QMG220 Pfeiffer масс-спектрометр (1248464), страница 3
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However, If theIO 220 is not installed, access to the control function EXTERNAL_PROTECTION(→ 14) is possible.VACUUM24V=RUNEMISSLANUSB5I/O9Connection diagram X3X3QME 2201EXT_PROT624V=X3EXTERNAL_PROTECTION4S1)135IO 220 bus67IO 220I/O module290V8ScreenChGND26BG 5214 BE(2007-03)QMG220.oiPin assignmentX3Pin No.123456789DescriptionIO 220 busIO 220 busIO 220 busEXTERNAL_PROTECTIONIO 220 busIO 220 busIO 220 bus0 V, GND referenceIO 220 bus2)2)2)2)2)2)2)1)The EXTERNAL_PROTECTION input (→between pin 4 and GND (pin 8).2)The pins marked 'IO 220 bus' are exclusively used for the data exchange between QME 220 and IO 220 and may not be used for anything else.14) requires a floating contact 'S'The analog and digital inputs and outputs described below are onlyavailable with the optional IO 220 installed.3.3.4 IO 220 Analog Input andOutput ConnectionsThe analog inputs and outputs are available on a 15 pin D-Sub connector(<ANALOG I/O>, X7).VACUUM1/OANALOGLITAI/O9VACUUMX7GIDI158RISE224V=TPGAUGE24V=EMiSS1RUN63AL54LANUSBI/OAn appropriate cable is made up as follows:Cable typeThe number of cores depends on the functions used.WARNINGFor reasons of electromagnetic compatibility (EMI) (external interference) ascreened cable has to be used.
The screen has to be connected to the connector case. The opposite end has to be left open or grounded in order to suppressground loop currents.It is strongly recommended to use twisted pairs for the (+) and (–) wiring of theanalog inputs.ProcedureOpen the D-Sub connector.Prepare the cable ends and solder/crimp the cable according to the diagrambelow.BG 5214 BE(2007-03)QMG220.oi27Connection diagram X7IO 220X7Channel 11 kΩ–11 kΩ+9–21 nF1 nFChannel 2Channel 3+10–3+11–Channel 4+–Channel 5+Analog inputs412513Channel 1100 Ω100 Ω610 nFChannel 27Channel 314Channel 415Analog outputs33 ΩAGND8ScreenChGNDPin assignment X7Pin No.123456789101112131415Descriptionanalog input, channel 1 (–)analog input, channel 2 (–)analog input, channel 3 (–)analog input, channel 4 (–)analog input, channel 5 (–)analog output, channel 1analog output, channel 2GND reference of analog outputsanalog input, channel 1 (+)analog input, channel 2 (+)analog input, channel 3 (+)analog input, channel 4 (+)analog input, channel 5 (+)analog output, channel 3analog output, channel 4Assemble connector.Prepare and connect the opposite end of the cable.Connect the cable to the IO 220 and fasten the connectors locking screws.28BG 5214 BE(2007-03)QMG220.oi3.3.5 IO 220 Digital Input andOutput ConnectionsThe digital inputs and outputs are available on a 25 pin D-Sub connector(<DIGITAL I/O>, X2).1325114VACUUMVACUUMX2/OANALOGLITAI/OGIDIRISE224V=TPGAUGEEMISS1RUN63AL5424V=LANUSBI/OAn appropriate cable is made up as follows:Cable typeThe number of cores depends on the functions used.WARNINGFor reasons of electromagnetic compatibility (EMI) (external interference) ascreened cable has to be used.
The screen has to be connected to the connector case. The opposite end has to be left open or grounded in order to suppressground loop currents.ProcedureOpen the D-Sub connector.Prepare the cable ends and solder/crimp the cable according to the diagrambelow.Connection diagramdigital inputs (X2)IO 220+24 VX21K222Channel 11)11Channel 212Channel 313Channel 424Ext_Protection252)+100 Ω–23ScreenChGNDBG 5214 BE(2007-03)QMG220.oiChGND29Connection diagramdigital outputs (X2)IO 220Channel 1DO_V+3)X21ILRLDO_0VChannel 22Channel 33Channel 44Channel 55Channel 66Channel 77Channel 88Channel 914Channel 1015Channel 1116Channel 1217Channel 1318Channel 1419Channel 1520Channel 162110DO_V+DO_0V30 V+DO_V9–ScreenChGND30BG 5214 BE(2007-03)QMG220.oiPin assignment X2Pin No.12345678910111213141516171819202122232425Descriptiondigital output, channel 1digital output, channel 2digital output, channel 3digital output, channel 4digital output, channel 5digital output, channel 6digital output, channel 7digital output, channel 8GND reference for digital outputs (DO_0V)supply voltage for digital outputs (DO_V+, external)digital input, channel 1digital input, channel 2digital input, channel 3digital output, channel 9digital output, channel 10digital output, channel 11digital output, channel 12digital output, channel 13digital output, channel 14digital output, channel 15digital output, channel 16+24 V for digital inputsGND reference (0 V) for digital inputsdigital input, channel 4digital input, EXTERNAL_PROTECTION1)Input requires floating contact.2)Input control requires an external voltage (e.g.
