Плазменно и термически стимулированное осаждение алмазных пленок многомерные модели химических реакторов, страница 72

p.564-569.161. Алексеев Б.В., Гришин А.М. Физическая газодинамика реагирующих потоков / Москва:Высшая школа. 1985. 464 c.162. Dandy D.S., Coltrin M.E. A simplified analytical model of diamond growth in direct currentarcjet reactors // J. Mater. Res. 1995. v.10. p.1993-2010.163. Smith G.P., Golden D.M., Frenklach M., Moriarty N.W., Eiteneer B., Goldenberg M., BowmanC.T., Hanson R.K., Song C., Gardiner W.C., Jr, Lissianski V.V., Qin Z. GRI-Mech,http://www.me.berkeley.edu/gri–mech/164. Глушко В.П. (Ответст.

редактор) Термодинамические свойства индивидуальных веществ /Справочное издание в четырех томах. Москва: Наука. 1978-1981.165. Gear C.W. Numerical Initial Value Problems in Ordinary Differential Equations / EnglewoodCliffs, NJ: Prentice-Hall.

1971. 253 p.166. Klopovsky K.S., Mankelevich Y.A., Popov A.M., Popov N.A., Popovicheva O.B., RakhimovA.T., Rakhimova T.V. Polar ozone depletion problem / Preprint of the Institute of Nuclear Physics,Part 2. “Model description”. 1994. N-94-33/355.167. Белоцерковский O.M. Численное моделирование в механике сплошных сред / Москва:Наука. 1984. 520 с.168. Smoluchowski M. Uber wärmeleitung in verdünnten gasen // Annalen der Physik und Chemie.1898. v.64. p.101-103.169.

Stefanov B., Zarkova L. The molecular and reactive thermal conductivities and accommodationcoefficients of dissociating hydrogen up to 2400K // J. Phys. D: Appl. Phys. 1976. v.9. p.1217-1226.170. Terekhov A. D., Frolova E. N. Experimental comparison of methods of determining the thermalaccommodation // Z. Prikl. Mekh. Tekhnich.

Fiz. 1972. v.4. c.173-176.171. Schwarz S., Rosiwal S.M., Frank M., Breidt D., Singer R.F. Dependence of the growth rate,quality, and morphology of diamond coatings on the pressure during the CVD-process in an industrialhot-filament plant // Diamond Relat. Mater. 2002. v.11. p.589-595.172. Kondoh E., Ohta T., Mitomo T., Ohtsuka K. Surface reaction kinetics of gas-phase diamondgrowth // J. Appl. Phys. 1993. v.73. p.3041-3046.173. Zhu M., Hauge R.H., Margrave J.L., D’Evelyn M.P. Mechanism for diamond growth on flat andstepped diamond (100) surfaces // In Proceedings of the Third International Symposium on DiamondMaterials; Dismukes J.P., Ravi K.V., Eds.; The Electrochemical Society: Pennington, NJ, 1993.

p.138145.174. Kawarada H., Sasaki H., Sato A. Scanning-tunneling-microscope observation of thehomoepitaxial diamond (001) 2×1 reconstruction observed under atmospheric pressure // Phys. Rev. B.1995, v.52. p.11351-11358.175. Skokov S., Weiner B., Frenklach M. Elementary reaction mechanism of diamond growth fromacetylene // J.

Phys. Chem. 1994. v.98. p.8-11.176. Wu J-J., Hong F.C-N. Direct identification of diamond growth precursor using almost pure CH4or C2H2 near growth surface // Appl. Phys. Lett. 1997. v.70. p.185-187.306177. Lin T., Yu G.Y., Wee A.T.S., Shen Z.X. Compositional mapping of the argon–methane–hydrogen system for polycrystalline to nanocrystalline diamond film growth in a hot-filament chemicalvapor deposition system // Appl.

