Принципы нанометрологии (1027623), страница 71
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See scanning probemicroscopespot size, 129, 141spring constant, 13, 191standard deviation, 19standard uncertainty, 12, 19static noise, 183steradian, 13stiffness, 36, 39stimulated emission, 24stitching, 132STM. See scanning tunnellingmicroscopestratified functional properties,228stray capacitance, 100stray reflection, 97structural loop, 43structured light projection, 134stylus force, 124stylus instrument, 14, 123stylus qualification, 263stylus tip, 124, 125substitute element, 264surface damage, 124, 278surface datum, 125Indexsurface form, 115surface integrity, 115surface profile, 10, 120, 212surface texture, 2, 117, 121surface texture parameters, 121surface topography, 35, 115swept-frequency interferometry, 91symmetry, 39, 46systematic errors, 17, 98Système International d’Unités, 6Ttapping mode, 180t-distribution, 20, 21TEM. See transmission electronmicroscopeten point height, 250texture aspect ratio, 238texture direction, 242thermal conductivity, 45thermal diffusivity, 45thermal distortion, 45thermal expansion, 45, 77, 92thermal expansion coefficient, 43thermal loop, 43thermal mass, 45TIS.
See total integrated scattertotal height of the surface, 219total integrated scatter, 153total internal reflectance, 104total profile, 212total traverse length, 213touch trigger probe, 266traceability, 7, 14traced profile, 212transmissibility, 49transmission characteristic, 51,214transmission electron microscope,201triangulation instrument, 132true value, 15tunnelling effect, 179two-pan balance, 296Twyman-Green interferometer, 64type A evaluation, 19type B evaluation, 19visibility, 61vision system, 266void volume, 241volumetric error compensation,269Wuncertainty, 3, 15, 17unified co-ordinate system, 234unit, 2Watt balance, 11, 294wavelength at 50% depthmodulation, 129waviness profile, 213, 216weight, 10weighting function, 214Welch-Satterthwaite formula,20white light interference, 62white light scanninginterferometry, 149Wolf pruning, 244work function, 180wringing, 56, 57VXUVan der Waals force, 194vertical scanning white lightinterferometry, 149vibrating probe, 279vibration isolation system, 49VIM, 15virtual CMM, 271viscous damping, 49X-ray interferometer, 108YYoung’s modulus, 42, 192ZZeeman-stabilised laser, 28321This page intentionally left blank.
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