Принципы нанометрологии (1027623), страница 63
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The offset between the centre of the retroreflector and the probe centre is kept as small as possible, in order to minimize the Abbe error in the linearity determination. Care must also be takento minimize the cosine errors during the linearity calibration. Alignment byeye is good enough for large-scale CMMs, but for miniature CMMs with theirincreased accuracy goal, special measures have to be taken. For the calibration of the F25 a position-sensitive detector (PSD) has been used for alignment [54].
The return laser beam is directed onto the PSD and the run-outover the 100 mm stroke reduced to a few micrometres. This translates intoless than 1 nm of cosine error over the full travel.Straightness and rotations can be measured with straightness and rotational optics respectively.
Because of the special construction of the F25,some errors are dependent on more than one coordinate. The platformholding the z axis moves in two dimensions on a granite table. This meansthat instead of two separate straightness errors, there is a combinedstraightness, which is a function of both x and y. The same holds for therotations around the x and y axes. This complicates the calibration, bymaking it necessary to measure the straightness and rotations of the platform along several lines, divided over the measuring volume.The results of the laser interferometer calibration can be used to establishwhat is commonly referred to as a computer-aided accuracy (CAA) correctionfield.
Figure 9.12 shows the results of a laser interferometer measurementof straightness (xTx) on the F25 with the CAA correction enabled [54].FIGURE 9.12 Straightness (xTx) measurement of the F25 with the CAA correctionenabled.ReferencesIn this case, there was a half-year period between the two measurements.The remaining error is a result of the finite accuracy of the original set ofmeasurements used to calculate the CAA field, the finite accuracy of thesecond set of measurements and the long-term drift of the instrument. Themaximum linearity error is 60 nm.The squareness calibration of the F25 cannot be carried out with a laserinterferometer, so an artefact is used. During this measurement a partialCAA correction is active, based on the laser interferometer measurementsonly.
The artefact measurement consists of measuring a fixed length in twoorientations. For the xy squareness, one of these measurements will be alongthe xy diagonal, the other in an orientation rotated 180 around the y axis.The squareness can then be calculated from the apparent length differencebetween the two orientations. The artefact can be a gauge block, but it isbetter to use an artefact where the distance is between two spheres, since theprobe radius does not affect the measurement. Because the principle of thesquareness calibration is based upon two measurements of the same length,it is particularly important that this length does not drift between themeasurements.
In order to get a squareness value which applies to the wholemeasurement volume, the two spheres should be as far apart as possible andplaced symmetrically within the measurement volume.9.7 References[1] Bosch J A 1995 Co-ordinate measuring machines and systems (CRC Press)[2] Flack D R, Hannaford J 2005 Fundamental good practice in dimensionalmetrology NPL Good practice guide No. 80 (National Physical Laboratory)[3] ISO 10360 part 1: 2000 Geometrical product specifications (GPS) Acceptance and reverification tests for coordinate measuring machines(CMM) - Part 1: Vocabulary (International Organization for Standardization)[4] Flack D R 2001 CMM probing NPL Good practice guide No. 43 (NationalPhysical Laboratory)[5] ISO 10360 part 6: 2001 Geometrical product specifications (GPS) Acceptance and reverification tests for coordinate measuring machines(CMM) - Part 6: Estimation of errors in computing Gaussian associatedfeatures (International Organization for Standardization)[6] Barakat N A, Elbestawi M A, Spence A D 2000 Kinematic and geometricerror compensation of coordinate measuring machines Int.
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