Принципы нанометрологии (1027623), страница 40
Текст из файла (страница 40)
Sci. Technol. 111162–1173169170C H A P T ER 6 : Surface topography measurement instrumentation[36] Whitehouse D J 1999 Surface measurement fidelity Proc. LAMBDAMAP267–276[37] Hidaka K, Saito A, Koga S, Schellekens P H J 2008 Study of a microroughness probe with ultrasonic sensor Ann. CIRP 57 489–492[38] Coupland J M, Lobera J 2008 Holography, tomography and 3D microscopyas linear filtering operations Meas.
Sci. Technol. 19 074012[39] Creath K 1989 Calibration of numerical aperture effects in interferometricmicroscope objectives Appl. Opt. 15 3333–3338[40] Greve M, Krüger-Sehm R 2004 Direct determination of the numericalaperture correction factor of interference microscopes Proc. XI Int. Colloq.Surfaces, Chemnitz, Germany, Feb. 156–163[41] Hecht E 2003 Optics (Pearson Education) 4th edition[42] de Groot P, Colonna de Lega X 2006 Interpreting interferometric heightmeasurements using the instrument transfer function Proc.
FRINGE30–37. 2005[43] ISO/FDIS 25178 part 603: Geometrical product specification (GPS) Surface texture: Areal - Nominal characteristics of non-contact (phaseshifting interferometric) instruments (International Organization ofStandardization)[44] Krüger-Sehm R, Frühauf J, Dziomba T 2006 Determination of the short wavelength cutoff for interferential and confocal microscopes Wear 264 439–443[45] Harasaki A, Schmit J, Wyant J C 2001 Offset of coherent envelope positiondue to phase change on reflection Appl.
Opt. 40 2102–2106[46] Park M-C, Kim S-W 2001 Compensation of phase change on reflection inwhite-light interferometry for step height measurement Opt. Lett. 26 420–422[47] Goa F, Leach R K, Petzing J, Coupland J M 2008 Surface measurementerrors when using commercial scanning white light interferometers Meas.Sci. Technol. 18 015303[48] Harasaki A, Wyant J C 2000 Fringe modulation skewing effect in the whitelight vertical scanning interferometry Appl. Opt.
39 2101–2106[40] Marinello F, Bariani P, Pasquini A, De Chiffre L, Bossard M, Picotto G B2007 Increase of maximum detectable slope with optical profilers, throughcontrolled tilting and image processing Meas. Sci. Technol. 18 384–389[50] Proertner A, Schwider J 2001 Dispersion error in white-light Linnik interferometers and its implications for evaluation procedures Appl. Opt. 406223–6228[51] Lehmann P 2003 Optical versus tactile geometry measurement - alternativesor counterparts Proc. SPIE 5144 183–196[52] Hillmann W 1990 Surface profiles obtained by means of optical methods are they true representations of the real surface? Ann.
CIRP 39 581–583[53] Rhee H, Vorburger T, Lee J, Fu J 2005 Discrepancies between roughnessmeasurements obtained with phase-shifting and white-light interferometryAppl. Opt. 44 5919–5927References[54] Brand U, Flügge J 1998 Measurement capabilities of optical 3D-sensors forMST applications Microelectronic Engineering 41/42 623–626[55] McBride J W, Zhao Z, Boltryk P J 2008 A comparison of optical sensingmethods for the high precision 3D surface profile measurement of groovedsurfaces Proc. ASPE, Portland, Oregon, USA, Oct.
124–127[56] Gao F, Coupland J, Petzing J 2006 V-groove measurements using white lightinterferometry Photon06, Manchester, Sept.[57] Coupland J M, Lobera J 2008 Measurement of steep surfaces using whitelight interferometry Strain doi: 10.1111/j.1475-1305.2008.00595.x[58] Bray M 2004 Stitching interferometry: recent results and absolute calibration Proc. SPIE 5252 305–313[59] Zhang R 2006 Theoretical and experimental study on the precision of thestitching system Proc. SPIE 6150 61502Y[60] Zeng L, Matsumoto H, Kawachi K 1997 Two-directional scanning methodfor reducing the shadow effects in laser triangulation Meas. Sci.
Technol. 8262–266[61] Wilson T 1984 Theory and practice of scanning optical microscopy(Academic Press)[62] Diaspro A 2002 Confocal and two-photon microscopy: foundations,applications and advances (Wiley Blackwell)[63] Wilson T 1990 Confocal microscopy (Academic Press)[64] Jordan H, Wegner M, Tiziani H 1998 Highly accurate non-contact characterization of engineering surfaces using confocal microscopy Meas. Sci.Technol. 9 1142–1151[65] Petrán H, Hadravsky M, Egger M D, Galambos R 1968 Tandem-scanningreflected-light microscope J. Opt. Soc.
Am. 58 661–664[66] Minsky M 1961 Microscopy apparatus (US patent 3.013.467)[67] ISO/FDIS 25178 part 602: 2008 Geometrical product specification (GPS) Surface texture: Areal - Nominal characteristics of non-contact (confocalchromatic probe) instruments (International Organization of Standardization)[68] Tiziani H J, Uhde H 1994 Three-dimensional image sensing by chromaticconfocal microscopy Appl. Opt.
