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A 456 701–729CHAPTER 6Surface topographymeasurementinstrumentation6.1 Introduction to surface topography measurementMost manufactured parts rely on some form of control of their surfacefeatures. The surface is usually the feature on a component or device thatinteracts with the environment in which the component is housed or thedevice operates.
The surface topography (and of course the material characteristics) of a part can affect things such as how two bearing parts slidetogether, how light interacts with the part, or how the part looks and feels.The need to control and, hence, measure surface features becomes increasingly important as we move into a miniaturized world. The surface featurescan become the dominant functional features of a part and may become largein comparison to the overall size of an object.There is a veritable dictionary-sized list of terminology associated withthe field of surface measurement.
In this book I have tried to be consistentwith ISO specification standards and the NPL good practice guides [1,2]. Wedefine surface topography as the overall surface structure of a part (i.e. all thesurface features treated as a continuum of spatial wavelengths), surface formas the underlying shape of a part (for example, a cylinder liner has cylindricalform) and surface texture as the features that remain once the form has beenremoved (for example, machining marks on the cylinder liner). The mannerin which a surface governs the functionality of a part is also affected by thematerial characteristics and sub-surface physics, or surface integrity. Surfaceintegrity is not covered in this book as it falls under material science (see [3]).This book will concentrate on the measurement of surface texture, as thisis the main feature that will affect MNT parts and processes.
In many waysform becomes texture as the overall size of the part approaches that of itssurface features, so this distinction is not always clear-cut. In the field ofoptics manufacturing the surface form and texture often both need to becontrolled to nanometric accuracy. A recent example where the macro-worldFundamental Principles of Engineering NanometrologyCopyright Ó 2010 by Elsevier Inc.
All rights reserved.CONTENTSIntroduction to surfacetopographymeasurementSpatial wavelengthrangesHistorical backgroundof classical surfacetexture measuringinstrumentationSurface profilemeasurementAreal surface texturemeasurementSurface topographymeasuringinstrumentationOptical instrumentsCapacitiveinstrumentsPneumaticinstrumentsCalibration of surfacetopography measuringinstruments115116C H A P T ER 6 : Surface topography measurement instrumentationCONTENTSUncertainties in surfacetopographymeasurementComparisons of surfacetopography measuringinstrumentsSoftware measurementstandardsReferencesmeets the MNTworld is the proposal for a 42 m diameter off-axis ellipsoidalprimary mirror for the E-ELT optical telescope [4,5].
This will be made fromseveral 1.42 m across-flats hexagonal mirror segments that need phenomenal control of their surface topography. Such mirrors are not usually thoughtof as MNT devices, but they clearly need engineering nanometrology. We willonly consider surface texture in this book; the measurement of surface formin the optics industry is covered in many other text books and references (seefor example [6]). Surface texture measurement has been under research forover a century and it was naturally taken up by most of the NMIs as their firstMNTsubject. However, it is still a hot area of research, especially as the newareal surface texture specification standards have now started to be introduced. The reader is referred elsewhere for more in-depth treatment of thearea of surface measurement [7–10].To rationalize the information content I have split the chapters on surfacetopography measurement in this book into three.
Chapters 6 and 7 discussthe instrumentation used to measure surface topography (see section 6.2 fora discussion of why I have used two instrumentation chapters). Chapter 8then discusses the characterization of surface topography – essentially howthe data that are collected from a surface topography measuring instrumentare analysed.6.2 Spatial wavelength rangesA chapter on surface topography, primarily surface texture, measurementcould include a large range of instrumentation, with stylus and opticalinstruments at one end of the range and scanning probe and electronmicroscopes at the other end. However, this would make for a very largechapter that would include a huge range of measurement technologies. Ihave, therefore, split surface topography into instruments that measurespatial wavelength features that are 500 nm and larger, for example, stylusand most far-field optical methods, and instruments that measure featuresthat are 500 nm and smaller, for example, scanning probe and electronmicroscopes.
This division is not hard and fast, but will suffice to rationalizethe information content per chapter.It is worth noting that the magnitude of 500 nm has not been chosen forpurely arbitrary reasons; it is also a form of natural split. The stylus instrument is limited to spatial wavelengths that are greater than the stylus radius,typically 2 mm or more, and far-field optical instruments are diffractionlimited, typically to around 300 nm or so. Scanning probe instruments arealso limited by the radius of the tip, typically tens of nanometres, and electronHistorical background of classical surface texture measuring instrumentationFIGURE 6.1 Amplitude-wavelength space depicting the operating regimes forcommon instruments.microscopes tend to be used for spatial wavelengths that cannot be measuredusing far-field optical techniques.
Figure 6.1 is an amplitude-wavelength (AW)space graph that shows the range of amplitudes and spatial wavelengths thatcan be measured using three common instruments. AW space is a usefulmethod for depicting the operating regimes of surface measuring instrumentsthat assumes a surface can be mathematically generated by a series of sinusoidal functions [11–13]. AW space has been extended recently to include theinstrument measuring speed and probing force [14].6.3 Historical background of classical surface texturemeasuring instrumentationBefore the turn of the nineteenth century the measurement of surface texturewas primarily carried out by making use of our senses of sight and touch.
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