QMG220 Pfeiffer масс-спектрометр (1248464), страница 2
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±14 V ref. to GND50 kOhm14 bitX7, 15 pin D-Sub connector (female)4single ended0 … +10 V≤100 µA200 Ohmvia 33 Ohm to GND (Imax. 50 mA)12 bit28)13Digital inputs,digital outputs,EXTERNAL_PROTECTIONDigital inputsConnector (<DIGITAL I/O>)Number of channelsInput voltageInput currentSupply voltage for floating contactGND reference for external supplyEXTERNAL_PROTECTION(EXT_PROT)Electrical dataFunction1)X2, 25 pin D-Sub connector (male)4 (+ EXT_PROT 1))<+5 V (low)nominal +24 V (high), max. +28 V1.9 mA+24V via 1.2 kOhm (Imax. 10 mA)via 100 Ohm to GND (Imax. 50 mA)same as digital inputscontrol function, depending on1)EXT_PROT mode selectedFunction table EXT_PROT input (detailed information →[1]:QUADERA\Online Help\Cross-References from Manuals\#004).EXT_PROT-ModeInputEXT_PROTFunctionINTERN-OFFnot relevantFIL and SEM can be switched on andoff (manually, no external protection).EXTERN-ON-OFF+24 V0 V (open)EXTERN-OFFFIL and SEM can be switched on andoff (manually).0 V (open)FIL and C-SEM off.
To switch onagain, the input EXT_PROT has to beconnected to +24 V, after that FIL andC-SEM can be operated manuallyagain.Output current (sink)X2, 25 pin D-Sub connector (male)16open collector (sink), optically isolatednominal +24 V, max. +28 V≤+0.9 VAll 16 channels used: ≤60 mA/channel4 channels used:≤250 mA/channel 2)Internally, the 16 channels are split in two groups:Group A: odd channel numbers 1 … 15Group B: even channel numbers 2 … 16For thermal reasons, the channels used have to be assigned equally to bothgroups (example: 2 channels to group A and 2 channels to group B).(Connection diagram →14FIL and C-SEM off+24 VDigital outputsConnector (<DIGITAL I/O>)Number of channelsOutput configurationOutput voltageSaturation voltage (low)2)FIL and C-SEM on29)BG 5214 BE(2007-03)QMG220.oiDigital interfaceVacuum gauge interface(analog)Ambient conditionsDigital interface for vacuum gaugesConnector (<SERIAL>)Interface typeUseAnalog vacuum gauge interfaceConnector (<TP GAUGE>)Interface typeUseX1, 9 pin D-Sub connector (female)RS485utilization of vacuum gauges with digitalinterfaces (suitable gauges → 31).X5, 6 pin Amphenol C91 socketanalogutilization of vacuum gauges with analoginterfaces (suitable gauges → 31).OperationAltitudeProtection categoryPollution degreeonly inside roomsmax.
2000 m NNIP 302TemperaturesStorage/transportOperation–25 … +70 °C0 … +40 °CRelative humiditymax. 80% up to 31 °C,linearly decreasing to 50% at 40 °CDimensions [mm]Electronic unit QME 220 +QMA 200 F analyzer withFaraday detector16854118127.5ø37(60)DN 40 CF-F141Electronic unit QME 220 +analyzer QMA 200 M withC-SEM + Faraday detector(60)16818483127.5ø37130DN 40 CF-F141BG 5214 BE(2007-03)QMG220.oi15Electronic unit QME 220 90°+analyzer QMA 200 A withFaraday detector25316827127.5127.4(60)118141DN 40 CF-Fø37Electronic unit QME 220 90°+analyzer QMA 200 M withC-SEM detector25316827127.5127.4(60)83130141DN 40 CF-F127.5Electronic unit QME 220+ input/output module IO 220(55)31168(X2)IO 220ø37QME14143.5Power supply SP 22016BG 5214 BE(2007-03)QMG220.oi3 Installation3.1 UnpackingStore the transport fastening devices and re-install them before transporting the product again.DANGERPutting a product which presents a visible damage into operation canbe extremely hazardous.
