Принципы нанометрологии (1027506), страница 28
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R. Soc. A 456 701–729CHAPTER 6Surface topographymeasurementinstrumentation6.1 Introduction to surface topography measurementMost manufactured parts rely on some form of control of their surfacefeatures. The surface is usually the feature on a component or device thatinteracts with the environment in which the component is housed or thedevice operates. The surface topography (and of course the material characteristics) of a part can affect things such as how two bearing parts slidetogether, how light interacts with the part, or how the part looks and feels.The need to control and, hence, measure surface features becomes increasingly important as we move into a miniaturized world. The surface featurescan become the dominant functional features of a part and may become largein comparison to the overall size of an object.There is a veritable dictionary-sized list of terminology associated withthe field of surface measurement.
In this book I have tried to be consistentwith ISO specification standards and the NPL good practice guides [1,2]. Wedefine surface topography as the overall surface structure of a part (i.e. all thesurface features treated as a continuum of spatial wavelengths), surface formas the underlying shape of a part (for example, a cylinder liner has cylindricalform) and surface texture as the features that remain once the form has beenremoved (for example, machining marks on the cylinder liner).
The mannerin which a surface governs the functionality of a part is also affected by thematerial characteristics and sub-surface physics, or surface integrity. Surfaceintegrity is not covered in this book as it falls under material science (see [3]).This book will concentrate on the measurement of surface texture, as thisis the main feature that will affect MNT parts and processes. In many waysform becomes texture as the overall size of the part approaches that of itssurface features, so this distinction is not always clear-cut.
In the field ofoptics manufacturing the surface form and texture often both need to becontrolled to nanometric accuracy. A recent example where the macro-worldFundamental Principles of Engineering NanometrologyCopyright Ó 2010 by Elsevier Inc. All rights reserved.CONTENTSIntroduction to surfacetopographymeasurementSpatial wavelengthrangesHistorical backgroundof classical surfacetexture measuringinstrumentationSurface profilemeasurementAreal surface texturemeasurementSurface topographymeasuringinstrumentationOptical instrumentsCapacitiveinstrumentsPneumaticinstrumentsCalibration of surfacetopography measuringinstruments115116C H A P T ER 6 : Surface topography measurement instrumentationCONTENTSUncertainties in surfacetopographymeasurementComparisons of surfacetopography measuringinstrumentsSoftware measurementstandardsReferencesmeets the MNTworld is the proposal for a 42 m diameter off-axis ellipsoidalprimary mirror for the E-ELT optical telescope [4,5].
This will be made fromseveral 1.42 m across-flats hexagonal mirror segments that need phenomenal control of their surface topography. Such mirrors are not usually thoughtof as MNT devices, but they clearly need engineering nanometrology. We willonly consider surface texture in this book; the measurement of surface formin the optics industry is covered in many other text books and references (seefor example [6]). Surface texture measurement has been under research forover a century and it was naturally taken up by most of the NMIs as their firstMNTsubject.
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