping the filament assembly at the base ofthe protective packing.Replacement cathodeassemblySupport bracketReplacementfilamentWARNINGDo not touch the filament, not even with gloved hands.Mount the replacement filament on the ion source. Slide the filament assembly toward the setscrews so that the plate of the filament assembly isparallel to the plate of the ion source.Do not twist the filament assembly, otherwise the ionizationchamber will be deformed.Mount the 3 nuts on the setscrews and tighten them with the special socketwrench.Grip the U-sections with flat-nose pliers, introduce the electrical connectionsof the filament laterally at the U-sections and tighten the screws.Re-assemble the product (→ steps38…,37, in reverse order).BG 5214 BE(2007-03)QMG220.oi5.1.2 Closed HS Ion SourceRequired toolsRequired material•Open-end wrench AF 10•flat-nosed pliers•Screwdriver size 0•Special socket wrench AF 3/3.2 (→Replacement filament assembly (→48)49).Proceduremounting toolRemove the ceramic tube (including the spring) from the ion source bytwisting it clockwise and pulling it off at the same time.Grip the U-sections with flat-nose pliers and loosen the 3 screws so that theU-sections are just being kept in position by the screws.Take off the 3 nuts.Carefully pull the filament assembly upward.Dispose of the used filament assembly.BG 5214 BE(2007-03)QMG220.oi39Open the packing tube of the replacement filament assembly.
Carefully liftoff the support bracket while gripping the filament assembly at the base ofthe protective packing.Replacement cathodeassemblySupport bracketReplacementfilamentWARNINGDo not touch the filament, not even with gloved hands.Mount the replacement filament on the ion source. Slide the filament assembly toward the setscrews so that the plate of the filament assembly isparallel to the plate of the ion source.Do not twist the filament assembly, otherwise the ionizationchamber will be deformed.Mount the 3 nuts on the setscrews and tighten them with the special socketwrench.Grip the U-sections with flat-nose pliers, introduce the electrical connectionsof the filament laterally at the U-sections and tighten the screws.Re-install the ceramic tube (including the spring) on the ion source by twisting it clockwise and pushing it down at the same time.Re-assemble the product (→ steps40…,37, in reverse order).BG 5214 BE(2007-03)QMG220.oi5.1.3 Cross-Beam Ion SourceRequired toolsRequired material•Open-end wrench AF 10•flat-nosed pliers•Screwdriver size 0•Special socket wrench AF 3/3.2 (→Replacement filament assembly (→48)49).ProcedureMounting toolLoosen the screws of the filament contacts and remove the U-sections.Grip the U-sections with flat-nose pliers while loosening thescrews in order to counteract the torque applied with the screwdriver.Loosen and remove the holder nut.Carefully remove the old filament assembly together with the ceramicsleeve insulation.Do not remove the rectangular washer.Dispose of the used filament assembly.BG 5214 BE(2007-03)QMG220.oi41Open the packing tube take out the replacement filament assembly afterremoving the retaining nut.2 ReplacementfilamentassembliesWARNINGDo not touch the filament, not even with gloved hands.Carefully place the new filament assembly on the ion source.Make sure the ceramic sleeve and the rectangular washer are seated correctly and fasten holder nut.The wehnelt and filament should now be parallel to the formationchamber and at the correct height.
If this is not the case, somepart is not properly seated or not correctly dimensioned.Place both U-sections with screws over the connector ends and the supplywires.Grip the U-sections with flat-nose pliers while fastening the screws.Transfer as little force as possible to the ends of the filamentconnector so that the ceramic parts are not damaged.Check whether the filament is parallel to the formation chamber.If necessary, align it.Re-assemble the product (→ steps42…,37, in reverse order).BG 5214 BE(2007-03)QMG220.oi5.1.4 Grid Ion SourceRequired toolsRequired material•Tweezers•Screwdriver size 0Replacement filament (→49).ProcedureMounting toolLoosen and remove the 3 screws holding the filament.Bend the supply wires away slightly.Remove and dispose of the used filament.Open the box of the replacement filament.
Carefully take out the new filament using the tweezers and holding it at its center connector tab.WARNINGDo not touch the filament, not even with gloved hands.BG 5214 BE(2007-03)QMG220.oi43Place the new filament on the filament holder.The holes in the connector tabs must be precisely aligned abovethe tapholes.Do not bend the filament.Push the supply wire loops over the tapholes, taking care not to shift theconnector tabs of the filament.Set the 3 screws in place and tighten carefully.Re-assemble the product (→ stepsShort circuits andground faults in the analyzer,37, in reverse order).Short circuits and ground faults inside the analyzer can be detected andrepaired using an ohmmeter or continuity checker.
The following illustration and table show the pin assignment of the QMA 200 connector:12111231310913 pin, male48765Pin No. Description123456744…ReserveExtrFocusHV –Filament 1Filament 2AnodePin No. Description8910111213RF –GNDGNDRF +Filament CommonEPBG 5214 BE(2007-03)QMG220.oi5.2 QME 2205.2.1 CleaningWARNINGDo not forget this cleaning, even if the unit is installed in such a way that the contamination cannot be easily seen.For cleaning the housing use only a piece of cloth lightly moistened with water, andpossibly some dishwashing detergent. Do not use any aggressive or scouringcleaning agents.No liquid must seep into the unit. Do not operate the unit until it is completely dry.DANGERDisconnect the 24 V power supply (SP 220) of the QME 220 from the AC powersource before any moist cleaning.Make sure the connectors do not get moist.5.2.2 Replacing the Filter MatThe filter mat at the air entrance has to be cleaned if a substantial layer of dust hasaccumulated.
