Принципы нанометрологии (1027623), страница 58
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This sectionpresents some guidance on the fundamental differences between thedifferent classes of parameters and some guidance on their comparison.The largest difference between profile and areal methods is in the filtration methods used. A profile extracted from an SL surface or an SF surface isnot mathematically equivalent to a profile analysed using the methodsdetailed in the profile standards. The latter uses a profile filter (orthogonal tothe lay) and the former an areal filter that can produce very different resultseven with similar filter types (for example Gaussian) and cut-off (or nestingindex).To minimize the difference between profile and areal filtering thefollowing guidelines should be followed:-the orientation of the rectangular portion of the surface, over whichthe measurement is made, is aligned with the surface lay;257258C H A P T ER 8 : Surface topography characterization-a Gaussian filter is used with recommended cut-off value given by thedefault values in Table 8.1;-other default values in the profile standards should be used, forexample stylus tip radius, sample spacing, etc;-the length in the traverse direction of the rectangular portion of thesurface should be five times the cut-off length;Only those areal parameters that have a direct profile equivalent can becompared, for example, the root mean square height parameters Rq and Sq.As a counter example, the texture aspect ratio, Str, has no profile equivalent.Areal surface texture parameters that characterize the extrema of the surface,for example, maximum peak height, Sp, tend to have larger measured valuesthan their equivalent profile parameters since the peaks and valleys ona measured profile nearly always go over the flanks of the peak or valley andnot the true extremes.8.6 References[1] Malacara D 2007 Optical shop testing (Wiley Series in Pure and AppliedOptics) 3rd edition[2] Whitehouse D J 1982 The parameter rash - is there a cure? Wear 83 75–78[3] Thomas T R 2008 Kenneth J Stout 1941-2006: a memorial Wear 266490–497[4] Stout K J, Sullivan P J, Dong W P, Mainsah E, Luo N, Mathia T,Zahouani H 1993 The development of methods for the characterization ofroughness in three dimensions (Commission of the European Communities: Brussels).[5] Blunt L A, Jiang X 2003 Advanced techniques for assessment surfacetopography (Butterworth-Heinemann)[6] Whitehouse D J 2002 Handbook of surface and nanometrology (Taylor &Francis) 1st edition[7] Muralikrishnan B, Raja J 2008 Computational surface and roundnessmetrology (Springer)[8] Leach R K 2001 The measurement of surface texture using stylus instruments NPL Good practice guide No.
37 (National Physical Laboratory)[9] ISO 4287: 2000 Geometrical product specification (GPS) - Surface texture:Profile method - Terms, definitions and surface texture parameters (International Organization of Standardization)[10] ISO 11562: 1996 Geometrical product specification (GPS) - Surface texture:Profile method - Metrological characteristics of phase correct filters (International Organization of Standardization)References[11] Thomas T R 1999 Rough surfaces (Imperial College Press) 2nd edition[12] ISO 4288: 1996 Geometrical product specification (GPS) - Surface texture:Profile method - Rules and procedures for the assessment of surface texture(International Organization of Standardization)[13] Leach R K, Harris P M 2002 Ambiguities in the definition of spacingparameters for surface-texture characterization Meas.
Sci. Technol. 131924–1930[14] Scott P J 2007 The case of the surface texture parameter RSm Meas. Sci.Technol. 17 559–564[15] ISO 3274: 1996 Geometrical product specification (GPS) - Surface texture:Profile method - Nominal characteristics of contact (stylus) instruments(International Organization of Standardization)[16] ISO 12179: 2000 Geometrical product specification (GPS) - Surface texture:profile method - Calibration of contact (stylus) instruments (InternationalOrganization for Standardization)[17] ISO 5436 part 1: 2000 Geometrical product specification (GPS) - Surfacetexture: Profile method - Measurement standards - Material measures(International Organization of Standardization)[18] ISO 5436 part 2: 2000 Geometrical product specification (GPS) - Surfacetexture: Profile method - Software measurement standards (InternationalOrganization of Standardization)[19] ISO 1302: 2002 Geometrical product specification (GPS) - Indication ofsurface texture in technical product documentation (International Organization of Standardization)[20] Cox M G, Forbes A B, Harris P M, Smith I M 2004 The classification andsolution of regression problems for calibration NPL Report CMSC 24/03[21] ISO 13565 part 1: 1996 Geometrical product specification (GPS) - Surfacetexture: Profile method - Surfaces having stratified functional properties Filtering and general measurement conditions (International Organizationfor Standardization)[22] ISO 13565 part 2: 1998 Geometrical product specification (GPS) - Surfacetexture: Profile method - Surfaces having stratified functional properties Height characterization using material ratio curve (International Organization for Standardization)[23] ISO 13565 part 3: 2000 Geometrical product specification (GPS) - Surfacetexture: Profile method - Surfaces having stratified functional properties Height characterization using material probability curve (InternationalOrganization for Standardization)[24] ISO 12085 Geometrical product specifications (GPS) - Surface texture:Profile method - Motif parameters (International Organization forStandardization)[25] ISO/DIS 25178 part 2: 2007 Geometrical product specification (GPS) Surface texture: Areal - Part 2: Terms, definitions and surface textureparameters (International Organization for Standardization)259260C H A P T ER 8 : Surface topography characterization[26] ISO/DIS 25178 part 3: 2007 Geometrical product specification (GPS) Surface texture: Areal - Part 3: Specification operators (International Organization for Standardization)[27] ISO/TS 16610–1: 2006 Geometrical product specification (GPS) - Filtration Part 1: Overview and basic terminology (International Organization forStandardization)[28] ISO/DIS 25178 part 6: 2008 Geometrical product specification (GPS) Surface texture: Areal - Part 6: Classification of methods for measuringsurface texture (International Organization for Standardization)[29] ISO/DIS 25178 part 71: 2007 Geometrical product specification (GPS) Surface texture: Areal - Part 71: Software measurement standards (International Organization for Standardization)[30] ISO/DIS 25178 part 601: 2007 Geometrical product specification (GPS) Surface texture: Areal - Part 601: Nominal characteristics of contact (stylus)instruments (International Organization for Standardization)[31] ISO/DIS 25178 part 602: 2008 Geometrical product specification (GPS) Surface texture: Areal - Part 602: Nominal characteristics of non-contact(confocal chromatic probe) instruments (International Organization forStandardization)[32] ISO/CD 25178 part 603: 2007 Geometrical product specification (GPS) Surface texture: Areal - Part 603: Nominal characteristics of non-contact(phase shifting interferometric microscopy) instruments (InternationalOrganization for Standardization)[33] ISO/CD 25178 part 604: 2008 Geometrical product specification (GPS) Surface texture: Areal - Part 604: Nominal characteristics of non-contact(coherence scanning interferometry) instruments (International Organization for Standardization)[34] ISO/DIS 25178 part 701: 2007 Geometrical product specification (GPS) Surface texture: Areal - Part 701: Calibration and measurement standards forcontact (stylus) instruments (International Organization for Standardization)[35] ANSI/ASME B46.1 2002 Surface texture, surface roughness, waviness andlay (American National Standards Institute)[36] Jiang X 2007 Paradigm shifts in surface metrology Part II.
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