Fundamentals of Vacuum Technology (1248463), страница 65
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cf) = 28.3168 dm31 atm á ft3 á minÐ1 = 1 cfm (NTP)1 micron cubic foot per minute = 1 µ á ft3 á minÐ1 = 1 µ á cuft á minÐ1 = 1µ á cfm1 lb = 16 ounces (oz)1 Pa á m3/s = 1 Pa á m3/s (anglo-am.) = 103 Pa á l/s1 standard cc per second = 96.600 micron cubic feet per hour1 lusec = 1 µ á l á sÐ11µálá1 std cc/sec = 760 µ á l á sÐ1*) F12 (20 ¡C) C.Cl2F2 M = 120.92 h/molsÐ1= 127 µ áft3 á hÐ1= 0.0013 std cc per second = 1 lusec**) (NTP) normal temperature and pressure 1 atm und 0 ¡CTable VII b: Conversion of throughput (QpV) units; (leak rate) units149HomeTables, Formulas, Diagrams% by weight% by volumePartial pressure mbarN2O2ArCO2NeHeCH4KrN2OH2XeO375.5123.011.290.041.2 á 10Ð37 á 10Ð52 á 10Ð43 á 10Ð46 á 10Ð55 á 10Ð64 á 10Ð59 á 10Ð6Σ 100 %78.120.930.930.031.8 á 10Ð37 á 10Ð52 á 10Ð41.1 á 10Ð45 á 10Ð55 á 10Ð58.7 á 10Ð67 á 10Ð6Σ 100 %7922129.470.311.9 á 10Ð25.3 á 10Ð32 á 10Ð31.1 á 10Ð35 á 10Ð45 á 10Ð49 á 10Ð57 á 10Ð5Σ 101350 % RH at 20 ¡C1.61.1511.7Note: In the composition of atmospheric air the relative humidity (RH) is indicated separately along with the temperature.At the given relative humidity, therefore, the air pressure read on the barometer is 1024 mbar.Table VIII: Composition of atmospheric airRough vacuumPressureParticle number densityMean free pathImpingement rateVol.-related collision rateMonolayer timeType of gas flowp [mbar]n [cmÐ3]λ [cm]Za [cmÐ2 á sÐ1]ZV [cmÐ3 á sÐ1]τ [s]Other special featuresMedium vacuum10Ð3High vacuumUltrahigh vacuum1013 Ð 11019 Ð 1016< 10Ð21023 Ð 10201029 Ð 1023< 10Ð5Viscous flow1 Ð1016 Ð 101310Ð2 Ð 101020 Ð 10171023 Ð 101710Ð5 Ð 10Ð2Knudsen flow10Ð310Ð7ÐÐ 10910 Ð 1051017 Ð 10131017 Ð 10910Ð2 Ð 100Molecular flow< 10Ð7< 109> 105< 1013< 109> 100Molecular flowConvection dependenton pressureSignificant change inthermal conductivityof a gasSignificant reductionin volumerelated collision rateParticles on thesurfaces dominateto a great extend inrelation to particles ingaseous space1013Table IX: Pressure ranges used in vacuum technology and their characteristics (numbers rounded off to whole power of ten)At room temperatureStandard values1(mbar á l á sÐ1 á cmÐ2)Metals10Ð9 ...
á 10Ð7Nonmetals10Ð7 ... á 10Ð5Outgassing rates (standard values) as a function of timeExamples:1/2 hr.1 hr.Ag1.5 á 10Ð81.1 á 10Ð8Al2 á 10Ð86 á 10Ð9Ð8Cu4 á 102 á 10Ð8Stainless steel9 á 10Ð81 All values depend largely on pretreatment!3 hr.2 á 10Ð95 hr.6 á 10Ð93.5 á 10Ð83.5 á 10Ð92.5 á 10Ð8Examples:SiliconeNBRAcrylic glassFPM, FKM1/2 hr.1.5 á 10Ð54 á 10Ð61.5 á 10Ð67 á 10Ð71 hr.8 á 10Ð63 á 10Ð61.2 á 10Ð64 á 10Ð73 hr.3.5 á 10Ð61.5 á 10Ð68 á 10Ð72 á 10Ð75 hr.1.5 á 10Ð61 á 10Ð65 á 10Ð71.5 á 10Ð7Table X: Outgassing rate of materials in mbar á l á sÐ1 á cmÐ2150HomeTables, Formulas, DiagramsNominal width (DN)SeriesR5Internal diam.
