Richard Leach - Fundamental prinsiples of engineering nanometrology (778895), страница 40
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XI Int. Colloq. Surfaces,Chemnitz, Germany, Feb. 164–170175This page intentionally left blankCHAPTER 7Scanning probe and particlebeam microscopyDr. Alexandre CuenatNational Physical LaboratoryAs technology moves deeper into the realm of the microscopic bymanufacturing smaller components, it becomes essential to measure ata suitable scale and resolution.
This scale is in the nanometre range and theresolution expected is of the order of atomic distances or even smaller. In thelate seventeenth century, the development of optical microscopes enabledscientists to observe structure on the scale of micrometres. Until thetwentieth century, the optical microscope was the fundamental instrumentthat enabled progress in materials and biological sciences. However, theobservation of single atoms requires far more resolution than visible light canprovide.In the beginning of the twentieth century, the electron microscope wasdeveloped based on the newly discovered wave-like properties of the electron.Indeed, electrons with sufficient energy will have a wavelength comparable tothe diameter of an atom or smaller.
Unfortunately, electron optics limit theresolution that an electron microscope can reach and true atom-by-atomresolution is far from routine.A study of surface atoms is even more challenging and requires a differenttype of probe. Indeed, high-energy electrons will penetrate into the bulkmaterial without providing surface information, and low-energy electronswill be scattered by the surface. For many years, scientists have useddiffraction phenomena to study the atomic ordering at surfaces, but thelateral resolution is still of the order of a micrometre.The development of the scanning tunnelling microscope (STM) by GerdBinnig and Heinrich Rohrer in 1982 [1] was a major tool in the development of a new field of human endeavour – nanotechnology. The STMenabled the next step in imaging and probing technology.
The STM mayFundamental Principles of Engineering NanometrologyCopyright Ó 2010 by Elsevier Inc. All rights reserved.CONTENTSScanning probemicroscopyScanning tunnellingmicroscopyAtomic forcemicroscopyScanning probemicroscopy ofnanoparticlesElectron microscopyOther particle beammicroscopy techniquesReferences177178C H A P T ER 7 : Scanning probe and particle beam microscopynot have been the first scanning probe system, but the atomic resolution itdemonstrated captured the imagination of the scientific community. Sincethen, a series of near-field methods have been developed, capable ofprobing or imaging many physical or chemical properties with nanometrescale resolution. All these new microscopes are based on the same principle: a very sharp tip, with a radius typically of a few nanometres, isscanned in close proximity to a surface using a piezoelectric scanner. Thevery localised detection of forces in the near-field is in marked contrastwith previous instruments, which detected forces over much larger areas orused far-field wave phenomena.
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