If the product presents a visible damage donot put it into operation and make sure it is not inadvertently put intooperation.3.2 AssemblyDANGERVoltages up to 330 VDC appear on the QMA 200 during operation.Other parts in the vacuum chamber (e.g. gauges) may possibly be exposed tothis voltage under unfavorable conditions. If as a result such parts (including thelines and connected equipment!) become hazardous, they must be arranged orprotected in such a way that no arcing and charge transfer can occur.If the QMA 200 can be touched while the vacuum system is open, additional protection is needed, e.g.:•mechanical protection against touching•forced disconnection of the SP 220 power supply when the system is opened.DANGERNo external hazardous voltages are allowed to be transferred to the electrodes ofthe QMA 200 (galvanical contact, arcing, ion or electron beams etc.). If such danger sources exist in the vacuum chamber, additional safety measures (e.g.
betterplacement, shielding, grounding, etc.) must be taken that reliable preclude suchinfluences. Also lower external voltages acting on the QMA 200 may damage theelectronics and lead to unreliable measurement results. Suitable precautions areto be taken as mentioned aboveWARNINGThe QMA 200 must be correctly installed from a vacuum engineering point ofview, i.e. the gases to be detected must have unhindered access to the analyzer.Vacuum coating of the analyzer must be prevented.Make sure you adhere to the special requirements concerning cleanliness and damage prevention when working with vacuum components.BG 5214 BE(2007-03)QMG220.oi173.2.1 Space RequirementsWARNINGThe QMA 200 F may only be installed in flanges or tubes with an internal diameter ≥37 mm, otherwise short circuits to the wall can occur.The diameter of the extension tube for the QMA 200 M must be at least40.5 mm.Note the required installation depth.
Do not kink the cablesDimensions of system components → 15).3.2.2 Required ToolsHexagon socket screw key, AF 4Torx screw driver T10Open-end wrench (2 pieces), AF 1018BG 5214 BE(2007-03)QMG220.oi3.2.3 QMA 200 InstallationDANGERThe analyzer flange must be properly grounded.•By connecting with all 6 screws to the properly grounded vacuum system.•If the mounting flange is not grounded, the QMA 200 flange (grounding screwM4) must be connected to the protective ground by means of a separateground conductor. Establish this connection with yellow/green insulated orbare stranded copper wire.• 2.5 mm² if mechanically protected• 4.0 mm² if unprotectedThe QMA 200 should preferably be mounted horizontally (with the guiding groove downward). This results in optimum protection of theQME 220 against falling objects and affords easy installation and excellent access to the front panel.On the QMG 220 with 90° connection this results in a vertically suspended arrangement of the QME 220.Removing the transport braceand flanging the analyzer tothe vacuum chamberQMA 200 FQMA 200 MTransport braceGuide grooveMounting toolSet the QMA 200 into the supplied mounting tool.Carefully remove the transport cover on the QMA 200 and save it for possible future use.Carefully pull off the transport brace and save it for possible future use.Flange the analyzer to the vacuum chamber.BG 5214 BE(2007-03)QMG220.oi193.2.4 QME 220 InstallationDANGERThe QME 220 may be mounted only to a correctly installed QMA 200 as the onlyground connection is via the QMA 200 flange.The 24 V supply line from the SP 220 must never be connected if QMA 200 isnot screw fastened to the QME 220.Guide grooveGrounding tabWith a hexagon-socket-screw (AF 4) key loosen the two screws on theblack plastic connection piece of the QME 220 so that the moving part has aplay of 2 … 3 mm.Carefully slide the QME 220 onto the mounted QMA 200 up to the notchmark.
