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Phys. D. Appl. Phys. 2001.Vol. 34, № 18. P. 2854–2861.128ПРИЛОЖЕНИЕ 1ОПРЕДЕЛЕНИЕ ЭЛЕКТРОФИЗИЧЕСКИХ ПАРАМЕТРОВ МЭМС –ПЕРЕКЛЮЧАТЕЛЯЭлектрофизическиесрабатыванияипараметрысопротивлениеМЭМС-переключателямембрана–(напряжениеразрывнойэлектрод)экспериментальных образцов проводили с помощью измерительного стенданизкочастотной метрики (рис. П.2.1).
Пластина с кристаллами МЭМСпереключателейустанавливалась камеру измерений(1) на столик, кконтактным площадкам переключателя через зонды проводилось подключениек измерительным приборам. После подключения зондов к контактнымплощадкам измерительная камера заполнялась сухим азотом. При подаченапряжения (2) на электроды смещения и мембрану различной полярностимембрана под действием кулоновских сил взаимодействия притягивалась кцентральномупроводнику,обеспечиваяпротеканиетока,которыйрегистрировался на экране осциллографа (3) (графический метод контроля) иизмерителя (4) Е7-12 (цифровой метод контроля).
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