Quadera Pfeiffer программа управления (1248465), страница 17
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Stop the measurement: In the device status view, click on the "Stop" icon.143QUADERA HTML Help8. Close and save the measurement project. In the File menu, click Close. Youare requested if you want to save the measurement project. QUADERA®suggests an automatically generated file name that is based on date/time ofthe measurement and the used template.• Yes: the "Save As" window used for saving measuring data opensup. Select a suitable name and path and then click Save. Themeasurement project will be saved and closed.Please note: The file extension for measurement projects is *.qmp• No: the measurement project will be closed without saving thedata.• Cancel: the action is cancelled.
You will return to the measurementproject without saving the data.NOTE:For a written documentation of your measurement projects you can capturescreens of the QUADERA® user interface.144QUADERATotal Pressure MeasurementThis chapter is valid for the QMG220 only.QUADERA® supports total pressure measurements in the vacuum system (hardwaresupported only for QMG220). This requires that an appropriate pressure gauge isconnected to the QMG and the device settings are adjusted accordingly. The totalpressure measurement is available for:•Scan measurement projects,•MID measurement projects,•MCD measurement projects.Use the recipe editor to add the measurement task "Total Pressure" to themeasurement project.
The measured data (total pressure in the vacuum system) aredisplayed and saved. Besides, the course of a measurement corresponds to theselected measurement project.Adding the measurement task "Total Pressure" to a recipeApply the "Add Total Pressure Task" or "Add Total Pressure Task to Chart" tools to therecipe editor. Edit the recipe parameters if necessary.Further notesPay attention to the following items when measuring the total pressure:•The pressure gauge is not permanently switched on because the plasma in thegauge influences the gas composition in the recipient. Exception: monitoringthe QMG.•Note that igniting the pressure gauge and displaying the correct pressure willtake some time (refer to the operating instructions for the pressure gauge).NOTE:For a written documentation of your measurement projects you can capturescreens of the QUADERA® user interface.145QUADERA HTML HelpCreating Measurement Project TemplatesProceed as follows to create a new measurement project template:1.
Use e.g. the start page to open an existing measurement project template, oran existing measurement project.2. Use the recipe editor to modify the recipe parameters according to your needs.3. Use the toolbox to change the working area according to your needs.4. In the File menu, click Save As Template.... Select the path for themeasurement project template, and input the file name.Note:•By default, the path set in the options is used for new measurement projecttemplate,•The file extension *.qmt is used for measurement project templates.146QUADERARecipesRecipesA recipes contains a sequence of measurement tasks.
Use the recipe editor to changethe recipe parameters.The following recipe types are available:•Scan recipes: parameters for scan-analog measurement projectIn a scan-analog measurement, the ion current is measured as a function ofm/e. This quickly allows you to make a qualitative statement such as "The gasconsists of ..., ..., ..., of which ... represents the majority. The fraction of ... isvery small or cannot be measured".However, it is rather cumbersome to deduce the quantitative composition ofthe gas in % or ppm.
Information about changes in the gas composition withtime is hard to deduce from a sequence of several scans, and measurementsover long periods of time also result in extremely large amounts of data.In scan-analog measurement projects you can also add total pressuremeasurement tasks (for the QMG220, if a pressure gauge is installed) andanalog input tasks (AI).•MID recipes: parameters for MID/MCD measurement projectIn an MID measurement (Multiple Ion Detection) you specify distinct m/evalues for which the ion current is to be measured.
Only the specified massnumbers are scanned in this case. Each of these mass numbers is representedby a separate measurement task for which all parameters can be set.Changes in the gas composition with time can be recorded and displayedeasily. An additional analysis of the measuring data allows you to convert theresults into concentrations given in %, ppm, etc.
(MCD measurement).In MID measurement projects you can also add total pressure measurementtasks (for the QMG220, if a pressure gauge is installed) and analog input tasks(AI).•MCD recipes: additional parameters for MCD measurement projectThe MCD measurement (Multiple Concentration Determination) is based on aMID measurement project and includes additional evaluation to measureconcentrations. A matrix of calibration factors (analysis matrix) is used toconvert the measured ion currents into the concentrations of the individual gascomponents.