Use a vacuum cleaner to clean the filter mat.In case of severe filter mat clogging it is recommended to replace it:Required tools•Required materialReplacement filter mat (→ProcedureScrewdriver Torx T1048).Detach power supplies SP 220 from mains. Detach all electrical connections to the QME 220.Separate the QME 220 from the analyzer by performing the same stepsdescribed in chapter 3.2.4 but in reverse order.Place the QME 220 on a stable base in order to be able to work on the frontpanel.If an IO 220 is installed, separate it from QME 220 as described onBG 5214 BE(2007-03)QMG220.oi20.45Loosen the screws 1 … 4 and remove the front panel.1423Replace the filter mat.Dispose of the old filter mat. If it is contaminated, adhere to theapplicable regulations (→ 51).Re-assemble the product (→ steps46…in reverse order).BG 5214 BE(2007-03)QMG220.oi5.2.3 Tuning theRF GeneratorRequired toolsProcedureThe RF circuit has to be tuned: when the unit is put into service for the first time,when the analyzer is changed (especially from Faraday to C-SEM), or when acorresponding error message is displayed on the screen.Correct tuning assures optimum measurement accuracy across the entire massrange.
An annual tuning check is, therefore, recommended.•Screwdriver size 1 … 2, preferably with an isolated tip.Remove the small cap at the side of the QME 220. This hole gives accessto the tuning screw.Select the appropriate function in QUADERA®:QUADERA\Online Help\Cross-References from Manuals\#007.Follow the software instructions.Turn the tuning screw 'TUNE-VOLTAGE' for voltage minimum.Turn carefully, no force is required. Do not fully tighten the tuningscrew and do not turn it out completely.5.2.4 Optimizing the IonSource SensitivityProcedureThe ion source sensitivity should be optimized when the unit is put into service forthe first time or after a filament change.Select the appropriate function in QUADERA®:QUADERA\Online Help\Cross-References from Manuals\#006.Follow the software instructions.Save settings and data.5.2.5 Replacing the QME 220ProcedureIf the QME 220 or the QMA 200 needs to be replaced, the procedure is the sameas for the initial installation.QME 220 installation→QME 220 connection →20.24.Tuning of the RF Generator →47.Optimizing the ion source sensitivity →BG 5214 BE(2007-03)QMG220.oi47476 AccessoriesOrdering numberD-Sub connector 15 pinSpecial socket wrench AF 3/3.2Screw kit (25 pieces)Cu seal, DN 40 CF (10 pieces)QMA 200 mounting toolBG 442 639 -TBK 370 096PF 505 001 -TPF 501 404 -TBG 444 4567 OptionsOrdering numberI/O module IO 220 complete48PT M28 699BG 5214 BE(2007-03)QMG220.oi8 Spare PartsWhen ordering spare parts, always indicate:•all information on the product nameplate•description and ordering number according to the spare parts listQMA 200Ordering no.ion sourceOrdering no.filamentMat.Detec.Additional technical dataPT M25 250BN 846 137 -TBN 846 138 -TIrFopen ISPT M25 251BN 846 279 -TBN 846 139 -TWFopen ISPT M25 252BN 846 137 -TBN 846 138 -TIrCopen ISPT M25 253BN 846 279 -TBN 846 139 -TWCopen ISPT M25 254BN 846 137 -TBN 846 138 -TIrCclosed, Mo-VPT M25 255BN 846 280 -TBN 846 281 -TWCclosedPT M25 256BN 846 450 -TBN 846 395 -TIrCclosedPT M25 257BN 846 280 -TBN 846 281 -TWFclosedPT M25 261BN 846 279 -TBN846139-TWCMo-VPT M25 270BN 846 137 -TBN 846 138 -TIrF300 °CPT M25 271BN 846 279 -TBN 846 139 -TWF300 °CPT M25 272BN 846 137 -TBN 846 138 -TIrC300 °CPT M25 273BN 846 279 -TBN 846 139 -TWC300 °CPT M25 274449-027BN 846 281 -TWCclosed, spec.PT M25 275BN 846 280 -TBN 846 281 -TWCclosed, 300 °CPT M25 276449-028BN 846 395 -TIrCclosed, spec.PT M25 277BN 846 280 -TBN 846 281 -TIrCclosed, spec., Mo-VPT M25 278BN 846 279 -TBN 846 139 -TWCclosed, spec., Mo-VPT M25 283BN 846 450 -TBN 846 395 -TIrCclosedPT M25 291BG 444 000 -TPT 160 000 -TWC[0.13] CB-IS (IS w/o filament)PT M25 292450-400BN 846 138 -TIrCadjustablePT M25 293BG 444 000 -TBN 846 282 -TIrC[0.15] CB-IS, 300 °C (IS w/o filment)PT M25 294BG 444 000 -TPT 160 000 -TWC[0.13] CB-IS, 300 °CPT M25 295450-400BN 846 138-TIrCadjustable, 300 °CPT M25 296BG 444 000-T499-036IrCCB-IS, 90° rotatedLegend:Detector:Filaments:F=FaradayC=C-SEMW=TungstenIr=Iridium, yttriated=Ion Source[…]Additional technical data:ISFilament diameter in mmMo-V=Molybdenum wiringspec.=Extraction orifice diameter 2 mmCB-IS=Cross Beam Ion SourceG-IS=Grid Ion SourceOrdering numberC-SEM24 VDC power supply, SP 220Filter mat (10 pieces)Misc.
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