Fundamentals of Vacuum Technology (1248463), страница 69
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See also DIN 1345.3/23: Specific heat capacityAlso called specific heat:Specific heat (capacity) at constant pressure: cp.Specific heat (capacity) at constant volume: cV.176HomeStatutory units10.4.2 Derived coherent1 SI units withspecial names and symbols(alphabetical)Name of unit Symbol VariableRelationshipÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑcoulombCquantity of electricity1C=1Aásor electric charge10.4.4 Derived noncoherent SI units withspecial names and symbolsBasic unitSymbolDefinitionÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑDayd1 d = 86.400 sHourh1 h = 3.600 sfaradFelectrical capacitance1 F = 1 A á s á VÐ1Minutemin1 min = 60 shenryHinductance1 H = 1 V á s á AÐ1Round angleÐ2 π radhertzHzfrequency1 Hz = 1 á sÐ1Degree(¡)jouleJenergy, work, quantityof heat1 J = 1 N á m = WsπÐÐÐÐ rad180Minute(Ô)π1ÐÐÐÐÐÐ rad (= ÐÐÐgrad)10.80060Second(ÔÕ)π1ÐÐÐÐÐÐÐ rad (= ÐÐÐÐminute)648.00060lumenlmluminous flux1 lm = cd á srluxlxilluminance1 lx = 1 lm á mÐ2newtonNforce1 N = 1 kgm á sÐ2ohmΩelectrical resistance1 Ω = 1 V á AÐ1pascalPapressure, mechanicalstress1 Pa = 1 N á mÐ2radianrad2angle, plane angle1 rad = 1 m á mÐ1siemensSelectrical conductance1 S = 1 á ΩÐ1steradiansr2solid angle1 sr = 1 m2 á mÐ2teslaTmagnetic flux density orinduction1 T = 1 Wb á mÐ2voltVelectrical voltageor potential difference1 V = 1 W á AÐ1wattWpower, energy flux, heatflux1 W = 1 J á sÐ1weberWbmagnetic flux1 Wb = 1 V á s1Formed with numeric factor 1; e.g.
1 C = 1 As, 1 Pa = 1 N á mÐ2SI unit2 Additional10.4.3 Atomic unitsBasic unitSymbolVartiableÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑÑAtomicMass for indication ofmassmuparticle mass;unit1 mu = 1/12 mass of 12Calso amu (atomic massunit).ElectronvolteVenergy177HomeVacuum technology standards11. National andinternationalstandards andrecommendationsparticularly relevantto vacuumtechnology11.1 National and internationalstandards andrecommendations of specialrelevance to vacuumtechnologyFor around 20 years now, numerous standards and recommendations havebeen drawn up at national and international level and revised, whenevernecessary, in accordance with the state of the art. These standards andrecommendations must be observed whenever use is made of vacuumequipment (pumps, gauges, valves, etc.) and vacuum apparatus, systemsand plants are assembled.
They not only contain specifications applyingspecially to vacuum technology, but also go beyond this specific field andinvolve, for example, physical units, formulas, noise protection regulations,etc.1304National standards are primarily DIN standards, particularly those relatingto the area of vacuum technology in the DIN Standards Committee onMechanical Engineering (NAM). International standards andrecommendations are drawn up and issued1305Mass; weighed value, force, weight force, weightload, definitions1/881306Density; definitions6/841313Physical variables and equations,definitions, spelling4/781314Pressure; basic definitions, units2/771319Basic definitions for measurement technologyPart 1 Ð Basic definitionsPart 2 Ð Definitions for the use of gaugesPart 3 Ð Definitions for measurementuncertainty and evaluation of gaugesand measuring equipmentPart 4 Ð Treatment of uncertainty in theuse of measurementsa) by the International Standardization Organization (ISO), in particular byISO Committee TC 112 (vacuum technology)b) by the European Committee of Manufacturers of Compressors, vacuumpumps and compressed air tools (PNEUROP), in particular byPNEUROP Subcommittee C5 (vacuum technology)A) National agreements, Part 1: DINDINTitle1301c) by the European Committee for Standardization (CEN), in particular byTechnical Committee TC 138 (nondestructive testing) and TechnicalCommittee TC 318.The content of the documents drawn up by the international organizationsin a) to c), with German participation (also by LEYBOLD), has beenextensively incorporated into DIN standards, as reflected in designationssuch as DIN / ISO or DIN / EN.The most important standards to be complied with are listed in Table 11.1below.Abbreviations used:D = draftCD = Committee DraftUnitsPart 1 Ð Names of units, symbolsPart 2 Ð Parts and multiples generally usedPart 3 Ð Conversions for units no longer usedGeneral symbolsPart 1 Ð General symbolsPart 2 Ð Symbols for meteorology and geophysicsPart 3 Ð Symbols for electrical energy supplyPart 5 Ð Symbols for flow mechanicsPart 6 Ð Symbols for electricalcommunications technologyPart 7 Ð Symbols for meteorology and geophysicsPart 7 Ð Symbols for electric machinesIssue19932/786/793/949/893/899/895/921/911/951/808/8312/85A) National agreements, Part 1: DIN (cont.)DINTitleIssue1343Normal state, reference state1/901345Thermodynamics; basic definitions12/931952Flow measurement with screens, nozzles, etc.7/822402Pipelines; nominal internal diameters, definitions,classification2/76Seals for gas supply Ð Part 64/943535178HomeVacuum technology standardsDINTitle8964Circuit parts for refrigeration systems withhermetic and semi-hermetic compressorsPart 