Quadera Pfeiffer программа управления (1248465), страница 21
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Clean or repair it,•Increase the protection current for degas mode.191QUADERA HTML HelpError Message QMG220.E039Message text:"SEM error"Description:An error occurred in the control of the SEM voltage.Message occurs when?•The SEM voltage deviates 10% and more than 30 V from the specified value,•In case of a short circuit.Reasons•The SEM is contaminated or defective.Consequences•The SEM switches off,•Measuring data are not meaningful when using the SEM.Solutions•192Check the SEM. Refer to the device specific instructions of the SEM (OEMmanual) for further information.Scripting in QUADERANOTE:You first have to activate the QUADERA® VSTA functionality through anappropriate license key when you want to use it. Adhere to the notes givenin the Release Notes and to the "About…" dialog.You can use the VSTA functions provided by QUADERA® to automate tasks and totailor them according to your needs. The available instructions, how to use them, andthe syntax is integrated in the help of the VSTA editor:•Open the VSTA editor,•Open the object browser (menu View > Object Browser),•Open the library "Quadera",•Click on the required component,•The bottom right part of the window displays the available information on thecomponent.
Press the F1 key to invoke the general VSTA help.NOTE:QUADERA® provides examples for add-ins and measurement projecttemplates that use these Add-ins. You can use the templates via the startpage.193GlossaryAAI: Analog Input: Analog (continuous) input of the mass spectrometer.amu: atomic mass unit.Analog Input: Analog (continuous) input of the mass spectrometer.Analog Output: Analog (continuous) output of the mass spectrometer.AO: Analog Output: Analog (continuous) output of the mass spectrometer.BBackground: See Mass spectrometer background.Bar graph: Display of measuring data on a category axis.Button: Graphical representation of a binary switch.CC-SEM: Secondary electron multiplier with channeltron (also known as channel electronmultiplier)Category: In QUADERA: A non-continuous division of a measuring data axis.Context menu: A context menu can be called up by clicking certain spots in thegraphical user interface with the right mouse button.
It contains only menu itemsthat make sense in the clicked area (object specific functions).DData navigator: Operating element for navigation within the measuring data. The datanavigator is especially useful when handling large amounts of data.Degassing: For a specified time, the filament receives a current that is higher thanusual. This heats out the measuring head and cleans it from contamination.(Requires connection via webinterface)DI: Digital Input: Digital (binary) input of the mass spectrometer.Digital Input: Digital (binary) input of the mass spectrometer.Digital Output: Digital (binary) output of the mass spectrometer.Dimension: Relation between a quantity of physics and the basic quantities.DO: Digital Output: Digital (binary) output of the mass spectrometer.EEmission current: Electron current required for ionizing the analysis gas.Event display: Display for events: Warnings, informations, errors.F195QUADERA HTML HelpFilament: Glowing wire which emits the electrons required for ionizing the gasmolecules.FIR: Finite Impulse Response (digital filter).GGas specific calibration factors: Correction factors, used for calculating partialpressures from ion currents.Graphics: Display with a graphical representation of the measuring values (line graph,bar graph, ...).GSC: Gas Specific Calibration.HHold: Used if data are being analyzed while a measurement is running.
The commandfreezes the section it its current state (the latest measuring data are not beingdisplayed). However, the measurement continues in the background.IIon source optimization: Calibration process during which the ion source is adjusted inorder to optimize the ion current with respect to the intensity and/or the peakshape.MMass scale calibration: Correction between nominal mass number and actual peakmaximum.Mass spectrometer background: Background determination by the software. Mostly, azero gas is used for this.MCD: Multiple Concentration Determination. In this measuring mode, the concentrationof the individual gas components is calculated from measured ion currents.Measurement project: Contains all instruments required to perform a specificmeasurement task.
One device is assigned to each measurement project. It ispossible that several measurement projects relate to the same device.Measurement project template: See Template.Measurement task: Constitutes the basic component of a recipe and contains themeasuring mode and all parameters required to specify this mode. Measurementtasks can be configured.Measuring mode: The different types of measurement that are supported by thedevice.MID: Multiple Ion Detection. In this measuring mode, the intensity for specified massesis measured as a partial pressure or ion current.MS: Mass spectrometer.NNominal mass: Expected mass of an element.196GlossaryOObject: General term for elements that are being used in the software in any way, e.g.chart, task.Offset: Offset of a real measuring amplifier from zero.PParameter set: Group of parameters that are related or belong together otherwise(settings).Partial pressure: Pressure that is being created by an individual component in a gasmixture.Peak: A scan-analog spectrum consists of a number of peaks.
These represent fractionsof the individual gas components at the respective masses.PGA: Process gas analysis.ppb: Parts per billion (1 : 1,000,000,000).ppm: Parts per million (1 : 1,000,000).Process gas analysis: Analysis of gas mixtures that are being expected in a process.Property dialog field: Dialog window, generally containing several tabs.QQC: Quadrupole Controller. See operating instructions QMG.QMG220: High-end mass spectrometer.QMG700: High-end mass spectrometer.QUADERA: Operation and analysis software for the QMG mass spectrometers.RRecipe: A recipe is a sequence of measurement tasks.RF: Radio Frequency.RGA: Residual Gas Analyzer.SScan: See Scan Analog.Scan-F filter: FIR filter, used for smoothing a scan-analog signal.Scan Analog: Ion current as a function of m/e.Scan speed: Sampling rate for scan-analog measurements.
In most cases thetime/mass.Scripting: Programming of specific routines. In QUADERA, scripting has beenimplemented with VSTA.Section: Part of the working area. Any working area can be divided into so-calledsections by the user. Each section can be filled with a graphical object (e.g.measuring data display).SEM: Secondary Electron Multiplier.197QUADERA HTML HelpSensitivity: The sensitivity is the basis to calculate partial pressures from ion currents.The sensitivity is used together with the gas specific calibration factors, and canbe determined from measurements.SEV: Sekundärelektronenvervielfacher (German expression for SEM).SPM: Sputter Process Monitor.TTemplate: Predefined settings which help the user to create a measurement project(configuration of the measurement without measuring data).Toolbox: Graphical operating element which depicts functions with small pictograms.The functions are activated or executed by dragging & dropping the relatedpictograms.Trend: Course of a value with time.Trend display: Graphical display for the course of a measured quantity with time.Tune Mode: Procedure for tuning a device such as the ion source and optimizing thesignal shape.UUnit: Quantity of physics = Numerical value * unit.VVBA: Visual Basic for Applications.
Scripting language by Microsoft which is used forprogramming in applications. Followed by VSTA.VSTA: Visual Studio Tools for Applications. Development system to customizeapplications by using the .NET framework. Replaces VBA.WWorking area: Part of the measurement project window or recipe. The working area isused to display measuring data or to specify parameters for the currently selectedrecipe.Workspace: See Working areaWYSIWYG: "What You See Is What You Get": The displayed screen is being output atthe printer as faithfully as possible.198IndexAAI Channel ............................ 150, 156About ............................................
23Amplifier offset ............................. 121Active Set .....................................104Analog filter........................... 150, 156Actual Mass ...................................119Analog input editor ........................ 181Add Analog Input Editor ................... 47Analog output editor ...................... 181Add Analog Input Task .....................
47Analog Signal Filter................. 150, 156Add Analog Output Editor ................. 47Analyser Detector Type .................... 28Add Chart Element .......................... 47Analysis matrix ............................. 161Add Digital Input Editor.................... 47AO Channel ...........................
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