QMG220 Pfeiffer масс-спектрометр (1248464)
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Operating Instructionsincl. Declaration of ConformityPrismaPlus™Compact Mass Spectrometer SystemQMG 220BG 5214 BE(2007-03)1Product IdentificationIn all communications with Pfeiffer Vacuum, please specify the information on theproduct nameplate.
For convenient reference copy all system information into thespaces provided (→ 8).Pfeiffer Vacuum, D-35614 AsslarModel:PN:SN:VARead through the operating instructions carefully before operating theQMG 220. Keep this document in the vicinity of the equipment, accessible by all users.The chapter 'Safety' (→ 6) contains important information concerningthe symbols used. It is essential to take note of this information in orderto operate the QMG 220 safely.2BG 5214 BE(2007-03)QMG220.oiValidityThis document applies to products with part numbers listedAnalyzers(All Analyzers type QMA 200)DetectorFilamentsAdditional technical dataRemarksPartnumberFaradayPT M25 250zPT M25 251zzzPT M25 254zPT M25 255zPT M25 256zzzPT M25 271zClosedMolybdenumwiringzz300 °CExtractionorifice∅2 mmzzzzzzzzPT M25 270Iridium,yttriatedzPT M25 253PT M25 261TungstenzPT M25 252PT M25 257BG 5214 BECSEMzzzzzzzzPT M25 272zPT M25 273zzPT M25 274zzzPT M25 275zzzPT M25 276zzzPT M25 277zzzzzPT M25 278zzzzzPT M25 282zzzzPT M25 283zPT M25 285zzPT M25 286zzPT M25 291zzPT M25 292zPT M25 293zPT M25 294zPT M25 295zzPT M25 296zz(2007-03)QMG220.oizzzzzzzzGrid ion sourcezGrid ion sourceCross-Beam ion sourcezzzadjustablezCross-Beam ion sourcezCross-Beam ion sourcezadjustableCross-Beam ionsource, rotated 90°3IO 220PT M28 699QME 220Part numberMass rangeAnalyzer connectionIO 220PT M28 6011 … 100straightwithoutPT M28 6021 … 200straightwithoutPT M28 6031 … 300straightwithoutPT M28 6111 … 100straightwithPT M28 6121 … 200straightwithPT M28 6131 … 300straightwithPT M28 6211 … 10090°withoutPT M28 6221 … 20090°withoutSP 220I/O module IO 220 complete.PT M28 6231 … 30090°withoutPT M28 6311 … 10090°withPT M28 6321 … 20090°withPT M28 6331 … 30090°with24 VDC power supply (type P66A-6PI)The part number can be taken from the product nameplates.Inteded UseThe PrismaPlus™ mass spectrometer is designed for partial pressure analysis at-4pressures <10 mbar.
Typical applications are measurement, monitoring andprocess control functions in vacuum systems.The QMG 220 is not intended to produce measurement results on which the safetyof persons or large assets depend. For such applications the safety must be ensured by additional measures.TrademarksPrismaPlus™®QUADERA4Pfeiffer Vacuum GmbHINFICON AGBG 5214 BE(2007-03)QMG220.oiContentProduct IdentificationValidityInteded UseTrademarks2344Content51 Safety1.1 Symbols Used1.2 Personnel Qualifications1.3 General Safety Instructions1.4 Liability and Warranty1.5 Training6667772 Technical Data2.1 System Overview2.2 System Data88103 Installation3.1 Unpacking3.2 Assembly3.2.1 Space Requirements3.2.2 Required Tools3.2.3 QMA 200 Installation3.2.4 QME 220 Installation3.2.5 Input/Output Module IO 220 Installation/Deinstallation3.3 Electrical Connections3.3.1 QME 220 Connection3.3.2 Power Supply SP 220 to QME 220 Connection3.3.3 PC Connection3.3.4 IO 220 Analog Input and Output Connections3.3.5 IO 220 Digital Input and Output Connections3.3.6 Vacuum Gauge Connection3.3.7 Connection of the Additional Power Supply3.3.8 Using the Analog and Digital Interfaces3.4 Software Installation1717171818192020242424252729313334344 Operation4.1 Initial Start Up35355 Maintenance5.1 QMA 200 (Filament Replacement)5.1.1 HS Ion Source5.1.2 Closed HS Ion Source5.1.3 Cross-Beam Ion Source5.1.4 Grid Ion Source5.2 QME 2205.2.1 Cleaning5.2.2 Replacing the Filter Mat5.2.3 Tuning the RF Generator5.2.4 Optimizing the Ion Source Sensitivity5.2.5 Replacing the QME 2203737373941434545454747476 Accessories487 Options488 Spare Parts499 Storage5010 Returning the Product5011 Disposal51AppendixLiterature and Software5252Declaration of Contamination53Declaration of Conformity54For cross-references within this document, the symbol (→documents, the symbol (→[Z]).BG 5214 BE(2007-03)QMG220.oiXY) is used, for cross-references to further51 Safety1.1 Symbols UsedDANGERInformation on preventing any kind of physical injury.WARNINGInformation on preventing extensive equipment and environmental damage.CautionInformation on correct handling or use.