1: TestsPart 2: Requirements160051600619226254362809028400Issue3/969/86(E 12/95)Overpressure gauges with elastic measuringelement for general use Requirementsand testing2/87Overpressure gauges with Bourdon tubeSafety-related requirements and testing2/87Ð 1 Control and instrumentation technology;control and regulation technology;definitions Ð general principlesÐ 4 Control and instrumentation technology;control and regulation technology;definitions for control and regulationsystemsÐ 5 Control and instrumentation technology;control and regulation technology;functional definitionsIntegral leak rate test of safety vessel withabsolute pressure methodStatic seals for flange connectionsPart 1 - Characteristic values for seals andtesting methodsPart 2 - Seals made of sealing plate; specialtesting methods for quality assuranceVacuum technology; designations and definitionsPart 1 - Basic definitions, units, ranges,characteristic variables and basic principlesPart 2 - Vacuum pumpsPart 3 - Vacuum plants; characteristicvariables and gaugesPart 4 - Vacuum coating technologyPart 5 - Vacuum drying and vacuumfreeze-dryingPart 6 - Analytical techniques for surfacetechnologyPart 7 - Vacuum metallurgyPart 8 - Vacuum systems, components andaccessoriesIssue28410Vacuum technology; mass spectrometer partialpressure gauges, definitions, characteristicvariables, operating conditions11/86Vacuum technology; acceptance specificationsfor mass spectrometer leak detection devices,definitions3/76Vacuum technology; calibration of vacuumgauges in a range from 10-3 to 10-7 mbar.General methods; pressure reductionthrough constant flow3/76Vacuum technology; measuring pV mass flowaccording to volumetric method at constantpressure3/76Vacuum technology; standard method forcalibrating vacuum gauges through directcomparison with a reference devicePart 1 Ð General principlesPart 2 Ð Ionization vacuum gaugesPart 3 Ð Thermal conductivity vacuum gauges5/769/788/8028411284162/94284182/942/9428426Vacuum technology; acceptance specificationsfor rotary piston vacuum pumpsPart 1 Ð Rotary piston and vane type rotaryvacuum pumps in rough and medium vacuum rangePart 2 Ð Roots vacuum pumps in mediumvacuum range28427Vacuum technology; acceptance specificationsfor diffusion pumps and ejector vacuum pumps forpump fluid vapor pressures of less than 1 mbar2/83Vacuum technology; acceptance specificationsfor turbo-molecular pumps11/7828429 Vacuum technology; acceptancespecifications for getter-ion pumps8/85Vacuum technology; measuring specifications forejector vacuum pumps and ejector compressors.Pump fluid: water vapor11/84Acceptance specifications for liquidring vacuum pumps1/87Acceptance specifications for diaphragmvacuum pumpsE 5/957/809/959/955/9010/806/923/7628428284303/8110/807/7810/80(E 7/91)Vacuum technology; symbols Ð overview11/7628402Vacuum technology: variables, symbols,units - overview12/76Vacuum technology; quick connections,small flange connections9/86Vacuum technology: flanges, dimensions10/8628404Title284172840128403DIN28431284325338045635Testing of plastic foils, determination of gaspermeabilityNoise measurement at machines: measurementof airborne noise, enveloping surface methods.Part 13 Ð Compressors, including vacuum pumps,positive displacement, turbo and steamejectors6/69(E 10/83)2/77179HomeVacuum technology standardsDINTitle55350Definitions of quality assurance and statisticsPart 11 Ð Basic definitions of quality assurancePart 18 Ð Definitions regarding certification ofresults of quality tests/quality test certificatesIssueISO8/951607 / 2 Positive displacement vacuum pumps.Measurement of performance characteristics.Part 2 - Measurement of ultimate pressure7/8766038Torr Ð millibar; millibar Ð torr conversion tables4/71ÐThesaurus Vacui (definition of terms)1969A) European/national agreements, EN, DIN/EN, CENDIN/EN TitleEN 473837-1837-2837-3Training and certification of personnel fornondestructive testing (including leak test)7/93Issue11/891608 / 1 Vapor vacuum pumps.Part 1: Measurement ofvolume rate of flow12/931608 / 2 Vapor vacuum pumps.Part 2: Measurement of critical backing pressure12/8916093/86Vacuum technology.
Flange dimensionsDIN/ISO Standard atmosphere253312/792861 / 1 Quick release couplings. DimensionsPart 1 - Clamped Type8/742861 / 2 Quick release couplings. DimensionsPart 2 - Screwed type8/80Pressure gauges, Part 1: Pressure gauges withBourdon tubes, dimensions, measurementtechnology, requirements and testing2/9712/81Pressure gauges, Part 2: Selection and installationrecommendations for pressure gauges3529 / 1 Vacuum Technology VocabularyPart 1 - General terms1/953529 / 2 Vacuum Technology VocabularyPart 2 - Vacuum pumps and related terms12/813529 / 3 Vacuum Technology VocabularyPart 3 - Vacuum gauges12/813556 / 1 Measurement of performance characteristics.Part 1 - Sputter ion pumps (E)1992Pressure gauges, Part 3: Pressure gauges withplate and capsule elements, dimensions,measurement technology, requirementsand testing1330-8 E Nondestructive testing - definitions for leak test Ðterminology1779 EIssueTitleNondestructive testing Ð leak test.