Phys. Lett. 2000. v.77. p.2692-2694.178. Corat E.G., Goodwin D.G. Temperature dependence of species concentrations near the substrateduring diamond chemical vapor deposition // J. Appl. Phys. 1993. v.74. p.2021-2029179. Winters H.F. The activated, dissociative chemisorption of methane on tungsten // J.

Chem. Phys.1975. v.62. p.2454-2460.180. Winters H.F. The kinetic isotope effect in the dissociative chemisorption of methane // J. Chem.Phys. 1976. v.64. p.3495-3500.181. Winters H.F., Seki H., Rye R.R., Coltrin M.E. Interaction of hydrogen, methane, ethylene, andcyclopentane with hot tungsten: Implications for the growth of diamond films // J.

Appl. Phys. 1994.v.76. p.1228-1243.182. Wahl E.H., Owano T.G., Kruger C.H., Ma Y., Zalicki P., Zare R.N. Spatially resolvedmeasurements of absolute CH3 concentration in a hot-filament reactor // Diam. Relat. Mater. 1997. v.6.p.476-480.183. Redman S.A., Langford S.R., Rosser K.N., Ashfold M.N.R. Use of resonance-enhancedmultiphoton ionization (REMPI) for probing hydrogen atoms in diamond CVD using a hot filamentreactor // Proc. SPIE (Lasers in Synthesis, Characterization, and Processing of Diamond, Eds. V. I.Konov; V. G.

Ralchenko), 1998. v.3484. p.34-42.184. Makimoto T., Kobayashi N. Nitridation of GaAs surfaces using nitrogen through a hot tungstenfilament // Appl. Phys. Lett. 1995. v.67. v.548-550.185. Touloukian Y.S., D.P. de Witt // in “Thermal Radiative Properties: Nonmetallic Solids,Thermophysical Properties of Matter”, edited by Y.S. Touloukian, C.Y. Ho. Plenum: New York. 1972.v.8.

p. 811.186. Sommer M., Smith F. W. Effect of oxygen on filament activity in diamond chemical vapordeposition // J. Vac. Sci. Technol. A. 1991. v.9. p.1134-1139.187. May P.W., Burridge P.R., Rego C.A., Tsang R.S., Ashfold M.N.R., Rosser K.N., Tanner R.E.,Cherns D., Vincent R. Investigation of the addition of nitrogen-containing gases to a hot filamentdiamond CVD reactor // Diam. Relat. Mater. 1996.

v.5. p.354-358.188. Comerford D.W. Probing hot filament activated gas mixtures used in diamond chemical vapourdeposition / Ph.D. Thesis. University of Bristol. 2007.189. Clarke R.P., Pease R.N. A Preliminary Study of the Kinetics of Pyrolysis of Diborane // J.

Am.Chem. Soc. 1951. v.73. p.2132-2134.190. Greenwood N.N., Greatrex R. Kinetics and mechanism of the thermolysis and photolysis ofbinary boranes // Pure Appl. Chem. 1987. v.59. p.857-868 и ссылки в ней.191. Lipscomb W.N. Eelectron correlation effects in boron hydride structures. Intermediates andreactions // Pure and Applied Chemistry. 1983. v.55. p.1431-1438.192. Sato K., Kanda N., Ogata T., Kumashiro Yu. Structures of the main precursors and initialdecomposition products of diborane chemical vapor deposition: an experimental and ab initiomolecular orbital study // Chem.

Physics Lett. 2000. v.325. p.453-456.193. Colket M. B., Montgomery J. A., Jr. A Proposed Mechanism for the Pyrolysis of Diborane //United Technologies Research Center, East Hartford, CT 06108. Presentation to the Joint TechnicalMeeting of the Eastern States and Central States Section of the Combustion Institute, New Orleans,LA March 15-17, 1993.194. NIST-JANAF Thermochemical Tables, 4th ed., Chase M. W. Jr., Ed. // J. Phys. Chem. Ref.