(mm)R10101620253240506380100125160200250320400500630800100010162124344151708310212715321326131840050165180010001 The nominal internal diameters correspond approximately to theinternal diameters of the pipeline componentsÓ (DIN 2402 - Feb. 1976).The left-hand column of the nominal internal diameter series is preferredin practice.Table XI: Nominal internal diameters (DN) and internal diameters of tubes, pipes and apertureswith circular cross-section (according to PNEUROP).SolventRelativemolecularmassDensityg / cm3(20 ¡C)AcetoneBenzene (solution)Petrol (light)Carbon tetrachlorideChloroformDiethyl etherEthyl alcoholHexaneIsopropanolMethanolMethylene chlorideNitromethanePetroleum etherTrichlorethylene (ãTriÒ)Water58780.7980.87880.68 ... 0.721.5921.480.79670.7130.660.7850.7951.3281.1380.641.470.998153.8119.446748660.1328561mixture131.418.02Meltingpoint¡C5.49Ð 22.9Ð 63.5Ð114.5Ð 116.4Ð 93.5Ð 89.5Ð 97.9Ð 29.2Ð0.00Boilingpoint¡C5680.2> 10076.7617834.67182.464.741101.7540 ...
6055100.0Maximum admissibleconcentration (MAC)cm3 / m32525501000400500400200 (toxic!)100ÐTable XII: Important data (characteristic figures) for common solvents151HomeTables, Formulas, Diagramst¡CÐ 100Ð 99Ð 98Ð 97Ð 96psmbar1.403 á 10Ð51.7192.1012.5613.117%Dg/m31.756 á 10Ð52.1392.5993.1503.812ÐÐÐÐÐt¡C3534333231psmbar0.22330.24880.27690.30790.3421%Dg/m30.20320.22540.24980.27670.3061t¡C3031323334psmbar42.4344.9347.5550.3153.20%Dg/m330.3832.0733.8335.6837.61ÐÐÐÐÐ95949392913.784 á 10Ð54.5845.5426.6858.0494.602 á 10Ð55.5446.6657.9969.574ÐÐÐÐÐ30292827260.37980.42130.46690.51700.57200.33850.37390.41270.45510.5015353637383956.2459.4262.7666.2669.9339.6341.7543.9646.2648.671001011021031041013.21050108811271167597.8618.0638.8660.2682.2ÐÐÐÐÐ90898887869.672 á 10Ð511.6013.8816.5819.7711.44 á 10Ð513.6516.2419.3022.89ÐÐÐÐÐ25242322210.63230.69850.77090.85020.93700.55210.60750.66780.73360.8053404142434473.7877.8082.0286.4291.0351.1953.8256.5659.4162.3910510610710810912081250129413391385704.7727.8751.6776.0801.0ÐÐÐÐÐ858483828123.53 á 10Ð527.9633.1639.2546.3827.10 á 10Ð532.0337.7844.4952.30ÐÐÐÐÐ20191817161.0321.1351.2481.3711.5060.88350.96781.0601.1601.269454647484995.86100.9106.2111.7117.465.5068.7372.1075.6179.2611011111211311414331481153215831636826.7853.0880.0907.7936.1ÐÐÐÐÐ80797877760.5473 á 10Ð30.64440.75770.88941.0420.6138 á 10Ð30.71910.84130.98241.145ÐÐÐÐÐ15141312111.6521.8111.9842.1722.3761.3871.5151.6531.8031.9645051525354123.4129.7136.2143.0150.183.0687.0191.1295.3999.8311511611711811916911746180418631923965.2995.0102610571089ÐÐÐÐÐ75747372711.220 á 10Ð31.4251.6621.9362.2521.334 á 10Ð31.5501.7992.0852.414Ð 10Ð 9Ð 8Ð 7Ð 62.5972.8373.0973.3793.6852.1392.3282.5322.7522.9905556575859157.5165.2173.2181.5190.2104.4109.2114.2119.4124.71201211221231241985204921142182225011221156119012251262ÐÐÐÐÐ70696867662.615 á 10Ð33.0323.5114.0604.6882.789 á 10Ð33.2183.7084.2674.903ÐÐÐÐÐ543214.0154.3724.7575.1735.6233.2463.5213.8174.1364.4796061626364199.2208.6218.4228.5293.1130.2135.9141.9148.1154.51251261271281292321239324672543262112991337137514151456ÐÐÐÐÐ65646362615.406 