Disregard can lead to malfunctions orminor equipment damage.Consultation of operating instructions required (symbol printed onequipment housing).NoticeOptical inspection<…>Labels on modules (front panel elements etc.)QUADERA\ …Cross-references to information and procedures described in the®QUADERA software.1.2 Personnel QualificationsSkilled personnelAll work described in this document may only be carried out by persons whohave suitable technical training and the necessary experience or who have beeninstructed by the end-user of the product.6BG 5214 BE(2007-03)QMG220.oi1.3 General SafetyInstructions•Adhere to the applicable regulations and take the necessary precautions for theprocess media used.•Adhere to the applicable regulations and take the necessary precautions for allwork you are going to do and consider the safety instructions in this document.•Before beginning to work, find out whether any vacuum components are contaminated.
Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.Communicate the safety instructions to all other users.1.4 Liability and WarrantyPfeiffer Vacuum assumes no liability and the warranty becomes null and void if theend-user or third parties•disregard the information in this document•use the product in a non-conforming manner•make any kind of interventions (modifications, alterations etc.) on the product•use the product with accessories and options not listed in the correspondingproduct documentation.The end-user assumes the responsibility in conjunction with the process mediaused.1.5 TrainingTrainingPfeiffer Vacuum offers application, operating and maintenance courses for thebest use of this product. Please contact your local Pfeiffer Vacuum representative.BG 5214 BE(2007-03)QMG220.oi72 Technical Data2.1 System OverviewThe mass spectrometer system comprises of the following components:PCQuadera softwareLink to PC(Ethernet)Faraday detectorIon sourceMass filterC-SEMElektronic unitInput/outputQME 220module IO 220Analyzer QMA 200Power supplySP 220DI AI DO AOVacuum gaugesMainsIn all communications with Pfeiffer Vacuum please specify the information given on the nameplate.
For convenient reference transfer this information of all assemblies into the nameplate replicas in this manual.Electronic unit QME 220orElectronic unit QME 220 with90° connection8BG 5214 BE(2007-03)QMG220.oiInput/output module IO 220(option)Analyzer QMA 200 F,Faraday detectorAnalyzer QMA 200 M,secondary electron multiplier(C-SEM)Power supply SP 220Mains cableBG 5214 BESoftware QUADERA®→Accessories→(2007-03)QMG220.oi[1].48.92.2 System DataQME 220 front panel elementsVACUUMVACUUMVACUUM/OANALOGLITAI/OGIDIRISE224V=EMISSRUN24V=24V=LANUSBI/O24V=Front panel QME 220 without IO 220LANUSBI/OFront panel QME 220 withIO 220 installedFront panel elementDescriptionConnectors < 24 V= >Connector for QME 220-powersupply SP 220 (1)9 = connector on the IO 220 foran additional power supplySP 220 (2) for vacuum gaugeswith a high power consumption→2433LED < 24 V= >Indicator: 24 V o.k.LED < RUN >Indicator: QME 220 firmwarerunning35LED < EMISS >Indicator: Emission on35Connector < LAN >Ethernet connection (PC)25Connector < USB >USB connection(only for service purposes)Connector < I/O >interconnection to IO 220EXT_PROT input26Connector < TP GAUGE >Vacuum gauge connector(analog)32Connector< ANALOG I/O >Analog inputs / outputs27Connector< DIGITAL I/O >Digital inputs / outputs29Vacuum gauge connector(digital)32Connector < SERIAL >10TPGAUGEEMISS1RUN63AL5435BG 5214 BE(2007-03)QMG220.oiQMG 220 F, Faraday detectorGeneral dataDetector typeFaradayUnit resolution (valley, entire massrange)at 10 % peak height adjustable to%u<100.5 … 2.5mbar1×10-4Reproducibility of the peak ratio (constant conditions during 8 h, N2 andAr from air)%±0.5QMA 200 operating temperature°C0 … +150Bakeout temperature(QME 220 removed)°Cmax.