Make sure the positioning on the QME 220 through the grounding taband the guide groove in the QMA 200 is correct.Do not apply excessive force.Firmly tighten the two hexagon-socket-head screws. These screws securethe QME 220 mechanically and ensure electrical safety by providing groundcontact.3.2.5 Input/Output ModuleIO 220Installation/DeinstallationThe optional I/O module IO 220 make the utilization of additional interfaces possible (→ chapter 'Technical Data').The QME 220 can be ordered with the IO 220 already installed or it can be upgraded at a later time.Required tools•Required MaterialI/O module IO 220 (→Procedure, installationScrewdriver Torx T1048)Disconnect the power supply from the mains and remove all electrical connections to the QME 220.Remove the QME 220 from the analyzer by following the procedure described in chapter 3.2.4 in reverse order.Place the QME 220 on a stable base in order to be able to work on the frontpanel.20BG 5214 BE(2007-03)QMG220.oiLoosen and remove the screws marked 1 … 3.123Remove the three transport nuts at the back of the IO 220.Carefully place the IO 220 module onto the front panel of the QME 220.
Useboth hands and make sure the D-Sub connection between IO 220 andQME 220 is engaged correctly.Fasten the three M3×40 mm torx screws delivered with the IO 220.BG 5214 BE(2007-03)QMG220.oi21Re-install the extended QME 220 following the procedure described above(→ 20) and continue with chapter 'Electrical Connections' (→ 24).Procedure, deinstallationSteps…are the same as in section 'Procedure, installation'.Loosen and remove screws 1 … 3 as shown.123Carefully pull off the IO 220 module from the QME 220 front panel usingboth hands.Secure the three screws in the IO 220 with the M3 transport nuts.22BG 5214 BE(2007-03)QMG220.oiInsert and fasten the short torx screws 1 … 3.123Re-install the QME 220 following the procedure described above (→and continue with chapter 'Electrical Connections' (→ 24).BG 5214 BE(2007-03)QMG220.oi20)233.3 Electrical Connections3.3.1 QME 220 ConnectionWARNINGAll electrical connections must have cable strain relief.
Route the cables separately from EMI sources.WARNINGFor reasons of electromagnetic compatibility (EMI) (external interference) a single central grounding point is strongly recommended for all connected units(pumping station, SP 220, computer, recorders, etc.). A multiple AC power outletor a common line voltage distributor with power switch fulfills this requirement ina simple manner.Exception:A remotely installed PC and/or an environment with strong electromagnetic interferences.3.3.2 Power Supply SP 220 toQME 220 ConnectionWARNINGDo not connect the mains cable of the SP 220 to the mains socket yet.24V=EMISSRUN24V=VACUUMLANUSBI/OSP 220Set up the power supply in such a way that:•it cannot get wet e.g.
by spilled water on the floor,•air circulation is not impeded and the ambient conditions are satisfied.Insert the outlet connector of the SP 220 into the 24 VDC connector of theQME 220.24BG 5214 BE(2007-03)QMG220.oi3.3.3 PC ConnectionEthernet interfaceSince the QMG 220 does not have a local control panel, it is operated via a PCinterface or as a device in a network.There are various ways to interconnect a QME 220 and a PC:•For a direct link between a QME 220 and a PC the 8 core, crossed patch cablesupplied with the QME 220 is used (red, length 3 m, RJ45 connectors on bothsides).•For an interconnection via switch or in a network situation, the straight (1:1)patch cable is used (gray, length 3 m, RJ45 connectors on both sides, alsosupplied with the QME 220).EMISSRUN24V=VACUUM24V=LANUSBI/OPCPatch cable crossed (red)24V=Network, switchEMISSRUN24V=VACUUMLANUSBI/OPCPatch cable 1:1 (grey)BG 5214 BE(2007-03)QMG220.oi25LAN connection indicatorsThe interface status is indicated by two LEDs integrated in the RJ45 connector:LEDStatusgreenRJ45green yellowI/O interfacelitdata transfer rate100 Mbit/sdarkdata transfer rate10 Mbit/slit(flickering)yellowMeaningdarkdata transfer inprogressno data transfer(or no connection)The <I/O> (X3) connector serves primarily as link to the IO 220.
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