Data,Monograph, 1998. v.9.195. Yu C.-L., Bauer S.H. Thermochemistry of the boranes // J. Phys. Chem. Ref. Data. 1998. v.27.p.807-835.196. Yetter R.A., Rabitz H., Dryer F.L., Brown R.C., Kolb C.E. Kinetics of High-TemperatureB/O/H/C Chemistry // Combust. Flame. 1991. v.83. p.43-62.197. Pasternack L. Homogeneous gas-phase modeling of boron/oxygen/hydrogen/carbon combustion// Combust. Flame. 1992. v.90. p.259-268.307198. Bauer S.H. Oxidation of B, BH, BH2, and BmHn species: Thermochemistry and Kinetics // Chem.Rev.

1996. v.96. p.1907-1916.199. Lavrov B.P., Osiac M., Pipa A.V., Ropcke J. On the spectroscopic detection of neutral species ina low-pressure plasma containing boron and hydrogen // Plasma Sources Sci. Technol. 2003. v.12.p.576-589.200. Rayar M., Veis P., Foissac C., Supiot P., Gicquel A. Gas temperature determination using BH (0–0) A1Π → X1Σ+ emission spectrum in a B2H6 containing plasma for doped diamond deposition // J.Phys.D: Appl. Phys. 2006. v.39. p.2151-2159.201. Rablen P.R. Large effect on borane bond dissociation energies resulting from coordination byLewis bases // J.

Am. Chem. Soc. 1997. v.119. p.8350-8360.202. Chin C.-H., Mebel A.M., Hwang D.-Y. Theoretical Study of the Reaction Mechanism of BO,B2O2, and BS with H2 // J. Phys. Chem. A. 2004. v.108. p.473-483.203. Forni A., Desjonqueres M.C., Spanjaard D., Tantardini G.F. Dynamical study of the adsorption ofhydrogen on the W(001) surface // Surf. Sci. 1992. v.269–270. p.201-206.204 Haywood D.O., Trapnell B.M.W. Chemisorption // Butterworth,Washington, DC, 1964.205. Ko S.M., Schmidt L.D.

Adsorption and solution of H2 and N2 by Ta and Nb // Surf. Sci. 1974.v.42. p.508-524.206. Morris M.A., Bowker M., King D.A. // in Comprehensive Chemical Kinetics, edited by C. H.Bamford, C. F. H. Tipper, R. G. Compton. Elsevier: New York. 1984. v.19. p.1.207. Bose S., Geetharani K., Varghese B., Mobin S.M., Ghosh S. Metallaboranes of the EarlyTransition Metals: Direct Synthesis and Characteriz. // Chem.-Eur.

J. 2008, v.14. p.9058-9064208. Григорьев И.С., Мейлихов Е.З. (редакторы). «Физические величины» / Справочник.Москва. Энергоатомиздат. 1991. 1232 с.209. Yarbrough W.A., Tankala K., Mecray M., DebRoy T. Hydrogen assisted heat transfer duringdiamond growth using carbon and tantalum filaments // Appl. Phys. Lett. 1992. v.60.

p.2068-2070.210. Eenshuistra P.J., Bonnie J.H.M., Los J., Hopman H.J. Observation of Exceptionally HighVibrational Excitation of Hydrogen Molecules Formed by Wall Recombination // Phys. Rev. Lett.1988. v.60. p.341-344.211. Hall R.I., Čadež I., Landau M., Pichou F., Schermann C. Vibrational Excitation of Hydrogen viaRecombinative Desorption of Atomic Hydrogen Gas on a Metal Surface // Phys. Rev. Lett. 1988. v.60.p.337-340.212. Mimeault V.

J., Hansen R. S. Nitrogen Adsorption on Iridium and Rhodium // J. Phys. Chem.1966. v.70. p.3001-3003.213. Miyazaki E., Kojima I., Kojima S. Chemisorption of molecular nitrogen on palladium surfaces atand above room temperature // Langmuir. 1985. v.1. p.264-266.214. Toda M., Yanagisawa J., Gamo K., Akasaka Y.J. Formation of GaN films by Ga ion directdeposition under N radical atmosphere // J. Vac. Sci. Tech. B.