á 10Ð36.2257.1598.2239.4325.627 á 10Ð36.4497.3818.4389.633012346.1086.5667.0557.5758.1294.8475.1925.5595.9476.3606566676869250.1261.5273.3285.6298.4161.2168.1175.2182.6190.21301311321331342701278328672953304114971540158316271673ÐÐÐÐÐ605958575610.80 á 10Ð312.3614.1316.1218.3810.98 á 10Ð312.5114.2316.1618.34567898.7199.34710.0110.7211.476.7977.2607.7508.2708.8197071727374311.6325.3339.6354.3369.6198.1206.3214.7223.5232.51351361371381393131322333173414351217191767181518651915ÐÐÐÐÐ555453525120.92 á 10Ð323.8027.0330.6734.7620.78 á 10Ð323.5326.6030.0533.90101112131412.2713.1214.0214.9715.989.39910.0110.6611.3512.077576777879385.5401.9418.9436.5454.7241.8251.5261.4271.7282.3140 36141967ÐÐÐÐÐ504948474639.35 á 10Ð344.4950.2656.7163.9338.21 á 10Ð343.0148.3754.3360.98151617181917.0418.1719.3720.6321.9612.8313.6314.4815.3716.318081828384473.6493.1513.3534.2555.7293.3304.6316.3328.3340.7ÐÐÐÐÐ454443424171.98 á 10Ð380.9790.98102.1114.5 á 10Ð368.36 á 10Ð376.5685.6595.70106.9 á 10Ð3202122232423.3724.8626.4328.0929.8317.3018.3419.4320.5821.788586878889578.0601.0624.9649.5674.9353.5366.6380.2394.2408.6ÐÐÐÐÐ40393837360.12830.14360.16060.17940.20020.11920.13290.14800.16460.1829252627282931.6733.6135.6537.8040.0623.0524.3825.7827.2428.789091929394701.1728.2756.1784.9814.6423.5438.8454.5470.7487.4t¡C9596979899psmbar845.3876.9909.4943.0977.6%Dg/m3504.5522.1540.3558.9578.11 Sources: Smithsonian Meteorological Tables 6th.
ed. (1971) and VDI vapor tables 6th ed (1963).Table XIII: Saturation pressure ps and vapor density %D of water in a temperature range from Ð100¡C to +140¡C1152HomeTables, Formulas, DiagramsGroup A3)Group B3)Group C3)MethanecEthylenecHydrogencEthanecButa-1,3-dienecAcetylene (ethyne)cPropanecAcrylonitrilecCarbon bisulfidecButanechydrogen cyanideaPentanecDethyl ether (s)cHexanecEthylene oxide (oxiran)cHeptanec1.4 DioxanaOctaneaTetrahydrofuranaCyclohexanecTetrafluoroethyleneaPropylene (propene)aStyrene (s)bBenzene (s)cToluene (s)ÐXyleneaLegendGroup AGroup BGroup CNaphthaleneÐMESG1> 0.9 mm0.5 ...
0.9 mm< 0.5 mmMethanol (s)cMIC2 ratio> 0.8 mm0.45 ... 0.8 mm< 0.45 mmEthanol (s)cPropyl alcohol (propanol)c2Butyl alcohol (butanol)a3PhenolÐAcetaldehyde (ethanal)aAcetone (s) (propanone)cMethyl ethyl ketone (s) (propan-2-one)cEthyl acetate (s)aButyl acetate (s)cAmyl acetate (s)ÐEthyl methacrylateÐAcetic acid (ethanoic acid)bMethyl chloride (s)aMethylene chloride (s) (dichlormethane)ÐAmmoniaaacetonitrileaAnilineÐPyridineÐ1Minimum Electrical Spark GapMinimum Ignition CurrentThe ratio is based on the MIC value for laboratory methaneGroup allocation:a Ð according to MESG valueb Ð according to MIC ratioc Ð according to both MESG value and MIC ratio(s) Ð solventTable XIV: Hazard classification of fluids according to their MESG1 and/or MIC2 values.(Extract from European Standard EN 50.014)153Homeo oÐ oxx xxAcetic acid, 50 %Acetic acid, 80 %Acetic anhydrideAceto-acetic esterAcetoneo xo oÐ xAcetophenoneAcetyleneAcrylnitrileAir, cleanAir, oilyox ÐAmmonia liquidAmmonia gasAmyl acetateAmyl alcoholAnilinexxoÐoAnthracene oilASTM oil No.