33 1838–1841[69] Danzl R, Helmli F, Rubert P, Prantl M 2008 Optical roughness measurements on specially designed roughness standards Proc. SPIE 7102 71020M[70] Miura K, Okada M, Tamaki J 2000 Three-dimensional measurement ofwheel surface topography with a laser beam probe Advances in AbrasiveTechnology III 303–308[71] Fukatsu H, Yanagi K 2005 Development of an optical stylus displacementsensor for surface profiling instruments Microsyst.
Technol. 11 582–589[72] Creath K 1988 Phase-measuring interferometry techniques in Progress inoptics (Elsevier Science Publishers: Amsterdam)[73] Kumar U P, Bhaduri B, Kothiyal M P, Mohan N K 2009 Two-wavelengthmicro-interferometry for 3-D surface profiling Opt. Lasers Eng. 47 223–229171172C H A P T ER 6 : Surface topography measurement instrumentation[74] Stenner M D, Neifeld M A 2006 Motion compensation and noise tolerancein phase-shifting digital in-line holography Opt. Express 14 4286–4299[75] Yamaguchi I, Ida T, Yokota M 2008 Measurement of surface shape andposition by phase-shifting digital holography Strain 44 349–356[76] Creath K, Wyant J C 1990 Absolute measurement of surface roughnessAppl. Opt. 29 3823–3827[77] Lim J, Rah S 2006 Absolute measurement of the reference surface profile ofa phase shifting interferometer Rev.
Sci. Instrum. 77 086107[78] Cuche E, Marquet P, Depeursinge C 1999 Simultaneous amplitude-contrastand quantitative phase-contrast microscopy by numerical reconstruction ofFresnel off-axis holograms Appl. Opt. 38 6994–7001[79] Cuche E, Marquet P, Depeursinge C 2000 Spatial filtering for zero-orderand twin-image elimination in digital off-axis holography Appl. Opt. 394070–4075[80] Ferraro P, Grilli S, Alfieri D, Nicola S D, Finizio A, Pierattini G, Javidi B,Coppola G, Striano V 2005 Extended focused image in microscopy bydigital holography Opt. Express 13 6738–6749[81] Colomb T, Montfort F, Kühn J, Aspert N, Cuche E, Marian A, Charrière F,Bourquin S, Marquet P, Depeursinge C 2006 Numerical parametric lens forshifting, magnification and complete aberration compensation in digitalholographic microscopy J.
Opt. Soc. Am. A 23 3177–3190[82] Kühn J, Charrière F, Colomb T, Cuche E, Montfort F, Emery Y, Marquet P,Depeursinge C Axial sub-nanometre accuracy in digital holographicmicroscopy Meas. Sci. Technol. 19 074007[83] Kühn J, Colomb T, Montfort F, Charrière F, Emery Y, Cuche E, Marquet P,Depeursinge C 2007 Real-time dual-wavelength digital holographicmicroscopy with a single hologram acquisition Opt. Express 15 7231–7242[84] Wada A, Kato M, Ishii Y 2008 Multiple-wavelength digital holographicinterferometry using tuneable laser diodes Appl.
Opt. 47 2053–2060[85] ISO/FDIS 25178 part 604: Geometrical product specification (GPS) - Surfacetexture: Areal - Nominal characteristics of non-contact (coherence scanninginterferometry) instruments (International Organization of Standardization)[86] Petzing J, Coupland J M, Leach R K 2009 Guide to the measurement ofrough surface topography using coherence scanning interferometry NPLGood practice guide to be published (National Physical Laboratory)[87] Harasaki A, Schmit J, Wyant J C 2000 Improved vertical-scanning interferometry Appl. Opt. 39 2107–2115[88] Ghim Y-S, You J, Kim S-W 2007 Simultaneous measurement of thin filmthickness and refractive index by dispersive white-light interferometer Proc.SPIE 6674 667402[89] You J, Kim S-W 2008 Optical inspection of complex patterns for microelectronic products Ann.
CIRP 57 505–508References[90] de Groot P 2006 Stroboscopic white-light interference microscopy Appl.Opt. 45 5840–5844[91] Rembe C, Dräbenstedt A 2006 Laser-scanning confocal vibrometermicroscope: theory and experiments Rev. Sci. Instrum. 77 083702[92] Mansfield D 2006 The distorted helix: thin film extraction from scanningwhite light interferometry Proc. SPIE 6186 210–220[93] Kim S-W, Kim G-W 1999 Thickness-profile measurement of transparentthin-film layers using white-light scanning interferometry Appl. Opt.
385968–5974[94] Mansfield D 2008 Extraction of film interface surfaces from scanning whitelight interferometry Proc. SPIE 7101 71010U[95] Olgilvy J 1991 Theory of wave scattering from random rough surfaces(Institute of Physics Publishing)[96] Church E L, Jenkinson H J, Zavada J M 1979 Relationship between surfacescattering and microtopographic features Opt.
Eng. 18 125–136[97] Vorburger T V, Marx E, Lettieri T R 1993 Regimes of surface roughnessmeasurable with light scattering Appl. Opt. 32 3401–3408[98] Bennett J M, Mattsson L 1999 Introduction to surface roughness andscattering (Optical Society of America) 2nd edition[99] Stover J C 1995 Optical scattering: measurement and analysis (Society ofPhoto-Optical Instrumentation Engineering)[100] Davies H 1954 Reflection of electromagnetic waves from a rough surfaceProc.
![](https://s.studizba.com/z.php?f=/templates/si/i/noavatar.png&w=100&h=100&t=1"){kind=avatar}
