Принципы нанометрологии (1027623), страница 28
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To calibratean optical interferometer (and, therefore, measure its non-linearity), theX-ray interferometer is used to make a known displacement that is comparedagainst the optical interferometer under calibration. By servo-controlling thePZT it is possible to hold lamella A in a fixed position or move it in discrete109110C H A P T ER 5 : Displacement measurementsteps equal to one fringe period [65]. Examples of the calibration of a differential plane mirror interferometer and an optical encoder can be found in [19]and [46] respectively.
In both cases periodic errors with amplitudes of lessthan 0.1 nm were measured once a Heydemann correction (see section5.2.8.5) had been applied. X-ray interferometry can also be used to calibratethe characteristics of translation stages in two orthogonal axes [66] and tomeasure nanoradian angles [67].One limitation of X-ray interferometry is its short range. To overcomethis limitation, NPL, PTB and Instituto di Metrologia ‘G. Colonetti’ (nowknown as Instituto Nazionale di Recerca Metrologica – the Italian NMI)collaborated on a project to develop the Combined Optical and X-ray Interferometer (COXI) [68] as a facility for the calibration of displacement sensorsand actuators up to 1 mm. The X-ray interferometer has an optical mirror onthe side of its moving mirror that is used in the optical interferometer(see Figure 5.16).
The optical interferometer is a double-path differentialsystem with one path measuring displacement of the moving mirror on theX-ray interferometer with respect to the two fixed mirrors above the translation stage. The other path measures the displacement of the mirror (M)FIGURE 5.16 Schema of a combined optical and X-ray interferometer.Referencesmoved by the translation stage with respect to the two fixed mirrors eitherside of the moving mirror in the X-ray interferometer. Both the optical andX-ray interferometers are servo-controlled.
The X-ray interferometer movesin discrete X-ray fringes, the servo system for the optical interferometerregisters this displacement and compensates by initiating a movement of thetranslation stage. The displacement sensor being calibrated is referenced tothe translation stage and its measured displacement is compared with theknown displacements of the optical and X-ray interferometers.5.8 References[1] Wilson J S 2005 Sensor technology handbook (Elsevier: Oxford)[2] Fraden J 2003 Handbook of modern sensors: physics, designs and applications (Springer) 3rd edition[3] Bell D J, Lu T J, Fleck N A, Spearing S M 2005 MEMS actuators and sensors:observations of their performance and selection for purpose J.
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