sem_MeX (1248469)

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The SEM as a Profile Measurement DeviceMeXThe SEM as a Profile Measurement DeviceComparative analysis of MeX and tactile measurement deviceTwo comparative roughness measurements performed by MeX and atactile measurement device illustrate the unique solution of the AliconaSoftware. MeX turns the SEM into a 3D measurement device. The softwareprovides 3D measurement directly in the image.Two different measurement techniquesA profile measurement device is usually basedon a tactile measurement principle. Thesurface is measured by moving a stylus acrossthe surface. As the stylus moves up and downalong the surface, a transducer converts thesemovements into a signal which is thentransformed into a roughness number andusually a visually displayed profile.

Multipleprofiles can often be combined to form asurface representation.MeX, however, as a non-tactile measurementmethod is based on the analysis ofstereoscopic images. From the object observedin the SEM two images are captured from twodifferent viewpoints. This is usually performedby a simple tilting of the specimen holder inthe order of 3 to 7 degrees. The resulting twoimages are imported into the MeX softwareand a 3D surface representation is instantlycalculated.

The user is then enabled tovisualize and analyse the 3D dataset in variousforms such as a profile, area and even volumeanalysis.Figure 1: Profile Analysis throughout the definition of a profile polygon in the image of the specimen(Here: metallic glass)Comparative roughness analysis of tactile measurement device and MeX1The SEM as a Profile Measurement DeviceMeXA comparative analysis by two different methodsIn order to evaluate the applicability of MeX asaroughnessmeasurementmethodcomparative measurements on the samespecimen were performed. As a test samplethe surface of a ground glass rod wasexamined.Figure 2: SEM-texture of a ground glass rodField of view: 500µm x 375µmResolution: 1024 x 768 pixelFigure 3 illustrates the measurement resultsperformed by the tactile Taylor Hobson device.The profilometer, however, only allows thevisualization of the profilewithout the visual link tomeasurementthe surface.Figure 3: Profile measurement with tactile 3D measurement device without a visual link to the surfaceIn contrast, MeX offers the visualization of theprofilemeasurementandthevisualappearance of the surface as illustrated inFigure 4.Comparative roughness analysis of tactile measurement device and MeX2The SEM as a Profile Measurement DeviceMeXFigure 4: Measurement of the profile with the MeX-module “Profile Analyses” that provides a direct link to theimage of the specimen.The differenceOne major drawback of conventionalmeasurementprinciplessuchastheprofilometer is the incapability to measure andcapture the visual appearance of the surface atthe same time.

MeX, however, allows thedirect link between the visual appearance andthe 3D measurement. Besides the greatlyeased identification of measurement positionsincluding artefacts on the specimens that canonly be detected by a visual inspection allmeasurements can be interpreted much better.Experimental ResultsTable 1 illustrates the numerical comparison ofthe measurement results with Taylor Hobsonand MeX.The average roughness of the profile (Ra) andthe Root-Mean-Square roughness of the profile(Rq) are measured with very little deviation.Within the measurement accuracy of bothmethods the results can be classified asRaTaylor HobsonMeXidentical.

The maximum height of theroughness profile (Rz) and the maximum peakvalue of the roughness profile (Rp) show adeviation of 35% and 30% respectively. Asthese values represent a single measurementalong the profile these deviations are causedby measuring the profile at non identicalpositionsonthespecimen.Rq0,75850,7573Rz0,9850,995Rp3,70765,61631,77352,5968Table 1: Numerical comparison between profilometer and MeXComparative roughness analysis of tactile measurement device and MeX3The SEM as a Profile Measurement DeviceMeXSummaryTwodifferentroughnessmeasurementprinciples were compared: A tactile roughnessmeasurement device from Taylor Hobson andnon-tactile measurement performed by MeX.Both methods show similar results. Comparedtoconventionaltactileroughness•••measurement devices the non-tactile MeXmethod combines all advantages of the SEMwith the possibilities of a 3D measurementdevice.

Additional analysis capabilities as areaand volume calculations are also feasible.MeX turns the SEM into a 3D measurement deviceMeX allows a direct link between the visual appearance and the 3D measurementMeX and Taylor Hobson show comparative resultsThe AuthorsDr. Stefan Scherer has been working in imageprocessing now for over 15 years and is CEOof Alicona Imaging GmbH. Anton Piffer is headof the R&D Microscopy-Laboratory atSwarovski & Co, the global market leader incrystal jewellery stones.ContactAlicona Imaging GmbH, Teslastraße 8, A – 8074 Grambach, Austriaphone:fax:mail:web:+ 43 316 4000 700+ 43 316 4000 711office@alicona.comwww.alicona.comComparative roughness analysis of tactile measurement device and MeX4.

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