1ASTM oil No. 2ASTM oil No. 3Benzaldehyde 100 %oxxÐBenzeneBenzene bromideBenzoic acidBitumenBlast furnace gaso oo oBoron trifluorideBromineButadieneButaneButyl acetatex xo oButyl alcoholButyl glykolButyraldehydeCarbolineumCarbon bisulfideÐxoooxxxxxxÐxooxxxxxÐxxoxxxxxxxxxoÐoÐÐooooxxÐxxxÐÐo Ðx xx xx xx Ðo oxxooooxxxoxxxxoÐoxÐxxxxxxxxxxxxxxxxxxxxxxxxxxxxxCarbon dioxide, dryCarbon dioxide, wetCarbon tetrachlorideChloracetic acidChlorinated solventsxxooxxoooClorine, dryChlorine waterChlorine, wetChlorobromomethaneChlorobenzeneÐ xo ooo oChloroformChloromethylCitrus oilsCoke furnace gasCopra oil acidooooÐx ÐxxxCottonseed oilCresolCrude petroleumCyclohexaneCyclohexanoneÐxo ooooxCyclohexylamineDecahydronaphtaleneDesmodur TDesmophene 2000Dibutylphthalatexo oxo oxÐxxxxoxoÐoooÐDichlorethyleneDichlorethaneDiethylamineDiethylene glycolDiethyl etherÐ ox xo ÐooÐDiethyl etherDiethyl sebazateDichlorbenzeneDichlorbutyleneDiesel oiloooxoDi-isopropyl ketoneDimethyl etherDimethylanilineDimethyl formamideDioctylphthalateooo oo oo oooxxÐooxxoxooxoxxÐxxxxxxxxxEPDMTeflon (PTFE)Fluoro rubber (FPM, FKM) VitonSilicone rubberChloroprene rubber (CR) NeopreneNitrile-butadiene rubber (NBR) Perbunanoox = resistantÐ = conditionally resistanto = not resistantEPDMoÐMediumTeflon (PTFE)Fluoro rubber (FPM, FKM) VitonAcetaldehydeAcetic acid (crystalline), pureAcetic acid, industrialAcetic acid vaporsAcetic acid, 20 %Silicone rubberx = resistantÐ = conditionally resistanto = not resistantChloroprene rubber (CR) NeopreneMediumNitrile-butadiene rubber (NBR) PerbunanTables, Formulas, DiagramsxoxxxxxxxxxÐoxxxxxooooxxxxxÐoooooooxoxxxxxxxooooÐxoxxxxxxxoxxoxxxxxÐÐoooxxxxxxxÐÐTable XV: Chemical resistance of commonly used elastomer gaskets and sealing materials154Homeox Ðo oooEthyl alcohol, pureEthyl clorideEthylene bromideEthylene chlorideEthylene dichlorideÐ Ðx Ðo ooxooÐxxxxxxooÐxxxxxxÐxÐ Ðoo oÐEthylene glycolEthyl etherEthyl silicateEthyl acrylateFatty acidsx xo ox xoFatty alcoholFir leaf oilFluorbenzeneHydrofluoric acid, cold, 5 %Hydrofluoric acid, cold, purexxxxÐxooxxxFormaldehydeFormalin, 55 %Formic acidFormic acid methyl esterFreon 11xxÐoxÐxÐÐxxFreon 12Freon 22Freon 113FuraneFurfurolxoxooxxxooGas oillGenerator gasGlycerineGlycolHalowax oilxxxxoÐÐxxoxoÐ ÐoÐoÐoxooxxxxxxoÐÐoÐHydraulic fluidsHydraulic oils DIN 51524Phosphoric ester HFDPolyglycol water HFCHydrobromic acidxoxoÐoÐoHydrobromic crystalline acidHydrocyanic acidHydrogen bromideHydrogen gas 20Hydrogen sulfidexÐ Ðx xxxxxxxÐIsobutyl alcoholIsopropyl acetateIsopropyl alcoholIsopropyl chlorideIsopropyl etherÐoÐoxxxÐKeroseneKerosineLighting gasMaleic anhydrideMercuryÐ Ðx ÐÐ ÐMethaneMethane (pit gas)Methylene chlorideMethyl acrylateMethyl alcohol (methanol)x Ðx xo oMethyl ethyl ketoneMethyl isobutyl ketoneMethyl methacrylateMethyl salicylateNaphtaleneoooooNatural gasNitrobenzeneNitrous oxideOleic acidOrange oilÐ xo oxxo ooxÐoxxoxxxxxxxxÐxxxxxÐxxxxxxooxxoxxxoxÐoxxxxÐxxxoxooxxxxxooxoxxxxxxxxxxxxxxxxxx xÐ ÐEPDMEthyl acetate (acetic ether)EthaneEthyl acetateEthyl acrylateEthyl alcohol, denaturedÐoxTeflon (PTFE)ÐxxxxxFluoro rubber (FPM, FKM) Vitono oHeating fuel oil (coal base)Heating fuel oil (petroleum crude base)HeptaneHexaldehydeHexanex = resistantÐ = conditionally resistanto = not resistantSilicone rubberxChloroprene rubber (CR) NeopreneÐNitrile-butadiene rubber (NBR) Perbunano oo oox = resistantÐ = conditionally resistanto = not resistantMediumEPDMFluoro rubber (FPM, FKM) VitonDioxanDiphenylDiphenyloxydEdenol 888Essential oilsMediumTeflon (PTFE)Silicone rubberChloroprene rubber (CR) NeopreneNitrile-butadiene rubber (NBR) PerbunanTables, Formulas, DiagramsxooooÐxxxxxoxxxxÐxoooxxxxxxÐÐooxoooxxxxxÐÐoÐoxoxxxxxÐoxoxoooxxTable XV: Chemical resistance of commonly used elastomer gaskets and sealing materials155HomeooooPetrol benzene 3:7Petrol benzene spirit 5:3:2PhenolPhenyl ethyl etherPhenylic acid (phenol)ooooooooooPhosphorous chloridePhthalic anhydridePiperidinePolyglycolPropane, gasoxoxxÐxoxxxPropylene oxydePropyl alcoholPydraul F-9Pydraul ACPydraul A 150oxo oooxxxPydraul A 200PyridineSalicylic acidSkydrol 500Skydrol 7000oxStearic acidStyreneSulfurSulfur dioxideSulfur trioxide, dryÐoÐoooooooTransformer oilTrain oilTriethanolamineTributoxyethyl phosphateTributyl phosphatexoooooooooxxxxxxxxxxxxooooTrichloroethaneTrichloroethyleneTrichloroethyl phosphate 20Trichloroethyl phosphate 80Trichloracetic acid 60ooÐoooxxxÐÐxxxxxoooÐTricresyl phosphateTurpentineTurpentine oil, pureVinyl acetateVinylaceto-acetic acid 3:2oÐ Ðxoo ÐxxxxxxxVinyl chloride, liquidWater 50Water 100Wood oilXylamonx xx ÐÐo oxxxxxÐxXyleneo oxxxxoxxxxoxxxxxxxxÐxxxxxxxxxoxxÐooxooooox xoxoÐxxxxxxxxxoxxxxxxxoooxxxxxxxoxEPDMÐxoooooTeflon (PTFE)Petrol alcohol 3:1Petrol benzene 4:1Petrol benzene 7:3Petrol benzene 3:2Petrol benzene 1:1xxo oo oo oFluoro rubber (FPM, FKM) VitonxoÐxooTar oilTetrachlorethyleneTetrahydrofuraneTetralineToluenexoSilicone rubberxxxxxxxxChloroprene rubber (CR) NeoprenexoxoxxxNitrile-butadiene rubber (NBR) PerbunanParaffin oilPentachlordiphenylPentanePerchloroethylenePetrolxx = resistantÐ = conditionally resistanto = not resistantEPDMxÐxoxMediumTeflon (PTFE)xoxÐxx = resistantÐ = conditionally resistanto = not resistantFluoro rubber (FPM, FKM) VitonChloroprene rubber (CR) NeopreneOxygenOzonePalmitic acidPalm oil acidParaffinMediumSilicone rubberNitrile-butadiene rubber (NBR) PerbunanTables, Formulas, DiagramsxxxxxoooooxxxxxoÐÐooxxxxxxxxxxoÐÐooxxxxxoxoTable XV: Chemical resistance of commonly used elastomer gaskets and sealing materials156HomeTables, Formulas, DiagramsVacuum symbolsAll symbols wit the exception of those marked with**) do not depend on theposition.**) These symbols may only be used in the position shown here (tip of theangle pointing down)The symbols for vacuum pumps should always be arranged such that theside with the constriction is allocated to the higher pressureVacuum pumpsVacuum pump, generalEjector vacuum pump**Piston vacuum pumpDiffusion pump**Diaphragm vacuum pumpAdsorption pump**Rotary positive displacement pump**Getter pumpRotary plunger vacuum pump**Sputter-ion pumpSliding vane rotary vacuum pump**CryopumpRotary piston vacuum pump**Scroll pumpLiquid ring vacuum pump**Evaporation pumpRoots vacuum pump**Turbine vacuum pump, general**AccessoriesRadial flow vacuum pumpCondensate trap, generalAxial flow vacuum pumpCondensate trap with heat exchanger (e.g.
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