PLC output).3)The load RL can either be a relay, a solenoid valve or an indicator lamp.The max. value of the current IL depends on a number of factors and isdescribed in the chapter 'Technical Data' (→ 14).Assemble connector.Prepare and connect the opposite end of the cable.Connect the cable to the IO 220 and fasten the connectors locking screws.3.3.6 VacuumGauge ConnectionThe following vacuum gauges can be connected to the system provided that theIO 220 is installed:Gauge typeInterfaceConnectorPKR251/261analogPBR260analog(2007-03)QMG220.oiPowersupplyX5, <TP GAUGE>, 6 pinnointernalX5, <TP GAUGE>, 6 pinyesSP 220 1)TPR280/281analogX5, <TP GAUGE>, 6 pinnointernalHPT100RS485X1, <SERIAL>, 9 pinyesSP 220 1)PPT100RS485X1, <SERIAL>, 9 pinnointernalRPT100RS485X1, <SERIAL>, 9 pinnointernal1)BG 5214 BEDegasOperation of these gauges requires an additional type SP 220 power supply(→ 33).31The type of gauge connected to the QME 220 is automatically identifiedby the QME 220 after the power on sequence.
After a change of gaugesthe 24 VDC power supply of the QME 220 has to be disconnected fromthe mains. After 10 seconds it can be reconnected. This procedureforces the QME 220 (SP 220 (1)) to re-identify the actual gauge typeconnected (→ chapter 'Operation', 35).Connection of analog gaugesTPR and PKR compact gauges can be connected to X5, <TP GAUGE>.VACUUMVACUUM1X5Cable typeConnecting digital gauges123TPGAUGE2324V=464324V=EMiSS52RUN64AL1RISE5/OANALOGLITAI/OGIDI65LANUSBI/OUse cables and connectors listed in the gauges manual exclusively.HPT-, PPT- and RPT gauges can be connected to X1, <SERIAL>.VACUUMVACUUM/OANALOGLITAI/OGIDIX1RISE224V=3TPGAUGE24V=Cable type32659EMISS1RUN6AL541LANUSBI/OUse cables and connectors listed in the gauges manual exclusively.BG 5214 BE(2007-03)QMG220.oi3.3.7 Connection of the Additional Power SupplySome of gauges have higher supply power requirements (→ 31) which can notbe satisfied by the primary QME 220 power supply (SP 220 (1)).
In these cases asecond SP 220 (SP 220 (2)) is required.WARNINGDo not connect the mains cables of both SP 220 supplies to the mains socketyet.VAC UUMVACUUMANI/OALOGLITAI/ODIG224V=TPGAUGE24V=EMISS1RUN63LRIASE54LANUSBI/OSP 220 (2)SP 220 (1)BG 5214 BE(2007-03)QMG220.oi333.3.8 Using the Analog andDigital InterfacesVACUUMVACUUMAnalog I/O (X7)Digital I/O (X2)/OANALOGLITAI/OGIDIRISE224V=TPGAUGEEMISS1RUN63AL5424V=Analoginputs•(→3.4 Software Installation34Reading of•measurementvaluese.g.pressure,temperature, •gas flow etc.LANUSBI/OAnalogoutputsMeasurementvaluese.g.ion currentsetc.Calculatedvaluese.g.
concentrations etc.Digital inputs•Softwarecontrole.g.measuringsequencesetc.Digital outputs•Switchingpoints•valve control(open/close)[1], QUADERA\Online Help\Cross-References from Manuals\#005)Description and installation of the QUADERA® software package →BG 5214 BE[1].(2007-03)QMG220.oi4 Operation4.1 Initial Start UpDANGERDANGER: cleaning agentsCleaning agents can be detrimental to health and environment.Adhere to the relevant regulations and take the necessary precautionswhen handling cleaning agents and disposing of them.
Consider possible reactions with the product materials (→ 51).DANGERVerify the correct installation of all system components and compliance withtechnical data (→ 10) before equipment is switched on.Note before start upBefore the system is started up, check the following:•Mains cable of SP 220 not connected to the mains•Correct installation of all system components and modules•Correct condition of vacuum/process chamber•Correct wiring of system components•LAN link to PC (directly or via network) installed (→•PC ready for operation according to software instructions (→25)[1]).Consult operating instructions of all system components involved beforeyou start up the system.In complete (factory configured) systems, settings and parameters havebeen optimally aligned. Do not change them unfounded.DANGERDANGER: line voltageIncorrectly grounded products can be extremely hazardous in theevent of a fault.The power connector may only be plugged into a socket with a protective ground.
The protection must not be nullified by an extension cablewithout protective ground.WARNINGCheck the vacuum in the QMA 200 before you insert the power plug of theSP 200. Required vacuum conditions:<10-4 mbar with Faraday type<10-5 mbar with C-SEM typeIf you use the compact gauge head connected to the QME 220 (IO 220), thepower plug may be inserted without checking the vacuum conditions. But do notturn on the Emission and C-SEM voltage until the above limits have been attained. Activate EXT_PROT (→ 14) monitoring.BG 5214 BE(2007-03)QMG220.oi35Switching onAfter the conclusion of the checks listed above, the system can be switched on.WARNINGThe QME 220 may only be turned on and off by inserting or detaching the powerplug of the SP 220.
The 24 VDC connector of the SP 220 must always remainconnected to the QME 220.If two SP 220 power supplies are used, a mains distributor is recommended.ProcedureInsert the SP 220 power plugs.SP 220 (2) has to be switched on first (in case there is an IO 220installed and gauges used that require the second SP 220).The <24 V=> lamp at the QME 220 turns on. The QMG 220 is ready for operation.After approx. 10 seconds the <RUN> lamp begins to flash at arate of 2 Hz, indicating that the QME 220s internal firmware isrunning.Switch on the PC and start the operation software QUADERA®.
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