The calibration factors are not universal valid. They have to bequantified by a separate measurement using calibration gases.In MCD measurement projects you can also add total pressure measurementtasks (for the QMG220, if a pressure gauge is installed) and analog input tasks(AI).NOTE:New or modified parameters for the measurement tasks are accepted by thedevice only after the measurement has been restarted.147QUADERA HTML HelpRecipe EditorIn the working area selection, click the corresponding tab. The recipe parameters forthe active recipe are displayed in the section in tabular form (recipe editor). Thecolumns represent the measurement tasks and the rows represent the recipeparameters.Editing parametersProceed as follows to edit a parameter:1. Click the required cell.2.
Depending on the parameter type:• Enter the required parameter via the keyboard, or• Use the spin buttons to modify the parameter, or• Select the required parameter in the respective dropdown list.3. After a parameter has been input, an automatic check is normally performedto ensure that the parameter lies within the permitted range.
This preventsbad data input, and facilitates correct input.4. The parameter is accepted automatically as soon as you leave the cell.Add measurement taskProceed as follows to add a new measurement task to the recipe:1. Use the tool that is applicable to the measurement project:• "Add Scan Task" for scan measurement projects,• "Add Peak Task" for scan measurement projects,• "Add MID Task" for MID and MCD measurement projects,• "Add MCD Task" for MCD measurement projects• "Add Total Pressure Task" for Scan, MID and MCD measurement,projects,• "Add Analog Input Task" for Scan, MID and MCD measurement,projects.Change sequence of measurement tasksProceed as follows to change the sequence of measurement tasks in a recipe:1. Select the column that corresponds to the measurement task.2. Drag&Drop the measurement task to the required position.
A red arrowindicates the insert position.Delete measurement taskProceed as follows to delete a measurement task from the recipe:1. Select the entire column that corresponds to the measurement task.2. On the keyboard, click the Del key (delete), or use the context menu. Whenthe measurement task contains data a requester appears and queries you toapprove deleting.148QUADERAContext menu of the recipe editorThis context menu contains the following functions•Copy Parameter To All: applies the selected parameter to all measurementtasks.•Delete selected Task: deletes the selected measurement task.NOTE:New or modified parameters for the measurement tasks are accepted by thedevice only after the measurement has been restarted.149QUADERA HTML HelpRecipe Parameters: ScanNOTE:New or modified parameters for the measurement tasks are accepted by thedevice only after the measurement has been restarted.The following recipe parameters are available:Task NameFirst MassWidthSpeedDwellMass ModeDetector TypeAI ChannelGain (only QMG700)SEM VoltageCP-Level (only QMG700)Autorange ModeDetector RangeRange LimitAnalog Signal Filter (only QMG700)ResolutionPause CalibrateAO ChannelAO Mode (only QMG220)AO Range (only QMG220)Trip TypeLevel ADO# ALevel BDO# BState150QUADERAParameterRangeDescription•Letters anddigitsName of the measurement task.Number > 0Start mass for the measurement.•Task NameFirst MassNote that for analog input scanmeasurement tasks the trip functionand the related parameters areavailable.Enter the required value or use thespin buttons.•WidthAny numberMass range to be scanned (startingwith the start mass).
Reverse scans,i.e. from right to left, are performedfor negative values.Enter the required value or use thespin buttons.•SpeedDropdown listMeasuring time per mass for scanmeasurements (mass scan)•DwellDropdown listDwell time for the measurement ofthe analog input of the QC (onlyrelevant for detector type EXT_IN_#in analog input measurement tasks).151QUADERA HTML HelpParameterRangeDescription•Drop-DownListeOperation mode for scan-analogmeasurements and peak tasks:MassMode•SCAN-N (only scan-analogmeasurements):Ion currents are detected in amass scan.•SCAN-F (only scan-analogmeasurements):Ion currents are additionallyfiltered using a FIR algorithm(FIR: Finite Impulse Response).The filter removes in large partinterfering noise from the rawsignal of the electrometerpreamplifier.
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