+200Max. operating pressureMounting orientationany (→Weightkg2.4 (2.7 with 90° connection)Connection flangeHS ion source(High sensitivityion source)Design principle,field of applicationMass rangeDN 40 CFopen design, radial symmetrical, suitable for residual gas analysis, 2 filaments (yttriated iridium or tungsten), degassing byelectron bombardment (10 mA, 300 V)u1 … 1001 … 2001 … 300Minimum detectable partial pressureSensitivity for argonContribution to neighboring mass (40/41)Closed HS ion sourceDesign principle,field of applicationMass rangeMinimum detectable partial pressure1)Contribution to neighboring mass (40/41)Design principle,field of applicationMass rangeSensitivityContribution to neighboring mass (40/41)Design principle,field of applicationMass rangeSensitivityContribution to neighboring mass (40/41)BG 5214 BE(2007-03)QMG220.oi<2×10-12<4×10-12A/mbar>1×10-3>6×10-4>3×10-4ppm<10<20<50l/s111ppm102050ppm<10<20<50mbar3×10-116×10-111.2×10-10A/mbar4×10-52×10-51×10-5ppm<10<20<50open design, suitable for residual gas analysis in the UHVrange, 2 filaments (tungsten), degassing by electron bombardment (10 mA, 300 V)u1 … 1001 … 2001 … 300Minimum detectable partial pressure1)<1×10-12open design, suitable for molecular beam experiments,2 filaments (yttriated iridium or tungsten), degassing by electronbombardment (10 mA, 300 V)u1 … 1001 … 2001 … 300Minimum detectable partial pressureGrid ion sourcembarclosed design, suitable for quantitative gas analysis, effectivesuppression of residual gas components, 2 filaments (yttriatediridium or tungsten)u1 … 1001 … 2001 … 300ConductanceCross-Beamion source19)mbar5×10-122×10-121×10-12A/mbar2×10-41×10-45×10-5ppm<50<100<200For non overlapping components with mass >4 u.11QMG 220 M (C-SEM detector)General dataDetector typeC-SEM / FaradayUnit resolution (valley, entire massrange)at 10 % peak height adjustable to%u<100.5 … 2.5mbar1×10-4Reproducibility of the peak ratio (constant conditions during 8 h, N2 andAr from air)%±0.5QMA 200 operating temperature°C0 … +150Bakeout temperature(QME 220 removed)°Cmax.
+200Max. operating pressureMounting orientationany (→Weightkg3.8 (4.1 with 90° connection)Connection flangeHS ion source(High Sensitivityion source)Design principle,field of applicationMass rangeDN 40 CFopen design, radial symmetrical, suitable for residual gas analysis, 2 filaments (yttriated iridium or tungsten), degassing byelectron bombardment (10 mA, 300 V)u1 … 1001 … 2001 … 300Minimum detectable partial pressureSensitivity for argonContribution to neighboring mass (40/41)Closed HS ion sourceDesign principle,field of applicationMass rangeMinimum detectable partial pressure1)Contribution to neighboring mass (40/41)Design principle,field of applicationMass rangeSensitivityContribution to neighboring mass (40/41)Design principle,field of applicationMass rangeSensitivityContribution to neighboring mass (40/41)12<1×10 /1×10-11-14<2×10 /2×10-11-14A/mbar>200 /-4>5×10>200 />3×10-4>100 />1.5×10-4ppm<10<20<50l/s111ppm<1 / 20<1 / 40<1 / 100ppm<10<20<50mbar3×10-13 /5×10-116×10 /1×10-12-131.2×10 /2.5×10-12-12A/mbar100 /2×10-5100 /1×10-550 /7×10-6ppm<10<20<50open design, suitable for residual gas analysis in the UHVrange, 2 filaments (tungsten), degassing by electron bombardment (10 mA, 300 V)u1 … 1001 … 2001 … 300Minimum detectable partial pressure1)<1×10-14 /5×10-12open design, suitable for molecular beam experiments,2 filaments (yttriated iridium or tungsten), degassing by electronbombardment (10 mA, 300 V)u1 … 1001 … 2001 … 300Minimum detectable partial pressureGrid ion sourcembarclosed design, suitable for quantitative gas analysis, effectivesuppression of residual gas components 2 filaments (yttriatediridium or tungsten)u1 … 1001 … 2001 … 300ConductanceCross-Beamion source19)mbar1×10-13 /1×10-112×10 /2×10-11-134×10 /4×10-11-13A/mbar200 /1×10-4200 /5×10-5100 /3×10-5ppm<50<100<200For non overlapping components with mass >4 u.BG 5214 BE(2007-03)QMG220.oiQME 220Measuring systemMeasurement channelsMeasurement modesMeasurement cyclesMID-dwellMeasurement speedscan analog + bargraph peakscan bargraph stairElektrometer amplifierSignal filterPower supplyInterfacesOperation, control20 ms/u … 60 s/u2 ms/u … 60 s/u1×10-5 … 1×10-12 A (f.s.),fix and autorangeFIR filter24 VDC / 2.0 A, SP 220Ethernet (→ 25, 35)input/output module IO 220(→ 20, 24)ExtensionEXTERNAL_PROTECTIONfloating contact (→Inputs/outputsAnalog→ IO 220,Digital14, 26)27→ IO 220, 521.9 kg (2.2 kg with 90° connetion)WeightPower supply SP 220128Scan analog, Scan Bargraph, MIDmono- / multichannel 1 … 9999 cyclesor repeat2 ms … 60 sMains voltageMains frequencyMains current consumptionOutput voltageOutput currentIsolationSafety standardWeight90 … 264 VAC47 … 63 Hz1.5 A (100 VAC)24 VDC, stabilized≤2.75 ADC100 MOhm / 500 VDCEN 609500.6 kgInput/output module IO 220Analog inputs,analog outputsAnalog inputsConnector (<ANALOG I/O>)Number of channelsInput configurationInput voltage rangeInput resistanceResolutionAnalog outputsConnectorNumber of channelsOutput configurationOutput voltage rangeOutput currentOutput resistanceGND referenceResolution(Connection diagram →BG 5214 BE(2007-03)QMG220.oiX7, 15 pin D-Sub connector (female)5differentialnominal ±10 V, max.
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